Controllable atomic layer deposition of one-dimensional nanotubular TiO2

► One-dimensional TiO2 nanotubes were synthesized by atomic layer deposition (ALD). ► Two substrates were used in ALD-TiO2, anodic aluminum oxide (AAO) and carbon nanotubes (CNTs). ► The two routes resulted in pure TiO2 nanotube arrays and coaxial TiO2-CNT nanotubes, respectively. ► The TiO2 nanotub...

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Published inApplied surface science Vol. 266; pp. 132 - 140
Main Authors Meng, Xiangbo, Banis, Mohammad Norouzi, Geng, Dongsheng, Li, Xifei, Zhang, Yong, Li, Ruying, Abou-Rachid, Hakima, Sun, Xueliang
Format Journal Article
LanguageEnglish
Published Amsterdam Elsevier B.V 01.02.2013
Elsevier
Subjects
Anodic aluminum oxide
Atomic layer deposition
Carbon nanotubes
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science; rheology
Exact sciences and technology
Nanotubes
Physics
Titanium oxide
Carbon nanotubes
Anodic aluminum oxide
Atomic layer deposition
Titanium oxide
Nanotubes
Inorganic compounds
Transition element compounds
Aluminium
One-dimensional systems
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Abstract ► One-dimensional TiO2 nanotubes were synthesized by atomic layer deposition (ALD). ► Two substrates were used in ALD-TiO2, anodic aluminum oxide (AAO) and carbon nanotubes (CNTs). ► The two routes resulted in pure TiO2 nanotube arrays and coaxial TiO2-CNT nanotubes, respectively. ► The TiO2 nanotubes could be tuned from amorphous to crystalline phase in the range 150–250°C. ► The TiO2 nanotubes could also be controlled on their wall thickness. This study aimed at synthesizing one-dimensional (1D) nanostructures of TiO2 using atomic layer deposition (ALD) on anodic aluminum oxide (AAO) templates and carbon nanotubes (CNTs). The precursors used are titanium tetraisopropoxide (TTIP, Ti(OCH(CH3)2)4) and deionized water. It was found that the morphologies and structural phases of as-deposited TiO2 are controllable through adjusting cycling numbers of ALD and growth temperatures. Commonly, a low temperature (150°C) produced amorphous TiO2 while a high temperature (250°C) led to crystalline anatase TiO2 on both AAO and CNTs. In addition, it was revealed that the deposition of TiO2 is also subject to the influences of the applied substrates. The work well demonstrated that ALD is a precise route to synthesize 1D nanostructures of TiO2. The resultant nanostructured TiO2 can be important candidates in many applications, such as water splitting, solar cells, lithium-ion batteries, and gas sensors.
AbstractList ► One-dimensional TiO2 nanotubes were synthesized by atomic layer deposition (ALD). ► Two substrates were used in ALD-TiO2, anodic aluminum oxide (AAO) and carbon nanotubes (CNTs). ► The two routes resulted in pure TiO2 nanotube arrays and coaxial TiO2-CNT nanotubes, respectively. ► The TiO2 nanotubes could be tuned from amorphous to crystalline phase in the range 150–250°C. ► The TiO2 nanotubes could also be controlled on their wall thickness. This study aimed at synthesizing one-dimensional (1D) nanostructures of TiO2 using atomic layer deposition (ALD) on anodic aluminum oxide (AAO) templates and carbon nanotubes (CNTs). The precursors used are titanium tetraisopropoxide (TTIP, Ti(OCH(CH3)2)4) and deionized water. It was found that the morphologies and structural phases of as-deposited TiO2 are controllable through adjusting cycling numbers of ALD and growth temperatures. Commonly, a low temperature (150°C) produced amorphous TiO2 while a high temperature (250°C) led to crystalline anatase TiO2 on both AAO and CNTs. In addition, it was revealed that the deposition of TiO2 is also subject to the influences of the applied substrates. The work well demonstrated that ALD is a precise route to synthesize 1D nanostructures of TiO2. The resultant nanostructured TiO2 can be important candidates in many applications, such as water splitting, solar cells, lithium-ion batteries, and gas sensors.
Author Abou-Rachid, Hakima
Meng, Xiangbo
Li, Xifei
Banis, Mohammad Norouzi
Li, Ruying
Geng, Dongsheng
Zhang, Yong
Sun, Xueliang
Author_xml – sequence: 1
  givenname: Xiangbo
  surname: Meng
  fullname: Meng, Xiangbo
  organization: Department of Mechanical and Materials Engineering,The University of Western Ontario, London, ON N6A 5B8, Canada
– sequence: 2
  givenname: Mohammad Norouzi
  surname: Banis
  fullname: Banis, Mohammad Norouzi
  organization: Department of Mechanical and Materials Engineering,The University of Western Ontario, London, ON N6A 5B8, Canada
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  givenname: Dongsheng
  surname: Geng
  fullname: Geng, Dongsheng
  organization: Department of Mechanical and Materials Engineering,The University of Western Ontario, London, ON N6A 5B8, Canada
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  givenname: Xifei
  surname: Li
  fullname: Li, Xifei
  organization: Department of Mechanical and Materials Engineering,The University of Western Ontario, London, ON N6A 5B8, Canada
– sequence: 5
  givenname: Yong
  surname: Zhang
  fullname: Zhang, Yong
  organization: Department of Mechanical and Materials Engineering,The University of Western Ontario, London, ON N6A 5B8, Canada
– sequence: 6
  givenname: Ruying
  surname: Li
  fullname: Li, Ruying
  organization: Department of Mechanical and Materials Engineering,The University of Western Ontario, London, ON N6A 5B8, Canada
– sequence: 7
  givenname: Hakima
  surname: Abou-Rachid
  fullname: Abou-Rachid, Hakima
  email: Hakima.Abou-Rachid@drdc-rddc.gc.ca
  organization: Defense Research & Development Canada–Valcartier, 2459 Boulevard PieXI Nord, Québec, QC G3 J 1X5, Canada
– sequence: 8
  givenname: Xueliang
  surname: Sun
  fullname: Sun, Xueliang
  email: xsun@eng.uwo.ca
  organization: Department of Mechanical and Materials Engineering,The University of Western Ontario, London, ON N6A 5B8, Canada
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Keywords Carbon nanotubes
Anodic aluminum oxide
Atomic layer deposition
Titanium oxide
Nanotubes
Inorganic compounds
Transition element compounds
Aluminium
One-dimensional systems
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Snippet ► One-dimensional TiO2 nanotubes were synthesized by atomic layer deposition (ALD). ► Two substrates were used in ALD-TiO2, anodic aluminum oxide (AAO) and...
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StartPage 132
SubjectTerms Anodic aluminum oxide
Atomic layer deposition
Carbon nanotubes
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science; rheology
Exact sciences and technology
Nanotubes
Physics
Titanium oxide
Title Controllable atomic layer deposition of one-dimensional nanotubular TiO2
URI https://dx.doi.org/10.1016/j.apsusc.2012.11.116
Volume 266
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