Recent advances in high-performance millimeter-Wave acoustic resonators and filters using thin-film lithium niobate

• Published in: Progress in quantum electronics Vol. 100-101; p. 100565
• Main Author: Lu, Ruochen
• Format: Journal Article
• Language: English
• Published: Elsevier Ltd 01.03.2025
• Subjects: Acoustic filters; Lithium niobate; Micro electromechanical resonators; Millimeter-wave; Piezoelectric devices; Thin-film devices; Thin-film devices; Millimeter-wave; Acoustic filters; Lithium niobate; Micro electromechanical resonators; Piezoelectric devices

This paper reviews recent advances in millimeter-wave (mmWave) piezoelectric acoustic resonators and filters, based on thin-film lithium niobate (LN) platforms. Recent utilization of transferred thin-film LN (TFLN) on various substrates has enabled high-performance microelectromechanical systems (ME...