Recent advances in high-performance millimeter-Wave acoustic resonators and filters using thin-film lithium niobate

This paper reviews recent advances in millimeter-wave (mmWave) piezoelectric acoustic resonators and filters, based on thin-film lithium niobate (LN) platforms. Recent utilization of transferred thin-film LN (TFLN) on various substrates has enabled high-performance microelectromechanical systems (ME...

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Published inProgress in quantum electronics Vol. 100-101; p. 100565
Main Author Lu, Ruochen
Format Journal Article
LanguageEnglish
Published Elsevier Ltd 01.03.2025
Subjects
Acoustic filters
Lithium niobate
Micro electromechanical resonators
Millimeter-wave
Piezoelectric devices
Thin-film devices
Thin-film devices
Millimeter-wave
Acoustic filters
Lithium niobate
Micro electromechanical resonators
Piezoelectric devices
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Abstract This paper reviews recent advances in millimeter-wave (mmWave) piezoelectric acoustic resonators and filters, based on thin-film lithium niobate (LN) platforms. Recent utilization of transferred thin-film LN (TFLN) on various substrates has enabled high-performance microelectromechanical systems (MEMS) devices. For mmWave applications, TFLN supports an assortment of acoustic modes with large electromechanical coupling (k2), high quality factors (Q), and great frequency scalability. These features have led to significant recent performance enhancements in low-loss and wideband resonators and filters using TFLN. More specifically, acoustic resonators between 18 and 100 GHz have been demonstrated with low loss, compact form factors, and strong piezoelectric coupling. Acoustic filters have also been shown at mmWave frequency ranges, beyond the conventional sub-6 GHz operating range, toward addressing the stringent demands of future wireless communication systems. The review starts by analyzing the background and challenges of frequency scaling incumbent acoustic technologies, then introduces the unique potentials of TFLN platforms for mmWave resonator applications, highlighting fabrication techniques and novel device architecture. Beyond this, periodically poled piezoelectric film (P3F) LN is highlighted. The multi-layer structure with alternating orientations in adjacent layers enables high figure of merit (FoM = k2∙Q) acoustic devices at mmWave, efficiently coupling electrical and mechanical energy while minimizing damping in thicker film stacks. Finally, mmWave acoustic filter implementations have been reviewed and followed by outlooks for future work in mmWave acoustics.
AbstractList This paper reviews recent advances in millimeter-wave (mmWave) piezoelectric acoustic resonators and filters, based on thin-film lithium niobate (LN) platforms. Recent utilization of transferred thin-film LN (TFLN) on various substrates has enabled high-performance microelectromechanical systems (MEMS) devices. For mmWave applications, TFLN supports an assortment of acoustic modes with large electromechanical coupling (k2), high quality factors (Q), and great frequency scalability. These features have led to significant recent performance enhancements in low-loss and wideband resonators and filters using TFLN. More specifically, acoustic resonators between 18 and 100 GHz have been demonstrated with low loss, compact form factors, and strong piezoelectric coupling. Acoustic filters have also been shown at mmWave frequency ranges, beyond the conventional sub-6 GHz operating range, toward addressing the stringent demands of future wireless communication systems. The review starts by analyzing the background and challenges of frequency scaling incumbent acoustic technologies, then introduces the unique potentials of TFLN platforms for mmWave resonator applications, highlighting fabrication techniques and novel device architecture. Beyond this, periodically poled piezoelectric film (P3F) LN is highlighted. The multi-layer structure with alternating orientations in adjacent layers enables high figure of merit (FoM = k2∙Q) acoustic devices at mmWave, efficiently coupling electrical and mechanical energy while minimizing damping in thicker film stacks. Finally, mmWave acoustic filter implementations have been reviewed and followed by outlooks for future work in mmWave acoustics.
ArticleNumber 100565
Author Lu, Ruochen
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  organization: The University of Texas at Austin, Austin, TX, USA
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Cites_doi 10.1109/JMEMS.2019.2892708
10.1109/JMEMS.2020.3026167
10.1038/s41586-018-0719-5
10.1109/ACCESS.2018.2872781
10.1109/LMWC.2022.3166682
10.1109/TMTT.2019.2949808
10.1109/TMTT.2020.3027694
10.1143/JJAP.46.4744
10.1109/TED.2024.3418722
10.1109/JMEMS.2022.3204449
10.1109/JMEMS.2018.2847310
10.1109/JMEMS.2022.3167430
10.1038/s41467-024-48167-7
10.1038/s41928-019-0355-6
10.1109/ACCESS.2018.2865808
10.1109/MWSYM.2019.8700876
10.1109/TMTT.2018.2854160
10.1016/j.sna.2014.01.033
10.35848/1347-4065/aca5d7
10.1109/2944.826874
10.1080/21663831.2023.2279667
10.1109/TMTT.2020.3006294
10.1109/JMW.2021.3064825
10.1063/5.0012288
10.1109/LMWT.2024.3368354
10.1109/LMWT.2025.3559400
10.1038/s41467-024-47822-3
10.1103/PhysRevApplied.15.014039
10.1109/OJCOMS.2020.3010270
10.1002/pssr.201900535
10.1109/MCOMSTD.2017.1700042
10.1109/JMEMS.2021.3092724
10.1109/TMTT.2021.3077261
10.1088/1361-6463/aaee59
10.1364/AOP.411024
10.2109/jcersj2.118.1166
10.1109/TMTT.2018.2890661
10.1364/OPTICA.6.001498
10.1364/OPTICA.427428
10.1109/TUFFC.889
10.1109/TMTT.2022.3230722
10.1109/JMEMS.2023.3344018
10.1109/JMEMS.2021.3137928
10.1109/LMWC.2006.885610
10.3390/cryst11040397
10.1021/acs.jpcc.1c01523
10.1109/TUFFC.2019.2943355
10.1541/ieejsmas.130.236
10.1109/MMM.2015.2431236
10.1109/MMM.2014.2321263
10.1109/LED.2020.3007062
10.1109/TUFFC.2020.3039471
10.1109/LMWT.2023.3267449
10.1038/s41928-023-00999-9
10.1121/1.385588
10.1109/JMEMS.2021.3114627
10.1109/JSEN.2025.3555885
10.1109/JMEMS.2020.2982775
10.1109/JMEMS.2023.3314666
10.1063/1.1652627
10.1109/JMEMS.2020.3007590
10.1109/LMWC.2021.3068624
10.1109/5.796358
10.1109/4.839911
10.1109/TED.2024.3435175
10.1088/1361-6439/ab5b7b
10.1109/TMTT.2021.3074918
10.1007/s11664-001-0067-2
10.1049/el.2018.7297
10.1088/1361-6439/ac288f
10.1109/TMTT.2022.3194723
10.1109/JMEMS.2019.2922935
10.1109/TMTT.1972.1127732
10.1364/OE.27.009794
10.1016/j.sna.2007.01.008
10.1109/JMEMS.2023.3321284
10.1109/LMWC.2018.2876769
10.1109/TMTT.2023.3316358
10.1109/LED.2024.3404477
10.1109/TMTT.2020.3033554
10.1063/1.3258496
10.35848/1347-4065/ac3f6f
10.1063/1.1399305
10.1088/1361-6439/abf1b5
10.1109/MCOM.2014.6979985
10.1063/1.4788728
10.1109/JMEMS.2014.2384916
10.1109/TUFFC.2019.2916259
10.1063/1.106092
10.1007/BF00614817
10.1109/MMM.2015.2429513
10.1049/el.2019.1658
10.1109/TCPMT.2020.3041412
10.1109/TMTT.1974.1128241
10.1109/TUFFC.2023.3312913
10.1109/TMTT.2012.2228671
10.1109/MMM.2015.2429512
10.1063/5.0097458
10.1109/6668.969936
10.1038/s41467-024-51735-6
10.1016/j.ndteint.2003.09.007
10.20965/ijat.2018.p0739
10.1109/TUFFC.2017.2690905
10.1109/MMM.2007.903649
10.1109/TVLSI.2022.3142235
10.1143/JJAP.36.1636
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Keywords Thin-film devices
Millimeter-wave
Acoustic filters
Lithium niobate
Micro electromechanical resonators
Piezoelectric devices
Language English
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References Chen, Wu (bib22) 2014; 15
Zhang, Chang, Barrera, Ahmed, Kramer, Lu (bib207) 2024
Wang, Bhave, Bhattacharjee (bib172) 2015; 24
Nagulu, Yi, Zhuang, Garikapati, Krishnaswamy (bib34) 2023
Mansoorzare, Abdolvand (bib151) 2022; 70
Popovski, Trillingsgaard, Simeone, Durisi (bib3) 2018; 6
Colombo, Kochhar, Vidal-Álvarez, Piazza (bib139) 2018; 27
Moulet (bib120) 2008
Zhang (bib161) 2020; 68
Kadota, Tanaka (bib173) 2016
Yang, Lu, Gao, Gong (bib70) 2019; 28
Sato, Yanagitani (bib127) 2020
Nordquist (bib44) 2021
Wang, Bhave (bib171) 2012
Lu, Yang, Li, Breen, Gong (bib99) 2019; 68
Lu, Gong (bib197) Jun. 2015
Wagner, Gossmann, Tomasik, Weigel, Hagelauer (bib205) 2019
Li (bib213) 2024
Turner (bib72) Aug. 2019; 55
.
Chulukhadze (bib76) 2023
Weis, Gaylord (bib113) 1985; 37
Shen (bib164) 2021; 69
Hashimoto (bib37) 2009
Hsu (bib83) 2024
Kuznetsova, Zaitsev, Teplykh, Joshi, Kuznetsova (bib176) 2008; 55
Hsu, Campbell, Kramer, Cho, Li, Lu (bib78) 2024
Akiyama, Tabaru, Nishikubo, Teshigahara, Kano (bib126) 2010; 118
Fang, Yang, Lin, Tao, Chen, Zuo (bib92) 2024
Hagelauer (bib14) 2022
Lu, Yang, Hassanien, Gong (bib157) 2021; 69
Atia, Williams (bib21) 1972; 20
Kim (bib47) 2021
Kochhar, Colombo, Vidal-Alvarez, Piazza (bib144) 2017
Tetro, Colombo, Rinaldi (bib86) 2024
Cho (bib56) 2024
Wang, Bhave, Bhattacharjee (bib170) 2013
Schaffer, Hassanien, Masud, Piazza (bib51) 2023
Lu, Gong (bib178) 2021
Steer (bib189) 2019
Skrimponis (bib11) 2020
Bajak, McNab, Richter, Wilkinson (bib187) 1981; 69
Du (bib30) 2024
Ansari (bib81) 2023
Faizan, Villanueva (bib186) 2019; 30
Aspar (bib123) 2001; 30
Mansoorzare, Abdolvand (bib152) 2021
Barrera (bib190) 2024
Zhao (bib134) 2022; 132
Watanabe, Takahashi, Nagae, Tsuji (bib121) 2018; 12
Yang, Lu, Gong (bib115) 2018
Dang, Amin, Shihada, Alouini (bib10) 2020; 3
Gong, Lu, Yang, Gao, Hassanien (bib12) 2021; 1
Su (bib165) 2021
Leone (bib131) 2020; 14
Lu, Gong (bib183) 2021
Gorisse (bib149) 2019
Kadota, Ishii, Tanaka (bib160) 2020; 68
Barrera (bib221) 2023; 32
Park, Esashi, Tanaka (bib122) 2010; 130
Tetro, Colombo, Gubinelli, Giribaldi, Rinaldi (bib84) 2024
Lu, Li, Yang, Manzaneque, Gong (bib94) 2019; 28
Hsu, Tseng, Li (bib167) 2021; 31
Mishra (bib156) 2021; 8
Barrera, Lu (bib193) 2023
Lu, Yang, Li, Manzaneque, Gong (bib182) 2019; 67
Musavigharavi (bib124) 2021; 125
Simeoni, Schaffer, Piazza (bib137) 2021
Dahlman (bib1) 2014; 52
Ruby (bib8) 2015; 16
Barrera (bib57) 2024
Ali (bib18) 2018; 28
Chulukhadze, Wang, Anderson, Kramer, Cho, Lu (bib180) 2025
Niu (bib110) 2025
Sarabalis, McKenna, Patel, Van Laer, Safavi-Naeini (bib154) 2020; 5
Ruby, Bradley, Clark, Feld, Jamneala, Wang (bib17) 2004; 2
Baucom, Hershkovitz, Chojecki, Nishida, Tabrizian, Kim (bib66) May 2024; n/a
Lu, Manzaneque, Yang, Li, Gong (bib181) 2019; 66
Miller, Wright, Xing, Jena (bib135) 2020; 217
Collins, Gerard, Shaw (bib109) 1968; 13
Zhu (bib216) 2021; 13
Boria, Gimeno (bib23) 2007; 8
Tharpe, Hershkovitz, Hakim, Kim, Tabrizian (bib67) 2023; 6
Chowdhury, Shahjalal, Ahmed, Jang (bib2) 2020; 1
Hagelauer, Fattinger, Ruppel, Ueda, Hashimoto, Tag (bib15) 2018; 66
Yang, Lu, Manzaneque, Gong (bib142) 2018
Pozar (bib203) 2009
Yan, Chang, Wang, Wu, Chen (bib19) 2002
Cai, Mahmoud, Piazza (bib143) 2019; 27
Lu, Gong (bib210) 2015
Mayor, Jiang, Sarabalis, McKenna, Witmer, Safavi-Naeini (bib155) 2021; 15
Kramer (bib195) 2023
Colombo, Kochhar, Vidal-Álvarez, Piazza (bib136) 2020
Satzinger (bib217) 2018; 563
Zhang (bib71) 2023
Cho (bib209) 2024; 34
Du (bib32) 2024
Giribaldi, Colombo, Rinaldi (bib61) 2023; 70
Bauer, Eggs, Wagner, Hagn (bib6) 2015; 16
Schaffer, Hassanien, Masud, Piazza (bib49) 2023
Lu, Yang, Link, Gong (bib194) Oct. 2020; 29
Gong, Piazza (bib185) Jan. 2013; 61
Kramer (bib188) 2022
Sun, Zhang, Zheng, Fang, Ou (bib89) 2024
Cho (bib58) 2023
Warder, Link (bib7) 2015; 16
Rebeiz, Muldavin (bib9) 2001; 2
Hashimoto (bib36) 2000
Parkvall, Dahlman, Furuskar, Frenne (bib93) 2017; 1
Beaucejour, Roebisch, Kochhar, Moe, Hodge, Olsson (bib125) 2022; 31
Ruby, Gilbert, Lee, Nilchi, Kim (bib42) 2021; 31
Bruel, Aspar, Auberton-Hervé (bib118) 1997; 36
Vetury, Hodge, Shealy (bib46) 2018
Bousquet (bib148) 2020; 2020-Septe
Du (bib31) 2024; 15
Menendez, de Paco, Villarino, Parron (bib204) 2006; 16
Barrera, Cho, Kramer, Chulukhadze, Campbell, Lu (bib208) 2024
Park, Wang, Wang, Mi, Ansari (bib80) 2024; 45
Vetury, Kochhar, Shealy (bib45) 2022
Ruppel (bib201) 2017; 64
Colombo, Kochhar, Vidal-Álvarez, Simeoni, Soysal, Piazza (bib74) 2022; 31
Gimenez, Verdu, Sánchez (bib200) 2018; 6
Phelps, Chan, Abdolvand (bib166) 2021
Shen, He, Feng, Wen, Xue, Che (bib214) 2024; 72
Devitt, Tiwari, Bhave, Wang (bib28) 2024
Shen (bib163) 2022; 31
Lakin (bib179) 1974; 22
Giribaldi, Colombo, Castellani, Masud, Piazza, Rinaldi (bib48) 2024
Kimura, Omura, Kishimoto, Hashimoto (bib97) 2019; 67
Shen, Yang, Feng, Xue, Che (bib212) 2023; 71
Lu, Yang, Gong (bib100) 2021; 30
Gubinelli, Simeoni, Tetro, Colombo, Rinaldi (bib62) 2024
Ruby, Bradley, Oshmyansky, Chien, Larson (bib39) 2001
Wu, Yang, Lin, Zuo (bib91) 2022
Izhar (bib55) 2024; 71
Pijolat (bib138) 2009; 95
Barrera (bib222) 2024
Tian (bib90) 2024
Zivasatienraj, Tellekamp, Doolittle (bib132) 2021; 11
Devitt, Wang, Tiwari, Bhave (bib27) 2024; 15
Zheng, Xu, Qian, Yang (bib79) 2024
T. Tharpe and R. Tabrizian, “A 9.4 GHZ INTRINSICALLY SWITCHABLE LAMB-WAVE RESONATOR USING ATOMIC-LAYER-DEPOSITED FERROELECTRIC HAFNIA-ZIRCONIA.”.
Mertin (bib129) 2017
Iyer, Kandel, Xu, Nichol, Renninger (bib102) 2024; 15
Akiyama, Umeda, Honda, Nagase (bib128) 2013; 102
Kramer (bib220) 2023
Zhao (bib43) 2024; 71
Patil, Hossain, Garikapati, Krishnaswamy, Nagulu (bib33) 2024
Lu, Yang, Gong (bib101) 2021; 30
Yin (bib106) 1999; 87
Bousquet (bib150) 2019; 2019-Octob
Vetury (bib54) 2023
Zhu (bib112) 2021; 13
Wang, Devitt, Langlois, Tiwari, Ashok, Bhave (bib25) 2024
Zhang (bib87) 2023
Campbell (bib218) 2024
Ahn, Yom (bib20) 2008
Naumenko (bib198) 2024
Olsson (bib141) 2014; 209
Bhaskar, Bhave, Weinstein (bib169) 2018; 52
Cho, Wang, Kramer, Nguyen, Lu (bib162) 2022
Plessky (bib41) 2019
Faizan (bib147) 2019
Barrera (bib215) 2025
Hsu, Lee, Wu, Yeh, Tsai, Li (bib168) 2024
Kramer, Barrera, Cho, Chulukhadze, Hsu, Lu (bib196) 2024
Schaffer, Simeoni, Piazza (bib50) 2022; 32
Bhugra, Piazza (bib38) 2017
Kochhar, Mahmoud, Shen, Turumella, Piazza (bib140) 2020; 29
Lu, Yang, Link, Gong (bib105) Jun. 2020; 29
Leduc, Morvan, Pareige, Izbicki (bib103) 2004; 37
Solal (bib174) 2022
Barrera (bib211) 2025
Tiwari, Ashok, Devitt, Bhave, Wang (bib29) 2024
Du, Sharma, Tang, Leblanc, Jariwala, Olsson (bib52) 2024
Plessky, Yandrapalli, Turner, Villanueva, Koskela, Hammond (bib146) 2018; 55
Goto, Yatsuda, Chiba (bib177) 2007; 46
Campbell (bib219) 2024
Takai (bib40) 2017
Shao (bib108) 2019; 6
Cho (bib60) 2023
Giribaldi, Colombo, Castellani, Masud, Piazza, Rinaldi (bib64) 2024
(bib95) 1988
Sun (bib88) 2024
Bao, Yang (bib104) 2007; 136
Cho (bib59) 2023; 32
Fattinger (bib96) 2016
Mansoorzare, Abdolvand (bib153) 2020; 41
Colombo, Giribaldi, Rinaldi (bib63) 2024
Chulukhadze (bib77) 2024
Pijolat (bib119) 2008
Matto, Goorsky (bib184) 2023
Kramer (bib199) 2025
Chen (bib159) 2022; 62
Butaud (bib117) 2020; 2020-Septe
Yang, Lu, Gao, Gong (bib98) Oct. 2020; 68
Yang, Lu, Gong (bib114) 2018
Schaffer, Piazza (bib75) 2022
Su (bib73) 2022
Parchin, Al-Yasir, Abd-Alhameed (bib4) 2019
Feng, Tiwari, Bhave, Wang (bib26) 2023; 33
Fakhri (bib158) 2017; vol. 162
Meng, Heremans, Cheng (bib130) 1991; 59
Chulukhadze, Kramer, Ahmed, Lu (bib206) 2023
Hakim, Rudawski, Tharpe, Tabrizian (bib68) 2023
Bannon, Clark, Nguyen (bib16) 2000; 35
COFFEE Program Jump-Starts Integrable Filtering for Wideband Superiority
Wu (bib175) 2022; 61
Izhar, Fiagbenu, Kochhar, Vetury, Olsson (bib53) 2024; 33
V. Chulukhadze, J. Kramer, T.-H. Hsu, O. Barrera, R. Lu, High-Q millimeter-wave acoustic resonators in thin-film lithium niobate using higher-order antisymmetric modes, arXiv preprint arXiv:2505.06247, Apr. 2025. [Online]. Available
Kimura, Omura, Kishimoto, Hashimoto (bib69) 2019; 67
Lee (bib111) 2001; 79
Guerrero, Silveira, Verdú, Yang, Gong, de Paco (bib202) 2021; 69
Park, Wang, Ansari (bib82) 2023
Lu, Gong (bib116) 2021; 31
Gong, Lu, Yang, Gao, Hassanien (bib13) 2021; 1
Hsu (bib85) 2024
Shams, Nabki (bib35) 2022; 30
Alvarez (bib133) 2023; 11
Watanabe, Ali, Sayeed, Tummala, Pulugurtha (bib5) 2020; 11
Wooten (bib107) 2000; 6
Yandrapalli, Küçük, Atakan, Plessky, Villanueva (bib145) 2021
Kramer (10.1016/j.pquantelec.2025.100565_bib196) 2024
Zhang (10.1016/j.pquantelec.2025.100565_bib161) 2020; 68
Lu (10.1016/j.pquantelec.2025.100565_bib197) 2015
Cho (10.1016/j.pquantelec.2025.100565_bib56) 2024
Miller (10.1016/j.pquantelec.2025.100565_bib135) 2020; 217
Kuznetsova (10.1016/j.pquantelec.2025.100565_bib176) 2008; 55
Schaffer (10.1016/j.pquantelec.2025.100565_bib49) 2023
Park (10.1016/j.pquantelec.2025.100565_bib80) 2024; 45
Akiyama (10.1016/j.pquantelec.2025.100565_bib128) 2013; 102
Mertin (10.1016/j.pquantelec.2025.100565_bib129) 2017
Kochhar (10.1016/j.pquantelec.2025.100565_bib144) 2017
Mayor (10.1016/j.pquantelec.2025.100565_bib155) 2021; 15
Lu (10.1016/j.pquantelec.2025.100565_bib100) 2021; 30
Park (10.1016/j.pquantelec.2025.100565_bib82) 2023
Shen (10.1016/j.pquantelec.2025.100565_bib164) 2021; 69
Tetro (10.1016/j.pquantelec.2025.100565_bib84) 2024
Yin (10.1016/j.pquantelec.2025.100565_bib106) 1999; 87
Simeoni (10.1016/j.pquantelec.2025.100565_bib137) 2021
Ruppel (10.1016/j.pquantelec.2025.100565_bib201) 2017; 64
Nagulu (10.1016/j.pquantelec.2025.100565_bib34) 2023
Akiyama (10.1016/j.pquantelec.2025.100565_bib126) 2010; 118
Campbell (10.1016/j.pquantelec.2025.100565_bib218) 2024
Kimura (10.1016/j.pquantelec.2025.100565_bib97) 2019; 67
Giribaldi (10.1016/j.pquantelec.2025.100565_bib48) 2024
Bannon (10.1016/j.pquantelec.2025.100565_bib16) 2000; 35
Shen (10.1016/j.pquantelec.2025.100565_bib214) 2024; 72
Colombo (10.1016/j.pquantelec.2025.100565_bib74) 2022; 31
Hagelauer (10.1016/j.pquantelec.2025.100565_bib15) 2018; 66
Lu (10.1016/j.pquantelec.2025.100565_bib182) 2019; 67
Hashimoto (10.1016/j.pquantelec.2025.100565_bib36) 2000
Vetury (10.1016/j.pquantelec.2025.100565_bib45) 2022
Mishra (10.1016/j.pquantelec.2025.100565_bib156) 2021; 8
Olsson (10.1016/j.pquantelec.2025.100565_bib141) 2014; 209
Watanabe (10.1016/j.pquantelec.2025.100565_bib121) 2018; 12
Musavigharavi (10.1016/j.pquantelec.2025.100565_bib124) 2021; 125
Hashimoto (10.1016/j.pquantelec.2025.100565_bib37) 2009
Sun (10.1016/j.pquantelec.2025.100565_bib89) 2024
Colombo (10.1016/j.pquantelec.2025.100565_bib139) 2018; 27
Pijolat (10.1016/j.pquantelec.2025.100565_bib138) 2009; 95
Matto (10.1016/j.pquantelec.2025.100565_bib184) 2023
Gong (10.1016/j.pquantelec.2025.100565_bib13) 2021; 1
Sarabalis (10.1016/j.pquantelec.2025.100565_bib154) 2020; 5
Lu (10.1016/j.pquantelec.2025.100565_bib157) 2021; 69
Lu (10.1016/j.pquantelec.2025.100565_bib94) 2019; 28
Kramer (10.1016/j.pquantelec.2025.100565_bib188) 2022
Atia (10.1016/j.pquantelec.2025.100565_bib21) 1972; 20
Popovski (10.1016/j.pquantelec.2025.100565_bib3) 2018; 6
10.1016/j.pquantelec.2025.100565_bib65
Aspar (10.1016/j.pquantelec.2025.100565_bib123) 2001; 30
Parkvall (10.1016/j.pquantelec.2025.100565_bib93) 2017; 1
Chowdhury (10.1016/j.pquantelec.2025.100565_bib2) 2020; 1
Leduc (10.1016/j.pquantelec.2025.100565_bib103) 2004; 37
Rebeiz (10.1016/j.pquantelec.2025.100565_bib9) 2001; 2
Beaucejour (10.1016/j.pquantelec.2025.100565_bib125) 2022; 31
Kochhar (10.1016/j.pquantelec.2025.100565_bib140) 2020; 29
Skrimponis (10.1016/j.pquantelec.2025.100565_bib11) 2020
Chulukhadze (10.1016/j.pquantelec.2025.100565_bib76) 2023
Guerrero (10.1016/j.pquantelec.2025.100565_bib202) 2021; 69
Giribaldi (10.1016/j.pquantelec.2025.100565_bib61) 2023; 70
Iyer (10.1016/j.pquantelec.2025.100565_bib102) 2024; 15
Schaffer (10.1016/j.pquantelec.2025.100565_bib50) 2022; 32
Bauer (10.1016/j.pquantelec.2025.100565_bib6) 2015; 16
Hsu (10.1016/j.pquantelec.2025.100565_bib85) 2024
Giribaldi (10.1016/j.pquantelec.2025.100565_bib64) 2024
Park (10.1016/j.pquantelec.2025.100565_bib122) 2010; 130
Colombo (10.1016/j.pquantelec.2025.100565_bib136) 2020
Fattinger (10.1016/j.pquantelec.2025.100565_bib96) 2016
Bhugra (10.1016/j.pquantelec.2025.100565_bib38) 2017
Bajak (10.1016/j.pquantelec.2025.100565_bib187) 1981; 69
Steer (10.1016/j.pquantelec.2025.100565_bib189) 2019
Hakim (10.1016/j.pquantelec.2025.100565_bib68) 2023
Du (10.1016/j.pquantelec.2025.100565_bib30) 2024
Boria (10.1016/j.pquantelec.2025.100565_bib23) 2007; 8
Su (10.1016/j.pquantelec.2025.100565_bib73) 2022
Sun (10.1016/j.pquantelec.2025.100565_bib88) 2024
Wooten (10.1016/j.pquantelec.2025.100565_bib107) 2000; 6
Du (10.1016/j.pquantelec.2025.100565_bib31) 2024; 15
Wang (10.1016/j.pquantelec.2025.100565_bib172) 2015; 24
Zhu (10.1016/j.pquantelec.2025.100565_bib216) 2021; 13
Barrera (10.1016/j.pquantelec.2025.100565_bib211) 2025
Zivasatienraj (10.1016/j.pquantelec.2025.100565_bib132) 2021; 11
Vetury (10.1016/j.pquantelec.2025.100565_bib46) 2018
Cho (10.1016/j.pquantelec.2025.100565_bib162) 2022
Chulukhadze (10.1016/j.pquantelec.2025.100565_bib77) 2024
Sato (10.1016/j.pquantelec.2025.100565_bib127) 2020
Shen (10.1016/j.pquantelec.2025.100565_bib163) 2022; 31
Hagelauer (10.1016/j.pquantelec.2025.100565_bib14) 2022
Faizan (10.1016/j.pquantelec.2025.100565_bib186) 2019; 30
Shao (10.1016/j.pquantelec.2025.100565_bib108) 2019; 6
Faizan (10.1016/j.pquantelec.2025.100565_bib147) 2019
Chulukhadze (10.1016/j.pquantelec.2025.100565_bib206) 2023
Zheng (10.1016/j.pquantelec.2025.100565_bib79) 2024
Lu (10.1016/j.pquantelec.2025.100565_bib101) 2021; 30
Campbell (10.1016/j.pquantelec.2025.100565_bib219) 2024
Turner (10.1016/j.pquantelec.2025.100565_bib72) 2019; 55
Zhang (10.1016/j.pquantelec.2025.100565_bib207) 2024
Alvarez (10.1016/j.pquantelec.2025.100565_bib133) 2023; 11
Gorisse (10.1016/j.pquantelec.2025.100565_bib149) 2019
Wu (10.1016/j.pquantelec.2025.100565_bib175) 2022; 61
Wang (10.1016/j.pquantelec.2025.100565_bib25) 2024
10.1016/j.pquantelec.2025.100565_bib24
Schaffer (10.1016/j.pquantelec.2025.100565_bib51) 2023
Tian (10.1016/j.pquantelec.2025.100565_bib90) 2024
Yang (10.1016/j.pquantelec.2025.100565_bib115) 2018
Wu (10.1016/j.pquantelec.2025.100565_bib91) 2022
Patil (10.1016/j.pquantelec.2025.100565_bib33) 2024
Lakin (10.1016/j.pquantelec.2025.100565_bib179) 1974; 22
Chen (10.1016/j.pquantelec.2025.100565_bib159) 2022; 62
Plessky (10.1016/j.pquantelec.2025.100565_bib41) 2019
Kramer (10.1016/j.pquantelec.2025.100565_bib195) 2023
Fakhri (10.1016/j.pquantelec.2025.100565_bib158) 2017; vol. 162
Moulet (10.1016/j.pquantelec.2025.100565_bib120) 2008
Schaffer (10.1016/j.pquantelec.2025.100565_bib75) 2022
Zhang (10.1016/j.pquantelec.2025.100565_bib87) 2023
Chulukhadze (10.1016/j.pquantelec.2025.100565_bib180) 2025
Ali (10.1016/j.pquantelec.2025.100565_bib18) 2018; 28
Bhaskar (10.1016/j.pquantelec.2025.100565_bib169) 2018; 52
Ruby (10.1016/j.pquantelec.2025.100565_bib39) 2001
Niu (10.1016/j.pquantelec.2025.100565_bib110) 2025
Shen (10.1016/j.pquantelec.2025.100565_bib212) 2023; 71
Yang (10.1016/j.pquantelec.2025.100565_bib114) 2018
Barrera (10.1016/j.pquantelec.2025.100565_bib215) 2025
Bao (10.1016/j.pquantelec.2025.100565_bib104) 2007; 136
Ahn (10.1016/j.pquantelec.2025.100565_bib20) 2008
(10.1016/j.pquantelec.2025.100565_bib95) 1988
Collins (10.1016/j.pquantelec.2025.100565_bib109) 1968; 13
Dahlman (10.1016/j.pquantelec.2025.100565_bib1) 2014; 52
Zhang (10.1016/j.pquantelec.2025.100565_bib71) 2023
Zhu (10.1016/j.pquantelec.2025.100565_bib112) 2021; 13
Barrera (10.1016/j.pquantelec.2025.100565_bib208) 2024
Bousquet (10.1016/j.pquantelec.2025.100565_bib150) 2019; 2019-Octob
Du (10.1016/j.pquantelec.2025.100565_bib32) 2024
Pozar (10.1016/j.pquantelec.2025.100565_bib203) 2009
Fang (10.1016/j.pquantelec.2025.100565_bib92) 2024
Du (10.1016/j.pquantelec.2025.100565_bib52) 2024
Gong (10.1016/j.pquantelec.2025.100565_bib12) 2021; 1
Barrera (10.1016/j.pquantelec.2025.100565_bib222) 2024
Bousquet (10.1016/j.pquantelec.2025.100565_bib148) 2020; 2020-Septe
Izhar (10.1016/j.pquantelec.2025.100565_bib55) 2024; 71
Warder (10.1016/j.pquantelec.2025.100565_bib7) 2015; 16
Ruby (10.1016/j.pquantelec.2025.100565_bib17) 2004; 2
Mansoorzare (10.1016/j.pquantelec.2025.100565_bib153) 2020; 41
Parchin (10.1016/j.pquantelec.2025.100565_bib4) 2019
Satzinger (10.1016/j.pquantelec.2025.100565_bib217) 2018; 563
Lu (10.1016/j.pquantelec.2025.100565_bib116) 2021; 31
Phelps (10.1016/j.pquantelec.2025.100565_bib166) 2021
Colombo (10.1016/j.pquantelec.2025.100565_bib63) 2024
Pijolat (10.1016/j.pquantelec.2025.100565_bib119) 2008
Cho (10.1016/j.pquantelec.2025.100565_bib58) 2023
Hsu (10.1016/j.pquantelec.2025.100565_bib167) 2021; 31
Yang (10.1016/j.pquantelec.2025.100565_bib142) 2018
Vetury (10.1016/j.pquantelec.2025.100565_bib54) 2023
Weis (10.1016/j.pquantelec.2025.100565_bib113) 1985; 37
Bruel (10.1016/j.pquantelec.2025.100565_bib118) 1997; 36
Kadota (10.1016/j.pquantelec.2025.100565_bib173) 2016
Watanabe (10.1016/j.pquantelec.2025.100565_bib5) 2020; 11
Nordquist (10.1016/j.pquantelec.2025.100565_bib44) 2021
Gong (10.1016/j.pquantelec.2025.100565_bib185) 2013; 61
Feng (10.1016/j.pquantelec.2025.100565_bib26) 2023; 33
Tiwari (10.1016/j.pquantelec.2025.100565_bib29) 2024
Devitt (10.1016/j.pquantelec.2025.100565_bib28) 2024
Kadota (10.1016/j.pquantelec.2025.100565_bib160) 2020; 68
Kramer (10.1016/j.pquantelec.2025.100565_bib199) 2025
Naumenko (10.1016/j.pquantelec.2025.100565_bib198) 2024
Gimenez (10.1016/j.pquantelec.2025.100565_bib200) 2018; 6
Izhar (10.1016/j.pquantelec.2025.100565_bib53) 2024; 33
Mansoorzare (10.1016/j.pquantelec.2025.100565_bib152) 2021
Goto (10.1016/j.pquantelec.2025.100565_bib177) 2007; 46
Barrera (10.1016/j.pquantelec.2025.100565_bib193) 2023
Leone (10.1016/j.pquantelec.2025.100565_bib131) 2020; 14
Ruby (10.1016/j.pquantelec.2025.100565_bib8) 2015; 16
Lu (10.1016/j.pquantelec.2025.100565_bib99) 2019; 68
Menendez (10.1016/j.pquantelec.2025.100565_bib204) 2006; 16
Barrera (10.1016/j.pquantelec.2025.100565_bib221) 2023; 32
Gubinelli (10.1016/j.pquantelec.2025.100565_bib62) 2024
Devitt (10.1016/j.pquantelec.2025.100565_bib27) 2024; 15
Cho (10.1016/j.pquantelec.2025.100565_bib59) 2023; 32
Tetro (10.1016/j.pquantelec.2025.100565_bib86) 2024
Tharpe (10.1016/j.pquantelec.2025.100565_bib67) 2023; 6
Li (10.1016/j.pquantelec.2025.100565_bib213) 2024
Barrera (10.1016/j.pquantelec.2025.100565_bib190) 2024
Chen (10.1016/j.pquantelec.2025.100565_bib22) 2014; 15
Wang (10.1016/j.pquantelec.2025.100565_bib171) 2012
10.1016/j.pquantelec.2025.100565_bib191
Lee (10.1016/j.pquantelec.2025.100565_
References_xml – year: 2024
  ident: bib86
  article-title: 2-16 GHz Multifrequency X-Cut Lithium Niobate NEMS Resonators on a Single Chip
– start-page: 14
  year: 2022
  end-page: 16
  ident: bib188
  article-title: 57 GHz acoustic resonator with k 2 of 7.3% and Q of 56 in thin-film lithium niobate
  publication-title: 2022 International Electron Devices Meeting (IEDM)
– start-page: 1752
  year: 2019
  end-page: 1755
  ident: bib147
  article-title: Fabrication of lithium niobate bulk acoustic resonator for 5G filters
  publication-title: Transducers
– start-page: 8
  year: Jun. 2015
  end-page: 11
  ident: bib197
  article-title: Study of thermal nonlinearity in lithium niobate-based MEMS resonators
  publication-title: Transducers
– start-page: 1
  year: 2023
  end-page: 4
  ident: bib51
  article-title: Measurement of intrinsic mechanical loss in aluminum films from 3 to 25 GHz by HBAR spectroscopy
  publication-title: 2023 IEEE International Ultrasonics Symposium (IUS)
– reference: COFFEE Program Jump-Starts Integrable Filtering for Wideband Superiority,”
– volume: 55
  year: 2008
  ident: bib176
  article-title: The power flow angle of acoustic waves in thin piezoelectric plates
  publication-title: IEEE Trans. Ultrason. Ferroelectrics Freq. Control
– volume: 68
  start-page: 1955
  year: 2020
  end-page: 1964
  ident: bib160
  article-title: Surface acoustic wave resonators with hetero acoustic layer (HAL) structure using lithium tantalate and quartz
  publication-title: IEEE Trans. Ultrason. Ferroelectrics Freq. Control
– start-page: 891
  year: 2023
  end-page: 894
  ident: bib54
  article-title: A manufacturable AlScN periodically polarized piezoelectric film bulk acoustic wave resonator (AlScN P3F BAW) operating in overtone mode at X and ku band
  publication-title: 2023 IEEE/MTT-S International Microwave Symposium - IMS 2023
– volume: 2020-Septe
  start-page: 1
  year: 2020
  end-page: 4
  ident: bib148
  article-title: Lithium niobate film bulk acoustic wave resonator for sub-6 GHz filters
  publication-title: IEEE International Ultrasonics Symposium, IUS
– volume: 66
  start-page: 4548
  year: 2018
  end-page: 4562
  ident: bib15
  article-title: Microwave acoustic wave devices: recent advances on architectures, modeling, materials, and packaging
  publication-title: IEEE Trans. Microw. Theor. Tech.
– volume: 6
  start-page: 1498
  year: 2019
  end-page: 1505
  ident: bib108
  article-title: Microwave-to-optical conversion using lithium niobate thin-film acoustic resonators
  publication-title: Optica
– volume: 217
  year: 2020
  ident: bib135
  article-title: All‐epitaxial bulk acoustic wave resonators
  publication-title: Phys. Status Solidi
– year: 2023
  ident: bib68
  article-title: The ferroelectric-gate fin microwave acoustic signal processor
  publication-title: arXiv preprint arXiv:2302.01411
– start-page: 1
  year: 2021
  end-page: 4
  ident: bib137
  article-title: A 100 nm thick, 32 kHz X-cut lithium niobate piezoelectric nanoscale ultrasound transducer for airborne ultrasound communication
  publication-title: J. Microelectromech. Syst.
– year: 2025
  ident: bib211
  article-title: 50 GHz Piezoelectric Acoustic Filter
– start-page: 1102
  year: 2024
  end-page: 1105
  ident: bib84
  article-title: X-cut lithium niobate S0 mode resonators for 5G applications
  publication-title: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
– start-page: 165
  year: 2013
  end-page: 168
  ident: bib170
  article-title: High kt2×Q, multi-frequency lithium niobate resonators
  publication-title: 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)
– start-page: 962
  year: 2017
  end-page: 965
  ident: bib144
  article-title: Integration of bottom electrode in Y-cut lithium niobate thin films for high electromechanical coupling and high capacitance per unit area MEMS resonators
  publication-title: IEEE Int. Conf. Micro Electro Mech. Syst.
– start-page: 1
  year: 2021
  ident: bib165
  article-title: “Wideband and low-loss surface acoustic wave filter based on 15°YX-LiNbO3/SiO2/Si structure,”
  publication-title: IEEE Electron Device Lett.
– year: 2023
  ident: bib206
  article-title: Frequency Tuning of Suspended Millimeter Wave Lithium Niobate Acoustic Resonators Using Ion Beam Assisted Argon Gas Cluster Trimming
– reference: T. Tharpe and R. Tabrizian, “A 9.4 GHZ INTRINSICALLY SWITCHABLE LAMB-WAVE RESONATOR USING ATOMIC-LAYER-DEPOSITED FERROELECTRIC HAFNIA-ZIRCONIA.”.
– volume: 32
  start-page: 622
  year: 2023
  end-page: 625
  ident: bib221
  article-title: Thin-film lithium niobate acoustic filter at 23.5 GHz with 2.38 dB IL and 18.2% FBW
  publication-title: J. Microelectromech. Syst.
– start-page: 84
  year: 2024
  end-page: 86
  ident: bib63
  article-title: 18 GHz microacoustic ScAlN Lamb wave resonators for Ku band applications
  publication-title: 2024 IEEE International Microwave Filter Workshop (IMFW)
– volume: 87
  start-page: 1962
  year: 1999
  end-page: 1974
  ident: bib106
  article-title: Lithium niobate fibers and waveguides: fabrications and applications
  publication-title: Proc. IEEE
– volume: 55
  start-page: 942
  year: Aug. 2019
  end-page: 944
  ident: bib72
  article-title: 5 GHz Band n79 wideband microacoustic filter using thin lithium niobate membrane
  publication-title: Electron. Lett.
– year: 2024
  ident: bib77
  article-title: 2 to 16 GHz fundamental symmetric mode acoustic resonators in piezoelectric thin-film lithium niobate
  publication-title: arXiv preprint arXiv:2405.08139
– start-page: 1
  year: 2021
  end-page: 4
  ident: bib183
  article-title: A 15.8 GHz A6 mode resonator with Q of 720 in complementarily oriented piezoelectric lithium niobate thin films
  publication-title: 2021 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)
– start-page: 1248
  year: 2024
  end-page: 1251
  ident: bib33
  article-title: A 3-to-13 GHz quasi-elliptic higher-order N-path filter
  publication-title: 2024 IEEE 67th International Midwest Symposium on Circuits and Systems (MWSCAS)
– start-page: 1
  year: 2022
  end-page: 4
  ident: bib174
  article-title: A 4.5 GHz surface excitation solidly mounted microacoustic resonator with 20% coupling
  publication-title: 2022 IEEE International Ultrasonics Symposium (IUS)
– volume: 6
  start-page: 599
  year: 2023
  end-page: 609
  ident: bib67
  article-title: Nanoelectromechanical resonators for gigahertz frequency control based on hafnia–zirconia–alumina superlattices
  publication-title: Nat Electron
– volume: 2
  start-page: 59
  year: 2001
  end-page: 71
  ident: bib9
  article-title: RF MEMS switches and switch circuits
  publication-title: IEEE Microw. Mag.
– volume: 24
  start-page: 300
  year: 2015
  end-page: 308
  ident: bib172
  article-title: Design and fabrication of S0 Lamb-wave thin-film lithium niobate micromechanical resonators
  publication-title: J. Microelectromech. Syst.
– volume: 22
  start-page: 418
  year: 1974
  end-page: 424
  ident: bib179
  article-title: Electrode resistance effects in interdigital transducers
  publication-title: IEEE Trans. Microw. Theor. Tech.
– year: 2022
  ident: bib14
  article-title: From microwave acoustic filters to millimeter-wave operation and new applications
  publication-title: IEEE J. Microwaves
– start-page: 16.1.1
  year: 2022
  end-page: 16.1.4
  ident: bib45
  article-title: XBAW, an enabling technology for next generation resonators and filter solutions for 5G and Wi-Fi 6/6E/7 applications (Invited)
  publication-title: 2022 International Electron Devices Meeting (IEDM)
– start-page: 1
  year: 2023
  end-page: 4
  ident: bib60
  article-title: 55.4 GHz bulk acoustic resonator in thin-film scandium aluminum nitride
  publication-title: 2023 IEEE International Ultrasonics Symposium (IUS)
– volume: 16
  start-page: 46
  year: 2015
  end-page: 59
  ident: bib8
  article-title: A snapshot in time: the future in filters for cell phones
  publication-title: IEEE Microw. Mag.
– volume: 68
  start-page: 5211
  year: Oct. 2020
  end-page: 5220
  ident: bib98
  article-title: 10-60-GHz electromechanical resonators using thin-film lithium niobate
  publication-title: IEEE Trans. Microw. Theor. Tech.
– volume: 3
  start-page: 20
  year: 2020
  end-page: 29
  ident: bib10
  article-title: What should 6G be?
  publication-title: Nat Electron
– volume: 70
  start-page: 5195
  year: 2022
  end-page: 5204
  ident: bib151
  article-title: Micromachined heterostructured Lamb mode waveguides for acoustoelectric signal processing
  publication-title: IEEE Trans. Microw. Theor. Tech.
– start-page: 1
  year: 2023
  end-page: 4
  ident: bib76
  article-title: Frequency scaling millimeter wave acoustic resonators using ion beam trimmed lithium niobate
  publication-title: 2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)
– start-page: 1
  year: 2025
  end-page: 4
  ident: bib215
  article-title: Frequency and bandwidth design toward millimeter-wave thin-film lithium niobate acoustic filters
  publication-title: IEEE Microwave Wireless Technol.Lett.
– volume: 30
  start-page: 834
  year: 2001
  end-page: 840
  ident: bib123
  article-title: The generic nature of the Smart-Cut® process for thin film transfer
  publication-title: J. Electron. Mater.
– volume: 37
  start-page: 207
  year: 2004
  end-page: 211
  ident: bib103
  article-title: Measurement of the effects of rough surfaces on Lamb waves propagation
  publication-title: NDT E Int.
– volume: 32
  start-page: 529
  year: 2023
  end-page: 532
  ident: bib59
  article-title: Millimeter wave thin-film bulk acoustic resonator in sputtered scandium aluminum nitride
  publication-title: J. Microelectromech. Syst.
– volume: 59
  start-page: 2097
  year: 1991
  end-page: 2099
  ident: bib130
  article-title: Epitaxial growth of aluminum nitride on Si (111) by reactive sputtering
  publication-title: Appl. Phys. Lett.
– volume: 71
  start-page: 5630
  year: 2024
  end-page: 5637
  ident: bib55
  article-title: A high quality factor, 19-GHz periodically poled AlScN BAW resonator fabricated in a commercial XBAW process
  publication-title: IEEE Trans. Electron. Dev.
– start-page: 1
  year: 2024
  ident: bib168
  article-title: Gold as a promising electrode material for LiNbO3-on-Insulator (LNOI) SH-SAW resonators: an experimental study
  publication-title: IEEE Trans. Ultrason. Ferroelectrics Freq. Control
– start-page: 65
  year: 2024
  end-page: 68
  ident: bib88
  article-title: Wideband longitudinal leaky SAW filter implementation for Wi-Fi 7
  publication-title: 2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM)
– start-page: 36
  year: 2018
  end-page: 39
  ident: bib114
  article-title: Scaling acoustic filters towards 5G
  publication-title: 2018 IEEE International Electron Devices Meeting (IEDM)
– volume: 72
  start-page: 2498
  year: 2024
  end-page: 2507
  ident: bib214
  article-title: Lumped-distributed on-chip resonators with multistubs reused and its application to stopband extended IPD bandpass filters
  publication-title: IEEE Trans. Microw. Theor. Tech.
– volume: 69
  start-page: 3246
  year: 2021
  end-page: 3254
  ident: bib157
  article-title: Gigahertz low-loss and high power handling acoustic delay lines using thin-film lithium-niobate-on-sapphire
  publication-title: IEEE Trans. Microw. Theor. Tech.
– volume: 30
  year: 2019
  ident: bib186
  article-title: Frequency-scalable fabrication process flow for lithium niobate based Lamb wave resonators
  publication-title: J. Micromech. Microeng.
– start-page: 146
  year: 2024
  end-page: 149
  ident: bib92
  article-title: A fin-mounted A5-mode lithium niobate resonator at 27.58 GHz with $k^{2}$ of 4.4%, $Q_{\mathrm{p}}$ of 448, and FoM of 19.7
  publication-title: 2024 IEEE/MTT-S International Microwave Symposium - IMS 2024
– year: 2025
  ident: bib110
  article-title: Lithium niobate microphone with high SNR potential
  publication-title: IEEE Sens. J.
– volume: 28
  start-page: 1110
  year: 2018
  end-page: 1112
  ident: bib18
  article-title: First demonstration of compact, ultra-thin low-pass and bandpass filters for 5G small-cell applications
  publication-title: IEEE Microw. Wireless Compon. Lett.
– year: 2023
  ident: bib184
  article-title: Direct Wafer Bonding of 128° Y-Cut LiNbO3: A Pathway to High Frequency (50 GHz) Filter Applications
– volume: 6
  start-page: 47969
  year: 2018
  end-page: 47979
  ident: bib200
  article-title: General synthesis methodology for the design of acoustic wave ladder filters and duplexers
  publication-title: IEEE Access
– start-page: 36
  year: 2024
  end-page: 39
  ident: bib79
  article-title: Over-1 GHz bandwidth filter based on Y-128° cut lithium niobate on amorphous silicon
  publication-title: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
– start-page: 4.2.1
  year: 2022
  end-page: 4.2.4
  ident: bib73
  article-title: Scaling surface acoustic wave filters on LNOI platform for 5G communication
  publication-title: 2022 International Electron Devices Meeting (IEDM)
– year: 2025
  ident: bib199
  article-title: Acoustic resonators above 100 GHz
  publication-title: arXiv preprint arXiv:2502.03632
– year: 2025
  ident: bib180
  article-title: Miniature High-Coupling Lithium Niobate Thin Film Bulk Acoustic Wave Resonators at 10-30 GHz
– year: 2009
  ident: bib203
  article-title: Microwave Engineering
– volume: 31
  start-page: 888
  year: 2022
  end-page: 900
  ident: bib74
  article-title: Sub-GHz X-cut lithium niobate S
  publication-title: J. Microelectromech. Syst.
– start-page: 1
  year: 2020
  ident: bib136
  article-title: High figure of merit X-cut lithium niobate MEMS resonators operating around 50 MHz for large passive voltage amplification in radio frequency applications
  publication-title: IEEE Trans. Ultrason. Ferroelectrics Freq. Control
– year: 2024
  ident: bib213
  article-title: Glass-based single-layer slow wave SIW filter with embedded composite right-/left-handed resonator
  publication-title: IEEE Trans. Microw. Theor. Tech.
– volume: 1
  start-page: 601
  year: 2021
  end-page: 609
  ident: bib12
  article-title: Microwave acoustic devices: recent advances and outlook
  publication-title: IEEE J. Microwaves
– start-page: 1805
  year: 2023
  end-page: 1808
  ident: bib82
  article-title: An 18GHz Alscn film bulk acoustic wave resonator with epitaxial metal electrodes
  publication-title: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
– year: 2009
  ident: bib37
  article-title: RF Bulk Acoustic Wave Filters for Communications
– start-page: 1
  year: 2021
  end-page: 4
  ident: bib178
  article-title: Power flow angles of GHz propagating acoustic waves in thin-film lithium niobate
  publication-title: 2021 IEEE International Ultrasonics Symposium (IUS)
– volume: 136
  start-page: 3
  year: 2007
  end-page: 27
  ident: bib104
  article-title: Squeeze film air damping in MEMS
  publication-title: Sens Actuators A Phys
– volume: 130
  start-page: 236
  year: 2010
  end-page: 241
  ident: bib122
  article-title: Preparation of thin lithium niobate layer on silicon wafer for wafer-level integration of acoustic devices and LSI
  publication-title: IEEJ Trans. Sensors Micromachines
– volume: 16
  start-page: 73
  year: 2015
  end-page: 81
  ident: bib6
  article-title: A bright outlook for acoustic filtering: a new generation of very low-profile SAW, TC SAW, and BAW devices for module integration
  publication-title: IEEE Microw. Mag.
– volume: 33
  start-page: 807
  year: 2023
  end-page: 810
  ident: bib26
  article-title: Micromachined tunable magnetostatic forward volume wave bandstop filter
  publication-title: IEEE Microwave Wireless Technol.Lett.
– start-page: 117
  year: 2024
  end-page: 120
  ident: bib83
  article-title: Thin-film lithium niobate on insulator surface acoustic wave devices for 6G centimeter bands
  publication-title: 2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM)
– volume: 64
  start-page: 1390
  year: 2017
  end-page: 1400
  ident: bib201
  article-title: Acoustic wave filter technology–a review
  publication-title: IEEE Trans. Ultrason. Ferroelectrics Freq. Control
– volume: 16
  start-page: 657
  year: 2006
  end-page: 659
  ident: bib204
  article-title: Closed-form expressions for the design of ladder-type FBAR filters
  publication-title: IEEE Microw. Wireless Compon. Lett.
– start-page: 1
  year: 2023
  end-page: 11
  ident: bib71
  article-title: High-performance acoustic wave devices on LiTaO $_{3}$/SiC hetero-substrates
  publication-title: IEEE Trans. Microw. Theor. Tech.
– volume: 6
  start-page: 55765
  year: 2018
  end-page: 55779
  ident: bib3
  article-title: 5G wireless network slicing for eMBB, urllc, and mMTC: a communication-theoretic view
  publication-title: IEEE Access
– start-page: 1
  year: 2017
  end-page: 8
  ident: bib40
  article-title: IHP SAW technology and its application to microacoustic components
  publication-title: IEEE Int. Ultrason. Symp
– start-page: 1
  year: 2017
  end-page: 4
  ident: bib129
  article-title: Enhanced piezoelectric properties of c-axis textured aluminium scandium nitride thin films with high scandium content: influence of intrinsic stress and sputtering parameters
  publication-title: 2017 IEEE International Ultrasonics Symposium (IUS)
– volume: 52
  start-page: 5LT01
  year: 2018
  ident: bib169
  article-title: Silicon acoustoelectronics with thin film lithium niobate
  publication-title: J. Phys. D Appl. Phys.
– volume: 15
  start-page: 3993
  year: 2024
  ident: bib102
  article-title: Coherent optical coupling to surface acoustic wave devices
  publication-title: Nat. Commun.
– volume: 6
  start-page: 69
  year: 2000
  end-page: 82
  ident: bib107
  article-title: A review of lithium niobate modulators for fiber-optic communications systems
  publication-title: IEEE J. Sel. Top. Quant. Electron.
– volume: 41
  start-page: 1444
  year: 2020
  end-page: 1447
  ident: bib153
  article-title: Acoustoelectric non-reciprocity in lithium niobate-on-silicon delay lines
  publication-title: IEEE Electron Device Lett.
– year: 2017
  ident: bib38
  article-title: Piezoelectric MEMS Resonators and Filters
– volume: 30
  start-page: 632
  year: 2021
  end-page: 641
  ident: bib100
  article-title: Acoustic loss in thin-film lithium niobate: an experimental study
  publication-title: J. Microelectromech. Syst.
– start-page: 1
  year: 2024
  end-page: 6
  ident: bib78
  article-title: C-band lithium niobate on silicon carbide SAW resonator with figure-of-merit of 124 at 6.5 GHz
  publication-title: J. Microelectromech. Syst.
– year: 2024
  ident: bib198
  article-title: Enhancement of high-frequency harmonics in resonators using multilayered structures with polarity inverted layers
  publication-title: Authorea Preprints
– start-page: 176
  year: 2024
  end-page: 179
  ident: bib30
  article-title: Magnetostatic wave notch filters frequency tuned via a zero DC power magnetic bias circuit
  publication-title: 2024 IEEE International Microwave Filter Workshop (IMFW)
– volume: 52
  start-page: 42
  year: 2014
  end-page: 47
  ident: bib1
  article-title: 5G wireless access: requirements and realization
  publication-title: IEEE Commun. Mag.
– reference: .
– start-page: 23
  year: 2024
  end-page: 26
  ident: bib190
  article-title: Transferred thin film lithium niobate as millimeter wave acoustic filter platforms
  publication-title: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
– volume: 69
  start-page: 689
  year: 1981
  end-page: 695
  ident: bib187
  article-title: Attenuation of acoustic waves in lithium niobate
  publication-title: J. Acoust. Soc. Am.
– start-page: 1
  year: 2024
  end-page: 8
  ident: bib28
  article-title: A distributed magnetostatic resonator
  publication-title: IEEE Trans. Microw. Theor. Tech.
– volume: 8
  start-page: 60
  year: 2007
  end-page: 70
  ident: bib23
  article-title: Waveguide filters for satellites
  publication-title: IEEE Microw. Mag.
– volume: 30
  start-page: 253
  year: 2022
  end-page: 266
  ident: bib35
  article-title: Analysis and comparison of low-power 6-GHz N-path-filter-based harmonic selection RF receiver front-end architectures
  publication-title: IEEE Trans Very Large Scale Integr VLSI Syst
– volume: 69
  start-page: 629
  year: 2021
  end-page: 638
  ident: bib202
  article-title: A synthesis approach to acoustic wave ladder filters and duplexers starting with shunt resonator
  publication-title: IEEE Trans. Microw. Theor. Tech.
– volume: 13
  start-page: 242
  year: 2021
  end-page: 352
  ident: bib216
  article-title: Integrated photonics on thin-film lithium niobate
  publication-title: Adv. Opt. Photonics
– start-page: 117
  year: 2024
  end-page: 120
  ident: bib85
  article-title: Thin-film lithium niobate on insulator surface acoustic wave devices for 6G centimeter bands
  publication-title: 2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM)
– volume: 2
  start-page: 931
  year: 2004
  end-page: 934
  ident: bib17
  article-title: Acoustic FBAR for filters, duplexers and front end modules
  publication-title: Microwave Symposium Digest
– volume: 68
  start-page: 573
  year: 2019
  end-page: 589
  ident: bib99
  article-title: 5-GHz antisymmetric mode acoustic delay lines in lithium niobate thin film
  publication-title: IEEE Trans. Microw. Theor. Tech.
– reference: V. Chulukhadze, J. Kramer, T.-H. Hsu, O. Barrera, R. Lu, High-Q millimeter-wave acoustic resonators in thin-film lithium niobate using higher-order antisymmetric modes, arXiv preprint arXiv:2505.06247, Apr. 2025. [Online]. Available:
– start-page: 563
  year: 2018
  end-page: 566
  ident: bib142
  article-title: 1.7 GHz Y-cut lithium niobate MEMS resonators with FoM of336 andfQ of9. 15× 10 12
  publication-title: 2018 IEEE/MTT-S International Microwave Symposium-IMS
– start-page: 1
  year: 2023
  end-page: 4
  ident: bib195
  article-title: Trilayer periodically poled piezoelectric film lithium niobate resonator
  publication-title: 2023 IEEE International Ultrasonics Symposium (IUS)
– start-page: 303
  year: 2012
  end-page: 306
  ident: bib171
  article-title: Thin-film lithium niobate contour-mode resonators
  publication-title: IEEE Int. Ultrason. Symp
– volume: 45
  start-page: 1341
  year: 2024
  end-page: 1344
  ident: bib80
  article-title: A 19 GHz all-epitaxial Al
  publication-title: IEEE Electron Device Lett.
– volume: 125
  start-page: 14394
  year: 2021
  end-page: 14400
  ident: bib124
  article-title: Nanoscale structural and chemical properties of ferroelectric aluminum scandium nitride thin films
  publication-title: J. Phys. Chem. C
– start-page: 512
  year: 2019
  end-page: 515
  ident: bib41
  article-title: Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters
  publication-title: Ieee Mtt-S International Microwave Symposium (Ims)
– volume: 37
  start-page: 191
  year: 1985
  end-page: 203
  ident: bib113
  article-title: Lithium niobate: summary of physical properties and crystal structure
  publication-title: Appl. Phys. A
– start-page: 1083
  year: 2024
  end-page: 1086
  ident: bib56
  article-title: Millimeter wave thin-film bulk acoustic resonator in sputtered scandium aluminum nitride using platinum electrodes
  publication-title: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
– volume: 67
  start-page: 915
  year: 2019
  end-page: 921
  ident: bib69
  article-title: Comparative study of acoustic wave devices using thin piezoelectric plates in the 3–5-GHz range
  publication-title: IEEE Trans. Microw. Theor. Tech.
– volume: 31
  start-page: 604
  year: 2022
  end-page: 611
  ident: bib125
  article-title: Controlling residual stress and suppression of anomalous grains in aluminum scandium nitride films grown directly on silicon
  publication-title: J. Microelectromech. Syst.
– volume: 55
  start-page: 98
  year: 2018
  end-page: 100
  ident: bib146
  article-title: 5 GHz laterally-excited bulk-wave resonators (XBARs) based on thin platelets of lithium niobate
  publication-title: Electron. Lett.
– volume: 31
  year: 2021
  ident: bib167
  article-title: Thin-film lithium niobate-on-insulator (LNOI) shear horizontal surface acoustic wave resonators
  publication-title: J. Micromech. Microeng.
– volume: 15
  year: 2021
  ident: bib155
  article-title: Gigahertz phononic integrated circuits on thin-film lithium niobate on sapphire
  publication-title: Phys. Rev. Appl.
– volume: 29
  start-page: 1332
  year: Oct. 2020
  end-page: 1346
  ident: bib194
  article-title: Enabling higher order Lamb wave acoustic devices with complementarily oriented piezoelectric thin films
  publication-title: J. Microelectromech. Syst.
– volume: 36
  start-page: 1636
  year: 1997
  ident: bib118
  article-title: Smart-Cut: a new silicon on insulator material technology based on hydrogen implantation and wafer bonding
  publication-title: Jpn. J. Appl. Phys.
– volume: 11
  start-page: 1048
  year: 2023
  end-page: 1054
  ident: bib133
  article-title: Thermal conductivity enhancement of aluminum scandium nitride grown by molecular beam epitaxy
  publication-title: Mater Res Lett
– volume: 28
  start-page: 575
  year: 2019
  end-page: 577
  ident: bib70
  article-title: 4.5 GHz lithium niobate MEMS filters with 10% fractional bandwidth for 5G front-ends
  publication-title: J. Microelectromech. Syst.
– year: 2023
  ident: bib193
  article-title: Fundamental Antisymmetric Mode Acoustic Resonator in Periodically Poled Piezoelectric Film Lithium Niobate
– volume: 1
  start-page: 24
  year: 2017
  end-page: 30
  ident: bib93
  article-title: NR: the new 5G radio access technology
  publication-title: IEEE Communications Standards Magazine
– start-page: 470
  year: 2021
  end-page: 473
  ident: bib152
  article-title: A thin-film piezo-silicon acoustoelectric isolator with more than 30 dB non-reciprocal transmission
  publication-title: 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
– start-page: 1
  year: 2024
  end-page: 9
  ident: bib52
  article-title: Near 6-GHz sezawa mode surface acoustic wave resonators using AlScN on SiC
  publication-title: J. Microelectromech. Syst.
– volume: 102
  year: 2013
  ident: bib128
  article-title: Influence of scandium concentration on power generation figure of merit of scandium aluminum nitride thin films
  publication-title: Appl. Phys. Lett.
– volume: 61
  start-page: 403
  year: Jan. 2013
  end-page: 414
  ident: bib185
  article-title: Design and analysis of lithium–niobate-based high electromechanical coupling RF-MEMS resonators for wideband filtering
  publication-title: IEEE Trans. Microw. Theor. Tech.
– start-page: 1
  year: 2022
  end-page: 4
  ident: bib75
  article-title: Y-36 lithium niobate films support f-Q of $5.5\cdot 10^{13}$ hz in the 1-10 GHz range
  publication-title: 2022 IEEE International Ultrasonics Symposium (IUS)
– year: 2024
  ident: bib57
  article-title: 18 GHz solidly mounted resonator in scandium aluminum nitride on SiO2/Ta2O5 Bragg reflector
  publication-title: arXiv preprint arXiv:2407.02741
– start-page: 1
  year: 2016
  end-page: 4
  ident: bib173
  article-title: Solidly mounted ladder filter using shear horizontal wave in LiNbO3
  publication-title: 2016 IEEE International Ultrasonics Symposium (IUS)
– volume: 11
  start-page: 118
  year: 2020
  end-page: 133
  ident: bib5
  article-title: A review of 5G front-end systems package integration
  publication-title: IEEE Trans. Compon. Packag. Manuf. Technol.
– start-page: 1993
  year: 2015
  end-page: 1996
  ident: bib210
  article-title: Study of thermal nonlinearity in lithium niobate-based MEMS resonators
  publication-title: 2015 Transducers-2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
– start-page: 1
  year: 2024
  end-page: 4
  ident: bib219
  article-title: 21.4 GHz surface acoustic wave resonator with 11,400 m/s phase velocity in thin-film lithium niobate on silicon carbide
  publication-title: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)
– volume: 33
  start-page: 121
  year: 2024
  end-page: 123
  ident: bib53
  article-title: Highly tunable piezoelectric resonators using Al0.7Sc0.3N
  publication-title: J. Microelectromech. Syst.
– volume: 209
  start-page: 183
  year: 2014
  end-page: 190
  ident: bib141
  article-title: A high electromechanical coupling coefficient SH0 Lamb wave lithium niobate micromechanical resonator and a method for fabrication
  publication-title: Sens Actuators A Phys
– volume: 13
  start-page: 242
  year: 2021
  end-page: 352
  ident: bib112
  article-title: Integrated photonics on thin-film lithium niobate
  publication-title: Adv. Opt. Photonics
– volume: 8
  start-page: 921
  year: 2021
  end-page: 924
  ident: bib156
  article-title: Mid-infrared nonlinear optics in thin-film lithium niobate on sapphire
  publication-title: Optica
– start-page: 2564
  year: 2019
  end-page: 2567
  ident: bib205
  article-title: Investigations of a new design concept for wide-band hybrid ladder filters
  publication-title: IEEE Int. Ultrason. Symp.
– volume: 46
  start-page: 4744
  year: 2007
  ident: bib177
  article-title: Power flow angles for slanted finger surface acoustic wave filters on langasite substrate
  publication-title: Jpn. J. Appl. Phys.
– start-page: 804
  year: 2024
  end-page: 807
  ident: bib89
  article-title: 6.5 GHz longitudinal Leaky SAW filter using LiNbO3-on-SiC structure for Wi-Fi 7
  publication-title: 2024 IEEE/MTT-S International Microwave Symposium - IMS 2024
– volume: 31
  year: 2021
  ident: bib116
  article-title: RF acoustic microsystems based on suspended lithium niobate thin films: advances and outlook
  publication-title: J. Micromech. Microeng.
– start-page: 87
  year: 2024
  end-page: 90
  ident: bib208
  article-title: 38.7 GHz thin film lithium niobate acoustic filter
  publication-title: 2024 IEEE International Microwave Filter Workshop (IMFW)
– volume: 563
  start-page: 661
  year: 2018
  end-page: 665
  ident: bib217
  article-title: Quantum control of surface acoustic-wave phonons
  publication-title: Nature
– year: 2023
  ident: bib220
  article-title: Thin-film lithium niobate acoustic resonator with high Q of 237 and k2 of 5.1% at 50.74 GHz
  publication-title: arXiv preprint arXiv:2307.05742
– volume: 67
  start-page: 402
  year: 2019
  end-page: 412
  ident: bib182
  article-title: GHz broadband SH0 mode lithium niobate acoustic delay lines
  publication-title: IEEE Trans. Ultrason. Ferroelectrics Freq. Control
– start-page: 378
  year: 2023
  end-page: 380
  ident: bib34
  article-title: A 1-to-5GHz all-passive frequency-translational 4th-order N-path filter with low-power clock boosting for high linearity and relaxed $\mathrm{P}_{\text{dc}}$-Frequency trade-off
  publication-title: 2023 IEEE International Solid-State Circuits Conference (ISSCC)
– volume: 71
  start-page: 4968
  year: 2024
  end-page: 4976
  ident: bib43
  article-title: Performance limiting factors of 15-GHz ku-band FBARs
  publication-title: IEEE Trans. Electron. Dev.
– start-page: 1
  year: 2023
  end-page: 4
  ident: bib49
  article-title: A solidly mounted 55 GHz overmoded bulk acoustic resonator
  publication-title: 2023 IEEE International Ultrasonics Symposium (IUS)
– year: 1988
  ident: bib95
  publication-title: IEEE Standard on Piezoelectricity
– volume: 14
  year: 2020
  ident: bib131
  article-title: Metal‐organic chemical vapor deposition of aluminum scandium nitride
  publication-title: Phys. Status Solidi Rapid Res. Lett.
– volume: 27
  start-page: 9794
  year: 2019
  end-page: 9802
  ident: bib143
  article-title: Low-loss waveguides on Y-cut thin film lithium niobate: towards acousto-optic applications
  publication-title: Opt. Express
– start-page: 201
  year: 2008
  end-page: 204
  ident: bib119
  article-title: Large Qxf product for HBAR using Smart Cut
  publication-title: IEEE Int. Ultrason. Symp.
– volume: 32
  start-page: 656
  year: 2022
  end-page: 659
  ident: bib50
  article-title: 33 GHz overmoded bulk acoustic resonator
  publication-title: IEEE Microw. Wireless Compon. Lett.
– volume: 34
  start-page: 391
  year: 2024
  end-page: 394
  ident: bib209
  article-title: 23.8-GHz acoustic filter in periodically poled piezoelectric film lithium niobate with 1.52-dB IL and 19.4% FBW
  publication-title: IEEE Microwave Wireless Technol.Lett.
– volume: 1
  start-page: 957
  year: 2020
  end-page: 975
  ident: bib2
  article-title: 6G wireless communication systems: applications, requirements, technologies, challenges, and research directions
  publication-title: IEEE Open Journal of the Communications Society
– volume: 66
  start-page: 1373
  year: 2019
  end-page: 1386
  ident: bib181
  article-title: Gigahertz low-loss and wide-band S0 mode lithium niobate acoustic delay lines
  publication-title: IEEE Trans. Ultrason. Ferroelectrics Freq. Control
– start-page: 1
  year: 2023
  end-page: 4
  ident: bib58
  article-title: Analysis of 5−10 GHz higher-order Lamb acoustic waves in thin-film scandium aluminum nitride
  publication-title: 2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)
– volume: 31
  start-page: 674
  year: 2021
  end-page: 677
  ident: bib42
  article-title: Novel temperature-compensated, silicon SAW design for filter integration
  publication-title: IEEE Microw. Wireless Compon. Lett.
– start-page: 809
  year: 2022
  end-page: 812
  ident: bib162
  article-title: Acoustic delay lines in thin-film lithium niobate on silicon carbide
  publication-title: 2022 IEEE/MTT-S International Microwave Symposium-IMS 2022
– start-page: 42
  year: 2024
  end-page: 45
  ident: bib32
  article-title: Meander line transducer empowered low-loss tunable magnetostatic wave filters with zero static power consumption
  publication-title: 2024 IEEE/MTT-S International Microwave Symposium - IMS 2024
– volume: 70
  start-page: 1201
  year: 2023
  end-page: 1212
  ident: bib61
  article-title: 6–20 GHz 30% ScAlN lateral field-excited cross-sectional Lamé mode resonators for future mobile RF front ends
  publication-title: IEEE Trans. Ultrason. Ferroelectrics Freq. Control
– volume: vol. 162
  year: 2017
  ident: bib158
  article-title: The structure and optical properties of Lithium Niobate grown on quartz for photonics application
  publication-title: EPJ Web of Conferences
– start-page: 23
  year: 2024
  end-page: 26
  ident: bib222
  article-title: Transferred thin film lithium niobate as millimeter wave acoustic filter platforms
  publication-title: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
– start-page: 1
  year: 2020
  end-page: 3
  ident: bib127
  article-title: Zig-zag ScAlN multilayer SMR for high power BAW fileter application such as RF base station
  publication-title: 2020 IEEE International Ultrasonics Symposium (IUS)
– volume: 69
  start-page: 3693
  year: 2021
  end-page: 3705
  ident: bib164
  article-title: High-performance surface acoustic wave devices using LiNbO 3/SiO 2/SiC multilayered substrates
  publication-title: IEEE Trans. Microw. Theor. Tech.
– year: 2024
  ident: bib29
  article-title: High-performance magnetostatic wave resonators through deep anisotropic etching of GGG substrates
  publication-title: arXiv Preprint arXiv:2406.01419
– year: 2024
  ident: bib62
  article-title: Scandium aluminum nitride overmoded bulk acoustic resonators for future wireless communication
  publication-title: arXiv preprint arXiv:2404.15005
– volume: 1
  start-page: 601
  year: 2021
  end-page: 609
  ident: bib13
  article-title: Microwave acoustic devices: recent advances and outlook
  publication-title: IEEE J. Microwaves
– volume: 68
  start-page: 3653
  year: 2020
  end-page: 3666
  ident: bib161
  article-title: Surface acoustic wave devices using lithium niobate on silicon carbide
  publication-title: IEEE Trans. Microw. Theor. Tech.
– start-page: 1
  year: 2016
  end-page: 4
  ident: bib96
  article-title: Carrier aggregation and its challenges-or: the golden age for acoustic filters
  publication-title: Microwave Symposium (IMS)
– year: 2024
  ident: bib218
  article-title: 52 GHz surface acoustic wave resonators in thin film lithium niobate on silicon carbide
  publication-title: IEEE Trans. Ultrason. Ferroelectrics Freq. Control
– start-page: 967
  year: 2021
  end-page: 969
  ident: bib145
  article-title: Fabrication and analysis of thin film lithum niobate resonators for 5GHz frequency and large Kt2 applications
  publication-title: 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
– volume: 62
  year: 2022
  ident: bib159
  article-title: Heterogeneous integration of lithium tantalate thin film on quartz for high performance surface acoustic wave resonator
  publication-title: Jpn. J. Appl. Phys.
– volume: 29
  start-page: 1464
  year: 2020
  end-page: 1472
  ident: bib140
  article-title: X-cut lithium niobate-based shear horizontal resonators for radio frequency applications
  publication-title: J. Microelectromech. Syst.
– volume: 12
  start-page: 739
  year: 2018
  end-page: 749
  ident: bib121
  article-title: Precision forming and machining technologies for ceramic-based components
  publication-title: Int. J. Autom. Technol.
– volume: n/a
  year: May 2024
  ident: bib66
  article-title: Nanoscale phase and orientation mapping in multiphase polycrystalline hafnium zirconium oxide thin films using 4D-STEM and automated diffraction indexing
  publication-title: Small Methods
– volume: 2019-Octob
  start-page: 84
  year: 2019
  end-page: 87
  ident: bib150
  article-title: Single-mode high frequency LiNbO3 film bulk acoustic resonator
  publication-title: IEEE International Ultrasonics Symposium, IUS
– start-page: 31
  year: 2024
  end-page: 35
  ident: bib48
  article-title: Up-scaling microacoustics: 20 to 35 GHz ALN resonators with f • Q products exceeding 14 THz
  publication-title: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
– start-page: 1
  year: 2008
  end-page: 4
  ident: bib120
  article-title: High piezoelectric properties in LiNbO3 transferred layer by the Smart Cut
  publication-title: 2008 IEEE International Electron Devices Meeting
– volume: 15
  start-page: 108
  year: 2014
  end-page: 116
  ident: bib22
  article-title: Substrate integrated waveguide filter: basic design rules and fundamental structure features
  publication-title: IEEE Microw. Mag.
– year: 2000
  ident: bib36
  article-title: Surface Acoustic Wave Devices in Telecommunications
– start-page: 206
  year: 2018
  end-page: 212
  ident: bib46
  article-title: High power, wideband single crystal XBAW technology for sub-6 GHz micro RF filter applications
  publication-title: IEEE International Ultrasonics Symposium (IUS)
– volume: 29
  start-page: 313
  year: Jun. 2020
  end-page: 319
  ident: bib105
  article-title: A1 resonators in 128 Y-cut lithium niobate with electromechanical coupling of 46.4%
  publication-title: J. Microelectromech. Syst.
– volume: 16
  start-page: 60
  year: 2015
  end-page: 72
  ident: bib7
  article-title: Golden age for filter design: innovative and proven approaches for acoustic filter, duplexer, and multiplexer design
  publication-title: IEEE Microw. Mag.
– start-page: 31
  year: 2024
  end-page: 35
  ident: bib64
  article-title: Up-scaling microacoustics: 20 to 35 GHz ALN resonators with f • Q products exceeding 14 THz
  publication-title: 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
– volume: 11
  start-page: 397
  year: 2021
  ident: bib132
  article-title: Epitaxy of LiNbO3: historical challenges and recent success
  publication-title: Crystals
– volume: 13
  start-page: 312
  year: 1968
  end-page: 313
  ident: bib109
  article-title: High‐performance lithium niobate acoustic surface wave transducers and delay lines
  publication-title: Appl. Phys. Lett.
– volume: 132
  year: 2022
  ident: bib134
  article-title: X-band epi-BAW resonators
  publication-title: J. Appl. Phys.
– start-page: 1
  year: 2024
  end-page: 6
  ident: bib207
  article-title: Acoustic and electromagnetic Co-modeling of piezoelectric devices at millimeter wave
  publication-title: J. Microelectromech. Syst.
– start-page: 36
  year: 2018
  end-page: 39
  ident: bib115
  article-title: Scaling acoustic filters towards 5G
  publication-title: IEEE Int. Electron Devices Meeting
– volume: 95
  year: 2009
  ident: bib138
  article-title: Large electromechanical coupling factor film bulk acoustic resonator with X-cut LiNbO 3 layer transfer
  publication-title: Appl. Phys. Lett.
– start-page: 98
  year: 2022
  end-page: 101
  ident: bib91
  article-title: 6.2 GHz lithium niobate MEMS filter with FBW of 11.8% and IL of 1.7 dB
  publication-title: 2022 IEEE MTT-S International Conference on Microwave Acoustics and Mechanics (IC-MAM)
– start-page: 1235
  year: 2008
  end-page: 1238
  ident: bib20
  article-title: A Ka-band multilayer LTCC 4-pole bandpass filter using dual-mode cavity resonators
  publication-title: 2008 IEEE MTT-S International Microwave Symposium Digest
– volume: 79
  start-page: 1342
  year: 2001
  end-page: 1344
  ident: bib111
  article-title: Dielectric constant and loss tangent in LiNbO 3 crystals from 90 to 147 GHz
  publication-title: Appl. Phys. Lett.
– start-page: 813
  year: 2001
  end-page: 821
  ident: bib39
  article-title: Thin film bulk wave acoustic resonators (FBAR) for wireless applications
  publication-title: IEEE Int. Ultrason. Symp.
– start-page: 1
  year: 2020
  end-page: 5
  ident: bib11
  article-title: Power consumption analysis for mobile mmWave and sub-THz receivers
  publication-title: 2020 2nd 6G Wireless Summit (6G SUMMIT)
– start-page: 207
  year: 2021
  end-page: 209
  ident: bib47
  article-title: Wideband 6 GHz RF filters for wi-fi 6E using a unique BAW process and highly Sc-doped AlN thin film
  publication-title: 2021 IEEE MTT-S International Microwave Symposium (IMS)
– start-page: 1
  year: 2023
  end-page: 4
  ident: bib87
  article-title: Spurious-free and low-loss surface acoustic wave filter beyond 5 GHz
  publication-title: 2023 IEEE International Ultrasonics Symposium (IUS)
– volume: 71
  start-page: 2532
  year: 2023
  end-page: 2544
  ident: bib212
  article-title: Vertically stacked millimeter-wave LTCC filters with cavity-mode suppression for system-in-package application
  publication-title: IEEE Trans. Microw. Theor. Tech.
– volume: 28
  start-page: 209
  year: 2019
  end-page: 218
  ident: bib94
  article-title: Accurate extraction of large electromechanical coupling in piezoelectric MEMS resonators
  publication-title: J. Microelectromech. Syst.
– year: 2024
  ident: bib196
  article-title: Experimental study of periodically poled piezoelectric film lithium niobate resonator at cryogenic temperatures
  publication-title: arXiv preprint arXiv:2403.09822
– year: 2021
  ident: bib44
  article-title: Extending the Frequency of Piezoelectric Resonators to Microwave Frequencies and beyond
– start-page: 1
  year: 2019
  end-page: 2
  ident: bib149
  article-title: High frequency LiNbO3 bulk wave resonator
  publication-title: 2019 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum
– volume: 30
  start-page: 876
  year: 2021
  end-page: 884
  ident: bib101
  article-title: Acoustic loss of GHz higher-order Lamb waves in thin-film lithium niobate: a comparative study
  publication-title: J. Microelectromech. Syst.
– year: 2019
  ident: bib189
  article-title: Microwave and RF Design
– year: 2019
  ident: bib4
  article-title: Microwave/RF components for 5G front-end systems
  publication-title: Avid Science
– volume: 15
  start-page: 7764
  year: 2024
  ident: bib27
  article-title: An edge-coupled magnetostatic bandpass filter
  publication-title: Nat. Commun.
– volume: 35
  start-page: 512
  year: 2000
  end-page: 526
  ident: bib16
  article-title: High-Q HF microelectromechanical filters
  publication-title: IEEE J. Solid State Circ.
– start-page: 30
  year: 2024
  end-page: 33
  ident: bib25
  article-title: Temperature compensated magnetostatic wave resonator microsystem
  publication-title: 2024 IEEE/MTT-S International Microwave Symposium - IMS 2024
– start-page: 1
  year: 2024
  end-page: 4
  ident: bib90
  article-title: High-performance N77 band filters on sapphire-based Heterogenous substrates
  publication-title: 2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
– volume: 118
  start-page: 1166
  year: 2010
  end-page: 1169
  ident: bib126
  article-title: Preparation of scandium aluminum nitride thin films by using scandium aluminum alloy sputtering target and design of experiments
  publication-title: J. Ceram. Soc. Jpn.
– volume: 2020-Septe
  start-page: 1
  year: 2020
  end-page: 4
  ident: bib117
  article-title: Smart Cut
  publication-title: IEEE International Ultrasonics Symposium, IUS
– start-page: 1
  year: 2023
  end-page: 4
  ident: bib81
  article-title: Aluminum scandium nitride for mm-wave acoustic filtering: challenges and outlook
  publication-title: 2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)
– start-page: 647
  year: 2021
  end-page: 650
  ident: bib166
  article-title: Single-layer thin-film lithium niobate out-of-plane actuators
  publication-title: 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
– volume: 15
  start-page: 3582
  year: 2024
  ident: bib31
  article-title: Frequency tunable magnetostatic wave filters with zero static power magnetic biasing circuitry
  publication-title: Nat. Commun.
– volume: 67
  start-page: 915
  year: 2019
  end-page: 921
  ident: bib97
  article-title: Comparative study of acoustic wave devices using thin piezoelectric plates in the 3-5-GHz range
  publication-title: IEEE Trans. Microw. Theor. Tech.
– volume: 20
  start-page: 258
  year: 1972
  end-page: 265
  ident: bib21
  article-title: Narrow-bandpass waveguide filters
  publication-title: IEEE Trans. Microw. Theor. Tech.
– volume: 31
  start-page: 186
  year: 2022
  end-page: 193
  ident: bib163
  article-title: SAW filters with excellent temperature stability and high power handling using LiTaO 3/SiC bonded wafers
  publication-title: J. Microelectromech. Syst.
– volume: 27
  start-page: 602
  year: 2018
  end-page: 604
  ident: bib139
  article-title: X-cut lithium niobate laterally vibrating MEMS resonator with figure of merit of 1560
  publication-title: J. Microelectromech. Syst.
– volume: 5
  year: 2020
  ident: bib154
  article-title: Acousto-optic modulation in lithium niobate on sapphire
  publication-title: APL Photonics
– volume: 61
  start-page: SG1001
  year: 2022
  ident: bib175
  article-title: Use of heavy dielectric materials in solidly mounted A1 mode resonators based on lithium niobate
  publication-title: Jpn. J. Appl. Phys.
– start-page: 1
  year: 2002
  end-page: 4
  ident: bib19
  article-title: Highly selective microstrip bandpass filters in ka-band
  publication-title: 2002 32nd European Microwave Conference
– volume: 28
  start-page: 209
  issue: 2
  year: 2019
  ident: 10.1016/j.pquantelec.2025.100565_bib94
  article-title: Accurate extraction of large electromechanical coupling in piezoelectric MEMS resonators
  publication-title: J. Microelectromech. Syst.
  doi: 10.1109/JMEMS.2019.2892708
– volume: 29
  start-page: 1464
  issue: 6
  year: 2020
  ident: 10.1016/j.pquantelec.2025.100565_bib140
  article-title: X-cut lithium niobate-based shear horizontal resonators for radio frequency applications
  publication-title: J. Microelectromech. Syst.
  doi: 10.1109/JMEMS.2020.3026167
– volume: 563
  start-page: 661
  issue: 7733
  year: 2018
  ident: 10.1016/j.pquantelec.2025.100565_bib217
  article-title: Quantum control of surface acoustic-wave phonons
  publication-title: Nature
  doi: 10.1038/s41586-018-0719-5
– start-page: 31
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib48
  article-title: Up-scaling microacoustics: 20 to 35 GHz ALN resonators with f • Q products exceeding 14 THz
– ident: 10.1016/j.pquantelec.2025.100565_bib24
– start-page: 1
  year: 2021
  ident: 10.1016/j.pquantelec.2025.100565_bib183
  article-title: A 15.8 GHz A6 mode resonator with Q of 720 in complementarily oriented piezoelectric lithium niobate thin films
– volume: 6
  start-page: 55765
  year: 2018
  ident: 10.1016/j.pquantelec.2025.100565_bib3
  article-title: 5G wireless network slicing for eMBB, urllc, and mMTC: a communication-theoretic view
  publication-title: IEEE Access
  doi: 10.1109/ACCESS.2018.2872781
– volume: 32
  start-page: 656
  issue: 6
  year: 2022
  ident: 10.1016/j.pquantelec.2025.100565_bib50
  article-title: 33 GHz overmoded bulk acoustic resonator
  publication-title: IEEE Microw. Wireless Compon. Lett.
  doi: 10.1109/LMWC.2022.3166682
– volume: 68
  start-page: 573
  issue: 2
  year: 2019
  ident: 10.1016/j.pquantelec.2025.100565_bib99
  article-title: 5-GHz antisymmetric mode acoustic delay lines in lithium niobate thin film
  publication-title: IEEE Trans. Microw. Theor. Tech.
  doi: 10.1109/TMTT.2019.2949808
– volume: 68
  start-page: 5211
  issue: 12
  year: 2020
  ident: 10.1016/j.pquantelec.2025.100565_bib98
  article-title: 10-60-GHz electromechanical resonators using thin-film lithium niobate
  publication-title: IEEE Trans. Microw. Theor. Tech.
  doi: 10.1109/TMTT.2020.3027694
– start-page: 1
  year: 2023
  ident: 10.1016/j.pquantelec.2025.100565_bib58
  article-title: Analysis of 5−10 GHz higher-order Lamb acoustic waves in thin-film scandium aluminum nitride
– start-page: 4.2.1
  year: 2022
  ident: 10.1016/j.pquantelec.2025.100565_bib73
  article-title: Scaling surface acoustic wave filters on LNOI platform for 5G communication
– volume: 46
  start-page: 4744
  issue: 7S
  year: 2007
  ident: 10.1016/j.pquantelec.2025.100565_bib177
  article-title: Power flow angles for slanted finger surface acoustic wave filters on langasite substrate
  publication-title: Jpn. J. Appl. Phys.
  doi: 10.1143/JJAP.46.4744
– volume: 71
  start-page: 4968
  issue: 8
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib43
  article-title: Performance limiting factors of 15-GHz ku-band FBARs
  publication-title: IEEE Trans. Electron. Dev.
  doi: 10.1109/TED.2024.3418722
– volume: 31
  start-page: 888
  issue: 6
  year: 2022
  ident: 10.1016/j.pquantelec.2025.100565_bib74
  article-title: Sub-GHz X-cut lithium niobate S0 mode MEMS resonators
  publication-title: J. Microelectromech. Syst.
  doi: 10.1109/JMEMS.2022.3204449
– volume: 27
  start-page: 602
  issue: 4
  year: 2018
  ident: 10.1016/j.pquantelec.2025.100565_bib139
  article-title: X-cut lithium niobate laterally vibrating MEMS resonator with figure of merit of 1560
  publication-title: J. Microelectromech. Syst.
  doi: 10.1109/JMEMS.2018.2847310
– volume: 31
  start-page: 604
  issue: 4
  year: 2022
  ident: 10.1016/j.pquantelec.2025.100565_bib125
  article-title: Controlling residual stress and suppression of anomalous grains in aluminum scandium nitride films grown directly on silicon
  publication-title: J. Microelectromech. Syst.
  doi: 10.1109/JMEMS.2022.3167430
– start-page: 1
  year: 2022
  ident: 10.1016/j.pquantelec.2025.100565_bib174
  article-title: A 4.5 GHz surface excitation solidly mounted microacoustic resonator with 20% coupling
– volume: 15
  start-page: 3993
  issue: 1
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib102
  article-title: Coherent optical coupling to surface acoustic wave devices
  publication-title: Nat. Commun.
  doi: 10.1038/s41467-024-48167-7
– start-page: 176
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib30
  article-title: Magnetostatic wave notch filters frequency tuned via a zero DC power magnetic bias circuit
– volume: 3
  start-page: 20
  issue: 1
  year: 2020
  ident: 10.1016/j.pquantelec.2025.100565_bib10
  article-title: What should 6G be?
  publication-title: Nat Electron
  doi: 10.1038/s41928-019-0355-6
– volume: 6
  start-page: 47969
  year: 2018
  ident: 10.1016/j.pquantelec.2025.100565_bib200
  article-title: General synthesis methodology for the design of acoustic wave ladder filters and duplexers
  publication-title: IEEE Access
  doi: 10.1109/ACCESS.2018.2865808
– volume: 2019-Octob
  start-page: 84
  year: 2019
  ident: 10.1016/j.pquantelec.2025.100565_bib150
  article-title: Single-mode high frequency LiNbO3 film bulk acoustic resonator
  publication-title: IEEE International Ultrasonics Symposium, IUS
– volume: vol. 162
  year: 2017
  ident: 10.1016/j.pquantelec.2025.100565_bib158
  article-title: The structure and optical properties of Lithium Niobate grown on quartz for photonics application
– start-page: 470
  year: 2021
  ident: 10.1016/j.pquantelec.2025.100565_bib152
  article-title: A thin-film piezo-silicon acoustoelectric isolator with more than 30 dB non-reciprocal transmission
– start-page: 512
  year: 2019
  ident: 10.1016/j.pquantelec.2025.100565_bib41
  article-title: Laterally excited bulk wave resonators (XBARs) based on thin Lithium Niobate platelet for 5GHz and 13 GHz filters
  publication-title: Ieee Mtt-S International Microwave Symposium (Ims)
  doi: 10.1109/MWSYM.2019.8700876
– year: 2025
  ident: 10.1016/j.pquantelec.2025.100565_bib199
  article-title: Acoustic resonators above 100 GHz
  publication-title: arXiv preprint arXiv:2502.03632
– start-page: 42
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib32
  article-title: Meander line transducer empowered low-loss tunable magnetostatic wave filters with zero static power consumption
– year: 2025
  ident: 10.1016/j.pquantelec.2025.100565_bib211
– volume: 66
  start-page: 4548
  issue: 10
  year: 2018
  ident: 10.1016/j.pquantelec.2025.100565_bib15
  article-title: Microwave acoustic wave devices: recent advances on architectures, modeling, materials, and packaging
  publication-title: IEEE Trans. Microw. Theor. Tech.
  doi: 10.1109/TMTT.2018.2854160
– volume: 209
  start-page: 183
  year: 2014
  ident: 10.1016/j.pquantelec.2025.100565_bib141
  article-title: A high electromechanical coupling coefficient SH0 Lamb wave lithium niobate micromechanical resonator and a method for fabrication
  publication-title: Sens Actuators A Phys
  doi: 10.1016/j.sna.2014.01.033
– volume: 62
  issue: 1
  year: 2022
  ident: 10.1016/j.pquantelec.2025.100565_bib159
  article-title: Heterogeneous integration of lithium tantalate thin film on quartz for high performance surface acoustic wave resonator
  publication-title: Jpn. J. Appl. Phys.
  doi: 10.35848/1347-4065/aca5d7
– start-page: 1
  year: 2017
  ident: 10.1016/j.pquantelec.2025.100565_bib129
  article-title: Enhanced piezoelectric properties of c-axis textured aluminium scandium nitride thin films with high scandium content: influence of intrinsic stress and sputtering parameters
– year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib57
  article-title: 18 GHz solidly mounted resonator in scandium aluminum nitride on SiO2/Ta2O5 Bragg reflector
  publication-title: arXiv preprint arXiv:2407.02741
– volume: 6
  start-page: 69
  issue: 1
  year: 2000
  ident: 10.1016/j.pquantelec.2025.100565_bib107
  article-title: A review of lithium niobate modulators for fiber-optic communications systems
  publication-title: IEEE J. Sel. Top. Quant. Electron.
  doi: 10.1109/2944.826874
– volume: 11
  start-page: 1048
  issue: 12
  year: 2023
  ident: 10.1016/j.pquantelec.2025.100565_bib133
  article-title: Thermal conductivity enhancement of aluminum scandium nitride grown by molecular beam epitaxy
  publication-title: Mater Res Lett
  doi: 10.1080/21663831.2023.2279667
– year: 2019
  ident: 10.1016/j.pquantelec.2025.100565_bib4
  article-title: Microwave/RF components for 5G front-end systems
  publication-title: Avid Science
– volume: 68
  start-page: 3653
  issue: 9
  year: 2020
  ident: 10.1016/j.pquantelec.2025.100565_bib161
  article-title: Surface acoustic wave devices using lithium niobate on silicon carbide
  publication-title: IEEE Trans. Microw. Theor. Tech.
  doi: 10.1109/TMTT.2020.3006294
– start-page: 1
  year: 2016
  ident: 10.1016/j.pquantelec.2025.100565_bib96
  article-title: Carrier aggregation and its challenges-or: the golden age for acoustic filters
  publication-title: Microwave Symposium (IMS)
– year: 2023
  ident: 10.1016/j.pquantelec.2025.100565_bib220
  article-title: Thin-film lithium niobate acoustic resonator with high Q of 237 and k2 of 5.1% at 50.74 GHz
  publication-title: arXiv preprint arXiv:2307.05742
– start-page: 2564
  year: 2019
  ident: 10.1016/j.pquantelec.2025.100565_bib205
  article-title: Investigations of a new design concept for wide-band hybrid ladder filters
  publication-title: IEEE Int. Ultrason. Symp.
– ident: 10.1016/j.pquantelec.2025.100565_bib65
– volume: 1
  start-page: 601
  issue: 2
  year: 2021
  ident: 10.1016/j.pquantelec.2025.100565_bib12
  article-title: Microwave acoustic devices: recent advances and outlook
  publication-title: IEEE J. Microwaves
  doi: 10.1109/JMW.2021.3064825
– volume: 2020-Septe
  start-page: 1
  year: 2020
  ident: 10.1016/j.pquantelec.2025.100565_bib148
  article-title: Lithium niobate film bulk acoustic wave resonator for sub-6 GHz filters
  publication-title: IEEE International Ultrasonics Symposium, IUS
– volume: 5
  issue: 8
  year: 2020
  ident: 10.1016/j.pquantelec.2025.100565_bib154
  article-title: Acousto-optic modulation in lithium niobate on sapphire
  publication-title: APL Photonics
  doi: 10.1063/5.0012288
– year: 2009
  ident: 10.1016/j.pquantelec.2025.100565_bib203
– volume: 34
  start-page: 391
  issue: 4
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib209
  article-title: 23.8-GHz acoustic filter in periodically poled piezoelectric film lithium niobate with 1.52-dB IL and 19.4% FBW
  publication-title: IEEE Microwave Wireless Technol.Lett.
  doi: 10.1109/LMWT.2024.3368354
– start-page: 1
  year: 2025
  ident: 10.1016/j.pquantelec.2025.100565_bib215
  article-title: Frequency and bandwidth design toward millimeter-wave thin-film lithium niobate acoustic filters
  publication-title: IEEE Microwave Wireless Technol.Lett.
  doi: 10.1109/LMWT.2025.3559400
– start-page: 1
  year: 2020
  ident: 10.1016/j.pquantelec.2025.100565_bib127
  article-title: Zig-zag ScAlN multilayer SMR for high power BAW fileter application such as RF base station
– year: 2023
  ident: 10.1016/j.pquantelec.2025.100565_bib184
– start-page: 117
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib83
  article-title: Thin-film lithium niobate on insulator surface acoustic wave devices for 6G centimeter bands
– volume: 15
  start-page: 3582
  issue: 1
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib31
  article-title: Frequency tunable magnetostatic wave filters with zero static power magnetic biasing circuitry
  publication-title: Nat. Commun.
  doi: 10.1038/s41467-024-47822-3
– start-page: 36
  year: 2018
  ident: 10.1016/j.pquantelec.2025.100565_bib114
  article-title: Scaling acoustic filters towards 5G
– volume: 15
  issue: 1
  year: 2021
  ident: 10.1016/j.pquantelec.2025.100565_bib155
  article-title: Gigahertz phononic integrated circuits on thin-film lithium niobate on sapphire
  publication-title: Phys. Rev. Appl.
  doi: 10.1103/PhysRevApplied.15.014039
– volume: 1
  start-page: 957
  year: 2020
  ident: 10.1016/j.pquantelec.2025.100565_bib2
  article-title: 6G wireless communication systems: applications, requirements, technologies, challenges, and research directions
  publication-title: IEEE Open Journal of the Communications Society
  doi: 10.1109/OJCOMS.2020.3010270
– start-page: 891
  year: 2023
  ident: 10.1016/j.pquantelec.2025.100565_bib54
  article-title: A manufacturable AlScN periodically polarized piezoelectric film bulk acoustic wave resonator (AlScN P3F BAW) operating in overtone mode at X and ku band
– start-page: 1102
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib84
  article-title: X-cut lithium niobate S0 mode resonators for 5G applications
– volume: 2020-Septe
  start-page: 1
  year: 2020
  ident: 10.1016/j.pquantelec.2025.100565_bib117
  article-title: Smart CutTM Piezo on Insulator (POI) substrates for high performances SAW components
  publication-title: IEEE International Ultrasonics Symposium, IUS
– start-page: 30
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib25
  article-title: Temperature compensated magnetostatic wave resonator microsystem
– start-page: 1235
  year: 2008
  ident: 10.1016/j.pquantelec.2025.100565_bib20
  article-title: A Ka-band multilayer LTCC 4-pole bandpass filter using dual-mode cavity resonators
– volume: 14
  issue: 1
  year: 2020
  ident: 10.1016/j.pquantelec.2025.100565_bib131
  article-title: Metal‐organic chemical vapor deposition of aluminum scandium nitride
  publication-title: Phys. Status Solidi Rapid Res. Lett.
  doi: 10.1002/pssr.201900535
– start-page: 378
  year: 2023
  ident: 10.1016/j.pquantelec.2025.100565_bib34
  article-title: A 1-to-5GHz all-passive frequency-translational 4th-order N-path filter with low-power clock boosting for high linearity and relaxed $\mathrm{P}_{\text{dc}}$-Frequency trade-off
– start-page: 647
  year: 2021
  ident: 10.1016/j.pquantelec.2025.100565_bib166
  article-title: Single-layer thin-film lithium niobate out-of-plane actuators
– start-page: 1
  year: 2023
  ident: 10.1016/j.pquantelec.2025.100565_bib60
  article-title: 55.4 GHz bulk acoustic resonator in thin-film scandium aluminum nitride
– start-page: 1
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib52
  article-title: Near 6-GHz sezawa mode surface acoustic wave resonators using AlScN on SiC
  publication-title: J. Microelectromech. Syst.
– volume: 1
  start-page: 24
  issue: 4
  year: 2017
  ident: 10.1016/j.pquantelec.2025.100565_bib93
  article-title: NR: the new 5G radio access technology
  publication-title: IEEE Communications Standards Magazine
  doi: 10.1109/MCOMSTD.2017.1700042
– volume: 30
  start-page: 632
  issue: 4
  year: 2021
  ident: 10.1016/j.pquantelec.2025.100565_bib100
  article-title: Acoustic loss in thin-film lithium niobate: an experimental study
  publication-title: J. Microelectromech. Syst.
  doi: 10.1109/JMEMS.2021.3092724
– start-page: 1
  year: 2023
  ident: 10.1016/j.pquantelec.2025.100565_bib76
  article-title: Frequency scaling millimeter wave acoustic resonators using ion beam trimmed lithium niobate
– start-page: 1
  year: 2023
  ident: 10.1016/j.pquantelec.2025.100565_bib81
  article-title: Aluminum scandium nitride for mm-wave acoustic filtering: challenges and outlook
– start-page: 1
  year: 2020
  ident: 10.1016/j.pquantelec.2025.100565_bib136
  article-title: High figure of merit X-cut lithium niobate MEMS resonators operating around 50 MHz for large passive voltage amplification in radio frequency applications
  publication-title: IEEE Trans. Ultrason. Ferroelectrics Freq. Control
– volume: 69
  start-page: 3693
  issue: 8
  year: 2021
  ident: 10.1016/j.pquantelec.2025.100565_bib164
  article-title: High-performance surface acoustic wave devices using LiNbO 3/SiO 2/SiC multilayered substrates
  publication-title: IEEE Trans. Microw. Theor. Tech.
  doi: 10.1109/TMTT.2021.3077261
– start-page: 1
  year: 2023
  ident: 10.1016/j.pquantelec.2025.100565_bib87
  article-title: Spurious-free and low-loss surface acoustic wave filter beyond 5 GHz
– volume: 52
  start-page: 5LT01
  issue: 5
  year: 2018
  ident: 10.1016/j.pquantelec.2025.100565_bib169
  article-title: Silicon acoustoelectronics with thin film lithium niobate
  publication-title: J. Phys. D Appl. Phys.
  doi: 10.1088/1361-6463/aaee59
– volume: 13
  start-page: 242
  issue: 2
  year: 2021
  ident: 10.1016/j.pquantelec.2025.100565_bib216
  article-title: Integrated photonics on thin-film lithium niobate
  publication-title: Adv. Opt. Photonics
  doi: 10.1364/AOP.411024
– year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib29
  article-title: High-performance magnetostatic wave resonators through deep anisotropic etching of GGG substrates
– year: 2009
  ident: 10.1016/j.pquantelec.2025.100565_bib37
– volume: 118
  start-page: 1166
  issue: 1384
  year: 2010
  ident: 10.1016/j.pquantelec.2025.100565_bib126
  article-title: Preparation of scandium aluminum nitride thin films by using scandium aluminum alloy sputtering target and design of experiments
  publication-title: J. Ceram. Soc. Jpn.
  doi: 10.2109/jcersj2.118.1166
– volume: 67
  start-page: 915
  issue: 3
  year: 2019
  ident: 10.1016/j.pquantelec.2025.100565_bib97
  article-title: Comparative study of acoustic wave devices using thin piezoelectric plates in the 3-5-GHz range
  publication-title: IEEE Trans. Microw. Theor. Tech.
  doi: 10.1109/TMTT.2018.2890661
– volume: 6
  start-page: 1498
  issue: 12
  year: 2019
  ident: 10.1016/j.pquantelec.2025.100565_bib108
  article-title: Microwave-to-optical conversion using lithium niobate thin-film acoustic resonators
  publication-title: Optica
  doi: 10.1364/OPTICA.6.001498
– start-page: 207
  year: 2021
  ident: 10.1016/j.pquantelec.2025.100565_bib47
  article-title: Wideband 6 GHz RF filters for wi-fi 6E using a unique BAW process and highly Sc-doped AlN thin film
– volume: 8
  start-page: 921
  issue: 6
  year: 2021
  ident: 10.1016/j.pquantelec.2025.100565_bib156
  article-title: Mid-infrared nonlinear optics in thin-film lithium niobate on sapphire
  publication-title: Optica
  doi: 10.1364/OPTICA.427428
– start-page: 84
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib63
  article-title: 18 GHz microacoustic ScAlN Lamb wave resonators for Ku band applications
– volume: 55
  issue: 9
  year: 2008
  ident: 10.1016/j.pquantelec.2025.100565_bib176
  article-title: The power flow angle of acoustic waves in thin piezoelectric plates
  publication-title: IEEE Trans. Ultrason. Ferroelectrics Freq. Control
  doi: 10.1109/TUFFC.889
– volume: 71
  start-page: 2532
  issue: 6
  year: 2023
  ident: 10.1016/j.pquantelec.2025.100565_bib212
  article-title: Vertically stacked millimeter-wave LTCC filters with cavity-mode suppression for system-in-package application
  publication-title: IEEE Trans. Microw. Theor. Tech.
  doi: 10.1109/TMTT.2022.3230722
– start-page: 23
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib222
  article-title: Transferred thin film lithium niobate as millimeter wave acoustic filter platforms
– year: 2021
  ident: 10.1016/j.pquantelec.2025.100565_bib44
– volume: 33
  start-page: 121
  issue: 2
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib53
  article-title: Highly tunable piezoelectric resonators using Al0.7Sc0.3N
  publication-title: J. Microelectromech. Syst.
  doi: 10.1109/JMEMS.2023.3344018
– volume: 31
  start-page: 186
  issue: 2
  year: 2022
  ident: 10.1016/j.pquantelec.2025.100565_bib163
  article-title: SAW filters with excellent temperature stability and high power handling using LiTaO 3/SiC bonded wafers
  publication-title: J. Microelectromech. Syst.
  doi: 10.1109/JMEMS.2021.3137928
– volume: 16
  start-page: 657
  issue: 12
  year: 2006
  ident: 10.1016/j.pquantelec.2025.100565_bib204
  article-title: Closed-form expressions for the design of ladder-type FBAR filters
  publication-title: IEEE Microw. Wireless Compon. Lett.
  doi: 10.1109/LMWC.2006.885610
– start-page: 1
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib207
  article-title: Acoustic and electromagnetic Co-modeling of piezoelectric devices at millimeter wave
  publication-title: J. Microelectromech. Syst.
– volume: 11
  start-page: 397
  issue: 4
  year: 2021
  ident: 10.1016/j.pquantelec.2025.100565_bib132
  article-title: Epitaxy of LiNbO3: historical challenges and recent success
  publication-title: Crystals
  doi: 10.3390/cryst11040397
– ident: 10.1016/j.pquantelec.2025.100565_bib191
– start-page: 1
  year: 2023
  ident: 10.1016/j.pquantelec.2025.100565_bib49
  article-title: A solidly mounted 55 GHz overmoded bulk acoustic resonator
– volume: 125
  start-page: 14394
  issue: 26
  year: 2021
  ident: 10.1016/j.pquantelec.2025.100565_bib124
  article-title: Nanoscale structural and chemical properties of ferroelectric aluminum scandium nitride thin films
  publication-title: J. Phys. Chem. C
  doi: 10.1021/acs.jpcc.1c01523
– start-page: 14
  year: 2022
  ident: 10.1016/j.pquantelec.2025.100565_bib188
  article-title: 57 GHz acoustic resonator with k 2 of 7.3% and Q of 56 in thin-film lithium niobate
– volume: 67
  start-page: 402
  issue: 2
  year: 2019
  ident: 10.1016/j.pquantelec.2025.100565_bib182
  article-title: GHz broadband SH0 mode lithium niobate acoustic delay lines
  publication-title: IEEE Trans. Ultrason. Ferroelectrics Freq. Control
  doi: 10.1109/TUFFC.2019.2943355
– volume: 130
  start-page: 236
  issue: 6
  year: 2010
  ident: 10.1016/j.pquantelec.2025.100565_bib122
  article-title: Preparation of thin lithium niobate layer on silicon wafer for wafer-level integration of acoustic devices and LSI
  publication-title: IEEJ Trans. Sensors Micromachines
  doi: 10.1541/ieejsmas.130.236
– start-page: 1
  year: 2023
  ident: 10.1016/j.pquantelec.2025.100565_bib71
  article-title: High-performance acoustic wave devices on LiTaO $_{3}$/SiC hetero-substrates
  publication-title: IEEE Trans. Microw. Theor. Tech.
– volume: 16
  start-page: 60
  issue: 7
  year: 2015
  ident: 10.1016/j.pquantelec.2025.100565_bib7
  article-title: Golden age for filter design: innovative and proven approaches for acoustic filter, duplexer, and multiplexer design
  publication-title: IEEE Microw. Mag.
  doi: 10.1109/MMM.2015.2431236
– volume: 15
  start-page: 108
  issue: 5
  year: 2014
  ident: 10.1016/j.pquantelec.2025.100565_bib22
  article-title: Substrate integrated waveguide filter: basic design rules and fundamental structure features
  publication-title: IEEE Microw. Mag.
  doi: 10.1109/MMM.2014.2321263
– start-page: 303
  year: 2012
  ident: 10.1016/j.pquantelec.2025.100565_bib171
  article-title: Thin-film lithium niobate contour-mode resonators
– volume: 67
  start-page: 915
  issue: 3
  year: 2019
  ident: 10.1016/j.pquantelec.2025.100565_bib69
  article-title: Comparative study of acoustic wave devices using thin piezoelectric plates in the 3–5-GHz range
  publication-title: IEEE Trans. Microw. Theor. Tech.
  doi: 10.1109/TMTT.2018.2890661
– start-page: 1752
  year: 2019
  ident: 10.1016/j.pquantelec.2025.100565_bib147
  article-title: Fabrication of lithium niobate bulk acoustic resonator for 5G filters
– start-page: 87
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib208
  article-title: 38.7 GHz thin film lithium niobate acoustic filter
– volume: 41
  start-page: 1444
  issue: 9
  year: 2020
  ident: 10.1016/j.pquantelec.2025.100565_bib153
  article-title: Acoustoelectric non-reciprocity in lithium niobate-on-silicon delay lines
  publication-title: IEEE Electron Device Lett.
  doi: 10.1109/LED.2020.3007062
– volume: 68
  start-page: 1955
  issue: 5
  year: 2020
  ident: 10.1016/j.pquantelec.2025.100565_bib160
  article-title: Surface acoustic wave resonators with hetero acoustic layer (HAL) structure using lithium tantalate and quartz
  publication-title: IEEE Trans. Ultrason. Ferroelectrics Freq. Control
  doi: 10.1109/TUFFC.2020.3039471
– start-page: 23
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib190
  article-title: Transferred thin film lithium niobate as millimeter wave acoustic filter platforms
– volume: 33
  start-page: 807
  issue: 6
  year: 2023
  ident: 10.1016/j.pquantelec.2025.100565_bib26
  article-title: Micromachined tunable magnetostatic forward volume wave bandstop filter
  publication-title: IEEE Microwave Wireless Technol.Lett.
  doi: 10.1109/LMWT.2023.3267449
– volume: 6
  start-page: 599
  issue: 8
  year: 2023
  ident: 10.1016/j.pquantelec.2025.100565_bib67
  article-title: Nanoelectromechanical resonators for gigahertz frequency control based on hafnia–zirconia–alumina superlattices
  publication-title: Nat Electron
  doi: 10.1038/s41928-023-00999-9
– volume: 69
  start-page: 689
  issue: 3
  year: 1981
  ident: 10.1016/j.pquantelec.2025.100565_bib187
  article-title: Attenuation of acoustic waves in lithium niobate
  publication-title: J. Acoust. Soc. Am.
  doi: 10.1121/1.385588
– start-page: 1248
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib33
  article-title: A 3-to-13 GHz quasi-elliptic higher-order N-path filter
– start-page: 16.1.1
  year: 2022
  ident: 10.1016/j.pquantelec.2025.100565_bib45
  article-title: XBAW, an enabling technology for next generation resonators and filter solutions for 5G and Wi-Fi 6/6E/7 applications (Invited)
– start-page: 98
  year: 2022
  ident: 10.1016/j.pquantelec.2025.100565_bib91
  article-title: 6.2 GHz lithium niobate MEMS filter with FBW of 11.8% and IL of 1.7 dB
– start-page: 809
  year: 2022
  ident: 10.1016/j.pquantelec.2025.100565_bib162
  article-title: Acoustic delay lines in thin-film lithium niobate on silicon carbide
– year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib213
  article-title: Glass-based single-layer slow wave SIW filter with embedded composite right-/left-handed resonator
  publication-title: IEEE Trans. Microw. Theor. Tech.
– volume: 30
  start-page: 876
  issue: 6
  year: 2021
  ident: 10.1016/j.pquantelec.2025.100565_bib101
  article-title: Acoustic loss of GHz higher-order Lamb waves in thin-film lithium niobate: a comparative study
  publication-title: J. Microelectromech. Syst.
  doi: 10.1109/JMEMS.2021.3114627
– year: 2025
  ident: 10.1016/j.pquantelec.2025.100565_bib110
  article-title: Lithium niobate microphone with high SNR potential
  publication-title: IEEE Sens. J.
  doi: 10.1109/JSEN.2025.3555885
– start-page: 804
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib89
  article-title: 6.5 GHz longitudinal Leaky SAW filter using LiNbO3-on-SiC structure for Wi-Fi 7
– volume: 29
  start-page: 313
  issue: 3
  year: 2020
  ident: 10.1016/j.pquantelec.2025.100565_bib105
  article-title: A1 resonators in 128 Y-cut lithium niobate with electromechanical coupling of 46.4%
  publication-title: J. Microelectromech. Syst.
  doi: 10.1109/JMEMS.2020.2982775
– volume: 32
  start-page: 622
  issue: 6
  year: 2023
  ident: 10.1016/j.pquantelec.2025.100565_bib221
  article-title: Thin-film lithium niobate acoustic filter at 23.5 GHz with 2.38 dB IL and 18.2% FBW
  publication-title: J. Microelectromech. Syst.
  doi: 10.1109/JMEMS.2023.3314666
– start-page: 967
  year: 2021
  ident: 10.1016/j.pquantelec.2025.100565_bib145
  article-title: Fabrication and analysis of thin film lithum niobate resonators for 5GHz frequency and large Kt2 applications
– start-page: 813
  year: 2001
  ident: 10.1016/j.pquantelec.2025.100565_bib39
  article-title: Thin film bulk wave acoustic resonators (FBAR) for wireless applications
  publication-title: IEEE Int. Ultrason. Symp.
– start-page: 1
  year: 2021
  ident: 10.1016/j.pquantelec.2025.100565_bib178
  article-title: Power flow angles of GHz propagating acoustic waves in thin-film lithium niobate
– start-page: 201
  year: 2008
  ident: 10.1016/j.pquantelec.2025.100565_bib119
  article-title: Large Qxf product for HBAR using Smart CutTM transfer of LiNbO3 thin layers onto LiNbO3 substrate
  publication-title: IEEE Int. Ultrason. Symp.
– start-page: 1
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib78
  article-title: C-band lithium niobate on silicon carbide SAW resonator with figure-of-merit of 124 at 6.5 GHz
  publication-title: J. Microelectromech. Syst.
– volume: 13
  start-page: 312
  issue: 9
  year: 1968
  ident: 10.1016/j.pquantelec.2025.100565_bib109
  article-title: High‐performance lithium niobate acoustic surface wave transducers and delay lines
  publication-title: Appl. Phys. Lett.
  doi: 10.1063/1.1652627
– volume: 29
  start-page: 1332
  issue: 5
  year: 2020
  ident: 10.1016/j.pquantelec.2025.100565_bib194
  article-title: Enabling higher order Lamb wave acoustic devices with complementarily oriented piezoelectric thin films
  publication-title: J. Microelectromech. Syst.
  doi: 10.1109/JMEMS.2020.3007590
– start-page: 1
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib168
  article-title: Gold as a promising electrode material for LiNbO3-on-Insulator (LNOI) SH-SAW resonators: an experimental study
  publication-title: IEEE Trans. Ultrason. Ferroelectrics Freq. Control
– volume: 31
  start-page: 674
  issue: 6
  year: 2021
  ident: 10.1016/j.pquantelec.2025.100565_bib42
  article-title: Novel temperature-compensated, silicon SAW design for filter integration
  publication-title: IEEE Microw. Wireless Compon. Lett.
  doi: 10.1109/LMWC.2021.3068624
– start-page: 1
  year: 2022
  ident: 10.1016/j.pquantelec.2025.100565_bib75
  article-title: Y-36 lithium niobate films support f-Q of $5.5\cdot 10^{13}$ hz in the 1-10 GHz range
– volume: 87
  start-page: 1962
  issue: 11
  year: 1999
  ident: 10.1016/j.pquantelec.2025.100565_bib106
  article-title: Lithium niobate fibers and waveguides: fabrications and applications
  publication-title: Proc. IEEE
  doi: 10.1109/5.796358
– start-page: 1
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib28
  article-title: A distributed magnetostatic resonator
  publication-title: IEEE Trans. Microw. Theor. Tech.
– start-page: 1
  year: 2017
  ident: 10.1016/j.pquantelec.2025.100565_bib40
  article-title: IHP SAW technology and its application to microacoustic components
– volume: 35
  start-page: 512
  issue: 4
  year: 2000
  ident: 10.1016/j.pquantelec.2025.100565_bib16
  article-title: High-Q HF microelectromechanical filters
  publication-title: IEEE J. Solid State Circ.
  doi: 10.1109/4.839911
– volume: 71
  start-page: 5630
  issue: 9
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib55
  article-title: A high quality factor, 19-GHz periodically poled AlScN BAW resonator fabricated in a commercial XBAW process
  publication-title: IEEE Trans. Electron. Dev.
  doi: 10.1109/TED.2024.3435175
– volume: n/a
  issue: n/a
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib66
  article-title: Nanoscale phase and orientation mapping in multiphase polycrystalline hafnium zirconium oxide thin films using 4D-STEM and automated diffraction indexing
  publication-title: Small Methods
– start-page: 1083
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib56
  article-title: Millimeter wave thin-film bulk acoustic resonator in sputtered scandium aluminum nitride using platinum electrodes
– volume: 30
  issue: 1
  year: 2019
  ident: 10.1016/j.pquantelec.2025.100565_bib186
  article-title: Frequency-scalable fabrication process flow for lithium niobate based Lamb wave resonators
  publication-title: J. Micromech. Microeng.
  doi: 10.1088/1361-6439/ab5b7b
– volume: 69
  start-page: 3246
  issue: 7
  year: 2021
  ident: 10.1016/j.pquantelec.2025.100565_bib157
  article-title: Gigahertz low-loss and high power handling acoustic delay lines using thin-film lithium-niobate-on-sapphire
  publication-title: IEEE Trans. Microw. Theor. Tech.
  doi: 10.1109/TMTT.2021.3074918
– volume: 30
  start-page: 834
  issue: 7
  year: 2001
  ident: 10.1016/j.pquantelec.2025.100565_bib123
  article-title: The generic nature of the Smart-Cut® process for thin film transfer
  publication-title: J. Electron. Mater.
  doi: 10.1007/s11664-001-0067-2
– volume: 55
  start-page: 98
  issue: 2
  year: 2018
  ident: 10.1016/j.pquantelec.2025.100565_bib146
  article-title: 5 GHz laterally-excited bulk-wave resonators (XBARs) based on thin platelets of lithium niobate
  publication-title: Electron. Lett.
  doi: 10.1049/el.2018.7297
– year: 2023
  ident: 10.1016/j.pquantelec.2025.100565_bib193
– year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib62
  article-title: Scandium aluminum nitride overmoded bulk acoustic resonators for future wireless communication
  publication-title: arXiv preprint arXiv:2404.15005
– start-page: 206
  year: 2018
  ident: 10.1016/j.pquantelec.2025.100565_bib46
  article-title: High power, wideband single crystal XBAW technology for sub-6 GHz micro RF filter applications
– volume: 31
  issue: 11
  year: 2021
  ident: 10.1016/j.pquantelec.2025.100565_bib116
  article-title: RF acoustic microsystems based on suspended lithium niobate thin films: advances and outlook
  publication-title: J. Micromech. Microeng.
  doi: 10.1088/1361-6439/ac288f
– start-page: 1
  year: 2002
  ident: 10.1016/j.pquantelec.2025.100565_bib19
  article-title: Highly selective microstrip bandpass filters in ka-band
– volume: 13
  start-page: 242
  issue: 2
  year: 2021
  ident: 10.1016/j.pquantelec.2025.100565_bib112
  article-title: Integrated photonics on thin-film lithium niobate
  publication-title: Adv. Opt. Photonics
  doi: 10.1364/AOP.411024
– start-page: 1
  year: 2021
  ident: 10.1016/j.pquantelec.2025.100565_bib137
  article-title: A 100 nm thick, 32 kHz X-cut lithium niobate piezoelectric nanoscale ultrasound transducer for airborne ultrasound communication
  publication-title: J. Microelectromech. Syst.
– start-page: 1
  year: 2021
  ident: 10.1016/j.pquantelec.2025.100565_bib165
  article-title: “Wideband and low-loss surface acoustic wave filter based on 15°YX-LiNbO3/SiO2/Si structure,”
  publication-title: IEEE Electron Device Lett.
– start-page: 1993
  year: 2015
  ident: 10.1016/j.pquantelec.2025.100565_bib210
  article-title: Study of thermal nonlinearity in lithium niobate-based MEMS resonators
– volume: 70
  start-page: 5195
  issue: 11
  year: 2022
  ident: 10.1016/j.pquantelec.2025.100565_bib151
  article-title: Micromachined heterostructured Lamb mode waveguides for acoustoelectric signal processing
  publication-title: IEEE Trans. Microw. Theor. Tech.
  doi: 10.1109/TMTT.2022.3194723
– volume: 28
  start-page: 575
  issue: 4
  year: 2019
  ident: 10.1016/j.pquantelec.2025.100565_bib70
  article-title: 4.5 GHz lithium niobate MEMS filters with 10% fractional bandwidth for 5G front-ends
  publication-title: J. Microelectromech. Syst.
  doi: 10.1109/JMEMS.2019.2922935
– volume: 20
  start-page: 258
  issue: 4
  year: 1972
  ident: 10.1016/j.pquantelec.2025.100565_bib21
  article-title: Narrow-bandpass waveguide filters
  publication-title: IEEE Trans. Microw. Theor. Tech.
  doi: 10.1109/TMTT.1972.1127732
– volume: 27
  start-page: 9794
  issue: 7
  year: 2019
  ident: 10.1016/j.pquantelec.2025.100565_bib143
  article-title: Low-loss waveguides on Y-cut thin film lithium niobate: towards acousto-optic applications
  publication-title: Opt. Express
  doi: 10.1364/OE.27.009794
– year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib86
– start-page: 1
  year: 2016
  ident: 10.1016/j.pquantelec.2025.100565_bib173
  article-title: Solidly mounted ladder filter using shear horizontal wave in LiNbO3
– year: 2023
  ident: 10.1016/j.pquantelec.2025.100565_bib206
– volume: 136
  start-page: 3
  issue: 1
  year: 2007
  ident: 10.1016/j.pquantelec.2025.100565_bib104
  article-title: Squeeze film air damping in MEMS
  publication-title: Sens Actuators A Phys
  doi: 10.1016/j.sna.2007.01.008
– start-page: 563
  year: 2018
  ident: 10.1016/j.pquantelec.2025.100565_bib142
  article-title: 1.7 GHz Y-cut lithium niobate MEMS resonators with FoM of336 andfQ of9. 15× 10 12
– volume: 32
  start-page: 529
  issue: 6
  year: 2023
  ident: 10.1016/j.pquantelec.2025.100565_bib59
  article-title: Millimeter wave thin-film bulk acoustic resonator in sputtered scandium aluminum nitride
  publication-title: J. Microelectromech. Syst.
  doi: 10.1109/JMEMS.2023.3321284
– start-page: 1
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib219
  article-title: 21.4 GHz surface acoustic wave resonator with 11,400 m/s phase velocity in thin-film lithium niobate on silicon carbide
– volume: 28
  start-page: 1110
  issue: 12
  year: 2018
  ident: 10.1016/j.pquantelec.2025.100565_bib18
  article-title: First demonstration of compact, ultra-thin low-pass and bandpass filters for 5G small-cell applications
  publication-title: IEEE Microw. Wireless Compon. Lett.
  doi: 10.1109/LMWC.2018.2876769
– volume: 72
  start-page: 2498
  issue: 4
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib214
  article-title: Lumped-distributed on-chip resonators with multistubs reused and its application to stopband extended IPD bandpass filters
  publication-title: IEEE Trans. Microw. Theor. Tech.
  doi: 10.1109/TMTT.2023.3316358
– year: 2017
  ident: 10.1016/j.pquantelec.2025.100565_bib38
– start-page: 962
  year: 2017
  ident: 10.1016/j.pquantelec.2025.100565_bib144
  article-title: Integration of bottom electrode in Y-cut lithium niobate thin films for high electromechanical coupling and high capacitance per unit area MEMS resonators
– volume: 1
  start-page: 601
  issue: 2
  year: 2021
  ident: 10.1016/j.pquantelec.2025.100565_bib13
  article-title: Microwave acoustic devices: recent advances and outlook
  publication-title: IEEE J. Microwaves
  doi: 10.1109/JMW.2021.3064825
– volume: 45
  start-page: 1341
  issue: 7
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib80
  article-title: A 19 GHz all-epitaxial Al0.8Sc0.2N cascaded FBAR for RF filtering applications
  publication-title: IEEE Electron Device Lett.
  doi: 10.1109/LED.2024.3404477
– start-page: 31
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib64
  article-title: Up-scaling microacoustics: 20 to 35 GHz ALN resonators with f • Q products exceeding 14 THz
– volume: 69
  start-page: 629
  issue: 1
  year: 2021
  ident: 10.1016/j.pquantelec.2025.100565_bib202
  article-title: A synthesis approach to acoustic wave ladder filters and duplexers starting with shunt resonator
  publication-title: IEEE Trans. Microw. Theor. Tech.
  doi: 10.1109/TMTT.2020.3033554
– volume: 95
  issue: 18
  year: 2009
  ident: 10.1016/j.pquantelec.2025.100565_bib138
  article-title: Large electromechanical coupling factor film bulk acoustic resonator with X-cut LiNbO 3 layer transfer
  publication-title: Appl. Phys. Lett.
  doi: 10.1063/1.3258496
– start-page: 8
  year: 2015
  ident: 10.1016/j.pquantelec.2025.100565_bib197
  article-title: Study of thermal nonlinearity in lithium niobate-based MEMS resonators
  publication-title: Transducers
– start-page: 1
  year: 2023
  ident: 10.1016/j.pquantelec.2025.100565_bib51
  article-title: Measurement of intrinsic mechanical loss in aluminum films from 3 to 25 GHz by HBAR spectroscopy
– year: 2025
  ident: 10.1016/j.pquantelec.2025.100565_bib180
– volume: 61
  start-page: SG1001
  issue: SG
  year: 2022
  ident: 10.1016/j.pquantelec.2025.100565_bib175
  article-title: Use of heavy dielectric materials in solidly mounted A1 mode resonators based on lithium niobate
  publication-title: Jpn. J. Appl. Phys.
  doi: 10.35848/1347-4065/ac3f6f
– volume: 79
  start-page: 1342
  issue: 9
  year: 2001
  ident: 10.1016/j.pquantelec.2025.100565_bib111
  article-title: Dielectric constant and loss tangent in LiNbO 3 crystals from 90 to 147 GHz
  publication-title: Appl. Phys. Lett.
  doi: 10.1063/1.1399305
– year: 2023
  ident: 10.1016/j.pquantelec.2025.100565_bib68
  article-title: The ferroelectric-gate fin microwave acoustic signal processor
  publication-title: arXiv preprint arXiv:2302.01411
– volume: 31
  issue: 5
  year: 2021
  ident: 10.1016/j.pquantelec.2025.100565_bib167
  article-title: Thin-film lithium niobate-on-insulator (LNOI) shear horizontal surface acoustic wave resonators
  publication-title: J. Micromech. Microeng.
  doi: 10.1088/1361-6439/abf1b5
– volume: 52
  start-page: 42
  issue: 12
  year: 2014
  ident: 10.1016/j.pquantelec.2025.100565_bib1
  article-title: 5G wireless access: requirements and realization
  publication-title: IEEE Commun. Mag.
  doi: 10.1109/MCOM.2014.6979985
– start-page: 1
  year: 2020
  ident: 10.1016/j.pquantelec.2025.100565_bib11
  article-title: Power consumption analysis for mobile mmWave and sub-THz receivers
– start-page: 117
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib85
  article-title: Thin-film lithium niobate on insulator surface acoustic wave devices for 6G centimeter bands
– volume: 102
  issue: 2
  year: 2013
  ident: 10.1016/j.pquantelec.2025.100565_bib128
  article-title: Influence of scandium concentration on power generation figure of merit of scandium aluminum nitride thin films
  publication-title: Appl. Phys. Lett.
  doi: 10.1063/1.4788728
– volume: 24
  start-page: 300
  issue: 2
  year: 2015
  ident: 10.1016/j.pquantelec.2025.100565_bib172
  article-title: Design and fabrication of S0 Lamb-wave thin-film lithium niobate micromechanical resonators
  publication-title: J. Microelectromech. Syst.
  doi: 10.1109/JMEMS.2014.2384916
– volume: 2
  start-page: 931
  year: 2004
  ident: 10.1016/j.pquantelec.2025.100565_bib17
  article-title: Acoustic FBAR for filters, duplexers and front end modules
  publication-title: Microwave Symposium Digest
– volume: 66
  start-page: 1373
  issue: 8
  year: 2019
  ident: 10.1016/j.pquantelec.2025.100565_bib181
  article-title: Gigahertz low-loss and wide-band S0 mode lithium niobate acoustic delay lines
  publication-title: IEEE Trans. Ultrason. Ferroelectrics Freq. Control
  doi: 10.1109/TUFFC.2019.2916259
– volume: 59
  start-page: 2097
  issue: 17
  year: 1991
  ident: 10.1016/j.pquantelec.2025.100565_bib130
  article-title: Epitaxial growth of aluminum nitride on Si (111) by reactive sputtering
  publication-title: Appl. Phys. Lett.
  doi: 10.1063/1.106092
– year: 2019
  ident: 10.1016/j.pquantelec.2025.100565_bib189
– volume: 37
  start-page: 191
  issue: 4
  year: 1985
  ident: 10.1016/j.pquantelec.2025.100565_bib113
  article-title: Lithium niobate: summary of physical properties and crystal structure
  publication-title: Appl. Phys. A
  doi: 10.1007/BF00614817
– start-page: 36
  year: 2018
  ident: 10.1016/j.pquantelec.2025.100565_bib115
  article-title: Scaling acoustic filters towards 5G
– volume: 16
  start-page: 46
  issue: 7
  year: 2015
  ident: 10.1016/j.pquantelec.2025.100565_bib8
  article-title: A snapshot in time: the future in filters for cell phones
  publication-title: IEEE Microw. Mag.
  doi: 10.1109/MMM.2015.2429513
– start-page: 165
  year: 2013
  ident: 10.1016/j.pquantelec.2025.100565_bib170
  article-title: High kt2×Q, multi-frequency lithium niobate resonators
– start-page: 36
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib79
  article-title: Over-1 GHz bandwidth filter based on Y-128° cut lithium niobate on amorphous silicon
– start-page: 1
  year: 2008
  ident: 10.1016/j.pquantelec.2025.100565_bib120
  article-title: High piezoelectric properties in LiNbO3 transferred layer by the Smart CutTM technology for ultra wide band BAW filter applications
– year: 2000
  ident: 10.1016/j.pquantelec.2025.100565_bib36
– volume: 55
  start-page: 942
  issue: 17
  year: 2019
  ident: 10.1016/j.pquantelec.2025.100565_bib72
  article-title: 5 GHz Band n79 wideband microacoustic filter using thin lithium niobate membrane
  publication-title: Electron. Lett.
  doi: 10.1049/el.2019.1658
– start-page: 65
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib88
  article-title: Wideband longitudinal leaky SAW filter implementation for Wi-Fi 7
– volume: 11
  start-page: 118
  issue: 1
  year: 2020
  ident: 10.1016/j.pquantelec.2025.100565_bib5
  article-title: A review of 5G front-end systems package integration
  publication-title: IEEE Trans. Compon. Packag. Manuf. Technol.
  doi: 10.1109/TCPMT.2020.3041412
– start-page: 1
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib90
  article-title: High-performance N77 band filters on sapphire-based Heterogenous substrates
– year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib218
  article-title: 52 GHz surface acoustic wave resonators in thin film lithium niobate on silicon carbide
  publication-title: IEEE Trans. Ultrason. Ferroelectrics Freq. Control
– volume: 22
  start-page: 418
  issue: 4
  year: 1974
  ident: 10.1016/j.pquantelec.2025.100565_bib179
  article-title: Electrode resistance effects in interdigital transducers
  publication-title: IEEE Trans. Microw. Theor. Tech.
  doi: 10.1109/TMTT.1974.1128241
– start-page: 1
  year: 2023
  ident: 10.1016/j.pquantelec.2025.100565_bib195
  article-title: Trilayer periodically poled piezoelectric film lithium niobate resonator
– year: 1988
  ident: 10.1016/j.pquantelec.2025.100565_bib95
– volume: 70
  start-page: 1201
  issue: 10
  year: 2023
  ident: 10.1016/j.pquantelec.2025.100565_bib61
  article-title: 6–20 GHz 30% ScAlN lateral field-excited cross-sectional Lamé mode resonators for future mobile RF front ends
  publication-title: IEEE Trans. Ultrason. Ferroelectrics Freq. Control
  doi: 10.1109/TUFFC.2023.3312913
– year: 2022
  ident: 10.1016/j.pquantelec.2025.100565_bib14
  article-title: From microwave acoustic filters to millimeter-wave operation and new applications
  publication-title: IEEE J. Microwaves
– volume: 61
  start-page: 403
  issue: 1
  year: 2013
  ident: 10.1016/j.pquantelec.2025.100565_bib185
  article-title: Design and analysis of lithium–niobate-based high electromechanical coupling RF-MEMS resonators for wideband filtering
  publication-title: IEEE Trans. Microw. Theor. Tech.
  doi: 10.1109/TMTT.2012.2228671
– volume: 16
  start-page: 73
  issue: 7
  year: 2015
  ident: 10.1016/j.pquantelec.2025.100565_bib6
  article-title: A bright outlook for acoustic filtering: a new generation of very low-profile SAW, TC SAW, and BAW devices for module integration
  publication-title: IEEE Microw. Mag.
  doi: 10.1109/MMM.2015.2429512
– year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib198
  article-title: Enhancement of high-frequency harmonics in resonators using multilayered structures with polarity inverted layers
  publication-title: Authorea Preprints
– start-page: 1
  year: 2019
  ident: 10.1016/j.pquantelec.2025.100565_bib149
  article-title: High frequency LiNbO3 bulk wave resonator
– year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib196
  article-title: Experimental study of periodically poled piezoelectric film lithium niobate resonator at cryogenic temperatures
  publication-title: arXiv preprint arXiv:2403.09822
– volume: 217
  issue: 7
  year: 2020
  ident: 10.1016/j.pquantelec.2025.100565_bib135
  article-title: All‐epitaxial bulk acoustic wave resonators
  publication-title: Phys. Status Solidi
– volume: 132
  issue: 2
  year: 2022
  ident: 10.1016/j.pquantelec.2025.100565_bib134
  article-title: X-band epi-BAW resonators
  publication-title: J. Appl. Phys.
  doi: 10.1063/5.0097458
– volume: 2
  start-page: 59
  issue: 4
  year: 2001
  ident: 10.1016/j.pquantelec.2025.100565_bib9
  article-title: RF MEMS switches and switch circuits
  publication-title: IEEE Microw. Mag.
  doi: 10.1109/6668.969936
– volume: 15
  start-page: 7764
  issue: 1
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib27
  article-title: An edge-coupled magnetostatic bandpass filter
  publication-title: Nat. Commun.
  doi: 10.1038/s41467-024-51735-6
– volume: 37
  start-page: 207
  issue: 3
  year: 2004
  ident: 10.1016/j.pquantelec.2025.100565_bib103
  article-title: Measurement of the effects of rough surfaces on Lamb waves propagation
  publication-title: NDT E Int.
  doi: 10.1016/j.ndteint.2003.09.007
– volume: 12
  start-page: 739
  issue: 5
  year: 2018
  ident: 10.1016/j.pquantelec.2025.100565_bib121
  article-title: Precision forming and machining technologies for ceramic-based components
  publication-title: Int. J. Autom. Technol.
  doi: 10.20965/ijat.2018.p0739
– year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib77
  article-title: 2 to 16 GHz fundamental symmetric mode acoustic resonators in piezoelectric thin-film lithium niobate
  publication-title: arXiv preprint arXiv:2405.08139
– volume: 64
  start-page: 1390
  issue: 9
  year: 2017
  ident: 10.1016/j.pquantelec.2025.100565_bib201
  article-title: Acoustic wave filter technology–a review
  publication-title: IEEE Trans. Ultrason. Ferroelectrics Freq. Control
  doi: 10.1109/TUFFC.2017.2690905
– volume: 8
  start-page: 60
  issue: 5
  year: 2007
  ident: 10.1016/j.pquantelec.2025.100565_bib23
  article-title: Waveguide filters for satellites
  publication-title: IEEE Microw. Mag.
  doi: 10.1109/MMM.2007.903649
– start-page: 1805
  year: 2023
  ident: 10.1016/j.pquantelec.2025.100565_bib82
  article-title: An 18GHz Alscn film bulk acoustic wave resonator with epitaxial metal electrodes
– volume: 30
  start-page: 253
  issue: 3
  year: 2022
  ident: 10.1016/j.pquantelec.2025.100565_bib35
  article-title: Analysis and comparison of low-power 6-GHz N-path-filter-based harmonic selection RF receiver front-end architectures
  publication-title: IEEE Trans Very Large Scale Integr VLSI Syst
  doi: 10.1109/TVLSI.2022.3142235
– volume: 36
  start-page: 1636
  issue: 3S
  year: 1997
  ident: 10.1016/j.pquantelec.2025.100565_bib118
  article-title: Smart-Cut: a new silicon on insulator material technology based on hydrogen implantation and wafer bonding
  publication-title: Jpn. J. Appl. Phys.
  doi: 10.1143/JJAP.36.1636
– start-page: 146
  year: 2024
  ident: 10.1016/j.pquantelec.2025.100565_bib92
  article-title: A fin-mounted A5-mode lithium niobate resonator at 27.58 GHz with $k^{2}$ of 4.4%, $Q_{\mathrm{p}}$ of 448, and FoM of 19.7
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Snippet This paper reviews recent advances in millimeter-wave (mmWave) piezoelectric acoustic resonators and filters, based on thin-film lithium niobate (LN)...
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SubjectTerms Acoustic filters
Lithium niobate
Micro electromechanical resonators
Millimeter-wave
Piezoelectric devices
Thin-film devices
Title Recent advances in high-performance millimeter-Wave acoustic resonators and filters using thin-film lithium niobate
URI https://dx.doi.org/10.1016/j.pquantelec.2025.100565
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