APA (7th ed.) Citation

Whoang, I., Cho, C., Hong, J., Son, D., Lim, B., Kim, J., & Bang, K. (2023). Deep Learning Segmentation Modeling for SiN, SiO2 Film Deposition Process Defect of High Bandwidth Memory. Journal of semiconductor technology and science, 23(5), 251-257. https://doi.org/10.5573/JSTS.2023.23.5.251

Chicago Style (17th ed.) Citation

Whoang, Intae, Chinkwan Cho, Jin-Hee Hong, Dong-Hee Son, Byung-Yoon Lim, Jin-Pyung Kim, and Kijun Bang. "Deep Learning Segmentation Modeling for SiN, SiO2 Film Deposition Process Defect of High Bandwidth Memory." Journal of Semiconductor Technology and Science 23, no. 5 (2023): 251-257. https://doi.org/10.5573/JSTS.2023.23.5.251.

MLA (9th ed.) Citation

Whoang, Intae, et al. "Deep Learning Segmentation Modeling for SiN, SiO2 Film Deposition Process Defect of High Bandwidth Memory." Journal of Semiconductor Technology and Science, vol. 23, no. 5, 2023, pp. 251-257, https://doi.org/10.5573/JSTS.2023.23.5.251.