Fully CMOS integrated low voltage 100 MHz MEMS resonator

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Bibliographic Details
Published inElectronics letters Vol. 41; no. 24; pp. 1327 - 1328
Main Authors URANGA, A, TEVA, J, VERD, J, LOPEZ, J. L, TORRES, F, ESTEVE, J, ABADAL, G, PEREZ-MURANO, F, BAMIOL, N
Format Journal Article
LanguageEnglish
Published London Institution of Electrical Engineers 24.11.2005
Subjects
Applied sciences
Circuit properties
Design. Technologies. Operation analysis. Testing
Electric, optical and optoelectronic circuits
Electronic circuits
Electronics
Exact sciences and technology
Integrated circuits
Micro- and nanoelectromechanical devices (mems/nems)
Oscillators, resonators, synthetizers
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Resonator
Polycrystal
Resonant structure
Amplifier
RF systems
Low voltage
Wet process
Manufacturing process
Complementary MOS technology
Resonance frequency
CMOS integrated circuits
Microelectromechanical device
Electrical characteristic
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ISSN:0013-5194
1350-911X
DOI:10.1049/el:20053473