Measuring film thickness with Dual-laser imaging method

In order to realize the online thickness measurement of thin films, an automatic film thickness measuring system was established, and its optical design, mechanical structure design, as well as the analysis and evaluation of the optical aberration based on the software of ZEMAX were researched. Proj...

Full description

Saved in:
Bibliographic Details
Published inJournal of intelligent & fuzzy systems Vol. 34; no. 2; pp. 1153 - 1159
Main Authors Ma, Guolu, Liu, Lixian, Yang, Guiyang, Wang, Chen, Zhao, Bin
Format Journal Article
LanguageEnglish
Published Amsterdam IOS Press BV 01.01.2018
Subjects
Aberration
Film thickness
Laser beams
On-line systems
Optical design
Spots
Thickness measurement
Thin films
Online AccessGet full text

Cover

Abstract In order to realize the online thickness measurement of thin films, an automatic film thickness measuring system was established, and its optical design, mechanical structure design, as well as the analysis and evaluation of the optical aberration based on the software of ZEMAX were researched. Project two laser beams vertically onto the same position of the film respectively from upper and lower side there will be two round spots on the film surfaces, image the two spots onto the image detector the film thickness can be got according to the relationship between the measured film thickness and the orthocenters of the upper and lower imaging spots. During the calibrating experiment, a nonlinear correction method was proposed. Experimental results indicated that the measurement precision is±1 μm. After a period time of three months online working, the system was proven to have the characteristics of good stabilization, high precision and convenient maintenance.
AbstractList In order to realize the online thickness measurement of thin films, an automatic film thickness measuring system was established, and its optical design, mechanical structure design, as well as the analysis and evaluation of the optical aberration based on the software of ZEMAX were researched. Project two laser beams vertically onto the same position of the film respectively from upper and lower side there will be two round spots on the film surfaces, image the two spots onto the image detector the film thickness can be got according to the relationship between the measured film thickness and the orthocenters of the upper and lower imaging spots. During the calibrating experiment, a nonlinear correction method was proposed. Experimental results indicated that the measurement precision is±1 μm. After a period time of three months online working, the system was proven to have the characteristics of good stabilization, high precision and convenient maintenance.
Author Liu, Lixian
Wang, Chen
Zhao, Bin
Ma, Guolu
Yang, Guiyang
Author_xml – sequence: 1
  givenname: Guolu
  surname: Ma
  fullname: Ma, Guolu
  organization: Ministry of Education Key Laboratory of Testing Technology for Manufacturing Process, Southwest University of Science and Technology (SWUST), Mianyang, China
– sequence: 2
  givenname: Lixian
  surname: Liu
  fullname: Liu, Lixian
  organization: Ministry of Education Key Laboratory of Testing Technology for Manufacturing Process, Southwest University of Science and Technology (SWUST), Mianyang, China
– sequence: 3
  givenname: Guiyang
  surname: Yang
  fullname: Yang, Guiyang
  organization: Ministry of Education Key Laboratory of Testing Technology for Manufacturing Process, Southwest University of Science and Technology (SWUST), Mianyang, China
– sequence: 4
  givenname: Chen
  surname: Wang
  fullname: Wang, Chen
  organization: Department of Instrumentation, School of Mechanical Engineering, Huazhong University of Science and Technology (HUST), Wuhan, China
– sequence: 5
  givenname: Bin
  surname: Zhao
  fullname: Zhao, Bin
  organization: Department of Instrumentation, School of Mechanical Engineering, Huazhong University of Science and Technology (HUST), Wuhan, China
BookMark eNotkD1PwzAQQC1UJNrCxB-IxIgMZzv-GlGhUFTEAMyW4zhNSpoUO1HFv8dVme6Gp7unN0OTru88QtcE7hhl7P51tfzAROgc9BmaEiU5VlrISdpB5JjQXFygWYxbACI5hSmSb97GMTTdJquadpcNdeO-Ox9jdmiGOnscbYtbG33Imp3dHLGdH-q-vETnlW2jv_qfc_S1fPpcvOD1-_Nq8bDGjgoyYO3zwleFdMnIMkGVS1K6AgaklMCF4kIXJdcy2UjQwpeEVLyQwipwjpdsjm5Od_eh_xl9HMy2H0OXXhoKoHKaSyUTdXuiXOhjDL4y-5B8w68hYI5lzLGMOZVhfwB8VgU
CitedBy_id crossref_primary_10_1063_1_5117865
Cites_doi 10.1117/12.405819
10.1007/s00170-009-2493-x
10.1117/1.1330700
10.1016/j.ijleo.2011.07.065
10.1364/AO.45.004916
10.1016/S0030-4018(02)01203-8
10.1364/AO.33.001306
ContentType Journal Article
Copyright Copyright IOS Press BV 2018
Copyright_xml – notice: Copyright IOS Press BV 2018
DBID AAYXX
CITATION
7SC
8FD
JQ2
L7M
L~C
L~D
DOI 10.3233/JIFS-169409
DatabaseName CrossRef
Computer and Information Systems Abstracts
Technology Research Database
ProQuest Computer Science Collection
Advanced Technologies Database with Aerospace
Computer and Information Systems Abstracts – Academic
Computer and Information Systems Abstracts Professional
DatabaseTitle CrossRef
Computer and Information Systems Abstracts
Technology Research Database
Computer and Information Systems Abstracts – Academic
Advanced Technologies Database with Aerospace
ProQuest Computer Science Collection
Computer and Information Systems Abstracts Professional
DatabaseTitleList Computer and Information Systems Abstracts
DeliveryMethod fulltext_linktorsrc
Discipline Engineering
EISSN 1875-8967
Editor Sundhararajan, Mahalingam
Gao, Xiao-Zhi
Vahdat Nejad, Hamed
Editor_xml – sequence: 1
  givenname: Mahalingam
  surname: Sundhararajan
  fullname: Sundhararajan, Mahalingam
– sequence: 2
  givenname: Xiao-Zhi
  surname: Gao
  fullname: Gao, Xiao-Zhi
– sequence: 3
  givenname: Hamed
  surname: Vahdat Nejad
  fullname: Vahdat Nejad, Hamed
EndPage 1159
ExternalDocumentID 10_3233_JIFS_169409
GroupedDBID .4S
.DC
0R~
4.4
5GY
8VB
AAYXX
ABCQX
ABDBF
ABJNI
ACGFS
ACPQW
ADZMO
AEMOZ
AENEX
AFRHK
AKVCP
ALMA_UNASSIGNED_HOLDINGS
ARCSS
ASPBG
AVWKF
CITATION
DU5
EAD
EAP
EBA
EBR
EBS
EBU
EDO
EJD
EMK
EPL
EST
ESX
HZ~
I-F
IOS
K1G
L7B
MET
MIO
MK~
MV1
NGNOM
O9-
P2P
QWB
TH9
TUS
ZL0
7SC
8FD
JQ2
L7M
L~C
L~D
ID FETCH-LOGICAL-c261t-9e4befb7c409a3628c1879f0301d70568569bd5977527096ed11f5b76a80cc5d3
ISSN 1064-1246
IngestDate Thu Oct 10 15:50:17 EDT 2024
Fri Aug 23 02:53:35 EDT 2024
IsPeerReviewed true
IsScholarly true
Issue 2
Language English
LinkModel OpenURL
MergedId FETCHMERGED-LOGICAL-c261t-9e4befb7c409a3628c1879f0301d70568569bd5977527096ed11f5b76a80cc5d3
PQID 2008424787
PQPubID 2046407
PageCount 7
ParticipantIDs proquest_journals_2008424787
crossref_primary_10_3233_JIFS_169409
PublicationCentury 2000
PublicationDate 2018-01-01
PublicationDateYYYYMMDD 2018-01-01
PublicationDate_xml – month: 01
  year: 2018
  text: 2018-01-01
  day: 01
PublicationDecade 2010
PublicationPlace Amsterdam
PublicationPlace_xml – name: Amsterdam
PublicationTitle Journal of intelligent & fuzzy systems
PublicationYear 2018
Publisher IOS Press BV
Publisher_xml – name: IOS Press BV
References Dorsch (10.3233/JIFS-169409_ref8) 1994; 33
Peterson (10.3233/JIFS-169409_ref6) 2006; 45
10.3233/JIFS-169409_ref12
Amann (10.3233/JIFS-169409_ref7) 2001; 40
Vukašinović (10.3233/JIFS-169409_ref10) 2010; 50
Vukašinović (10.3233/JIFS-169409_ref11) 2010; 56
Jiči (10.3233/JIFS-169409_ref3) 2009; 48
Azzam (10.3233/JIFS-169409_ref5) 2000
Köysal (10.3233/JIFS-169409_ref4) 2002; 205
10.3233/JIFS-169409_ref1
Hattuniemi (10.3233/JIFS-169409_ref9) 2008; 7022:70220R
Abdelsalam (10.3233/JIFS-169409_ref2) 2012; 123
References_xml – start-page: 184
  year: 2000
  ident: 10.3233/JIFS-169409_ref5
  article-title: Ellipsometry: A sophisticated tool for optical metrology
  publication-title: Proceedings of SPIE, Optical
  doi: 10.1117/12.405819
  contributor:
    fullname: Azzam
– volume: 50
  start-page: 265
  year: 2010
  ident: 10.3233/JIFS-169409_ref10
  article-title: The influence of incident, object color and distance on CNC laser scanning
  publication-title: Int J Adv Manuf Technol
  doi: 10.1007/s00170-009-2493-x
  contributor:
    fullname: Vukašinović
– ident: 10.3233/JIFS-169409_ref12
– volume: 40
  start-page: 10
  year: 2001
  ident: 10.3233/JIFS-169409_ref7
  article-title: Laser ranging: A critical review of usual techniques for distance measurement
  publication-title: Opt Eng
  doi: 10.1117/1.1330700
  contributor:
    fullname: Amann
– ident: 10.3233/JIFS-169409_ref1
– volume: 123
  start-page: 1444
  year: 2012
  ident: 10.3233/JIFS-169409_ref2
  article-title: Highly accurate film thickness measurement based on automatic fringe analysis
  publication-title: Optik
  doi: 10.1016/j.ijleo.2011.07.065
  contributor:
    fullname: Abdelsalam
– volume: 45
  start-page: 4916
  year: 2006
  ident: 10.3233/JIFS-169409_ref6
  article-title: Laser triangulation for liquid film thickness measurements through multiple interfaces
  publication-title: Appl Opt
  doi: 10.1364/AO.45.004916
  contributor:
    fullname: Peterson
– volume: 205
  start-page: 1
  year: 2002
  ident: 10.3233/JIFS-169409_ref4
  article-title: Thickness measurement of dielectric films by wavelength scanning method
  publication-title: Opt Commun
  doi: 10.1016/S0030-4018(02)01203-8
  contributor:
    fullname: Köysal
– volume: 56
  start-page: 23
  year: 2010
  ident: 10.3233/JIFS-169409_ref11
  article-title: The influence of surface topology on the accuracy of laser triangulation scanning results
  publication-title: Journal of Mechanical Engineering
  contributor:
    fullname: Vukašinović
– volume: 7022:70220R
  start-page: 1
  year: 2008
  ident: 10.3233/JIFS-169409_ref9
  article-title: Thickness measurement of thin wood material by differential laser triangulation method
  publication-title: Advan Laser Technol
  contributor:
    fullname: Hattuniemi
– volume: 33
  start-page: 1306
  year: 1994
  ident: 10.3233/JIFS-169409_ref8
  article-title: Laser triangulation: Fundamental uncertainty in distance measurement
  publication-title: Appl Opt
  doi: 10.1364/AO.33.001306
  contributor:
    fullname: Dorsch
– volume: 48
  start-page: 985
  issue: S0003-6935
  year: 2009
  ident: 10.3233/JIFS-169409_ref3
  article-title: Simple method for determination of the thickness of a nonabsorbing thin film using spectral reflectance measurement
  publication-title: Appl Opt
  contributor:
    fullname: Jiči
SSID ssj0017520
Score 2.1538076
Snippet In order to realize the online thickness measurement of thin films, an automatic film thickness measuring system was established, and its optical design,...
SourceID proquest
crossref
SourceType Aggregation Database
StartPage 1153
SubjectTerms Aberration
Film thickness
Laser beams
On-line systems
Optical design
Spots
Thickness measurement
Thin films
Title Measuring film thickness with Dual-laser imaging method
URI https://www.proquest.com/docview/2008424787
Volume 34
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1LT8MwDI5gXOCAeIrxUg_cUGDtkqY58hoPaVwACU5Vk6aiYgw0Wgn263Ee6zo0pMGl2jKlW-Nv9mcnthE6aHFJA5HqGvucYCJ8hQVXHJMkSHzWklT4Ot-5extePZCbR1rbaDfZJYU4ksOpeSX_kSqMgVx1luwfJFvdFAbgNcgXriBhuM4k464J8JmzkHlPZ4nk8sWoLhNdPS-THgZyrAaH-attRmT7Rf9CSPOqOmdhAJGVw-GXK_VcMe-uIZuXJTxXdZYnL613_1mD2pOLQ1-W-VfirKOJ29vhs2eXguYCDn5UCzhYHQksBgMtcBWs7Ri4PTjitrPGSLG6KGVe82-tlgQW2q5ZXHjLp2nzdqCjzZ2b684d9kNOWnxstEYb9T9sWXXCEHwbPT3Wk2M7eR4tBKCNogZaODk9P-1Um02MBrZohXsum8appx_XvnuSuEzabUNG7lfQshOad2IhsYrmVH8NLdVqS64jVoHD0-DwKnB4GhzeGByeA4dnwbGBHjoX92dX2HXJwBK83wJzRYTKBJPwGxOgI5HUDeQz7eqmDOhtREMuUl1mkAYMHFaV-n5GBQuTqCUlTdubqNF_66st5MkEPmLg0atQEF0miGTSVxnNEha0wa9vooPREsTvthhKPGWhm2h3tDyx-7d8mHanJNCloLZnu8sOWhyjbxc1ikGp9oAAFmLfCfAbtRFYfA
link.rule.ids 315,783,787,27938,27939
linkProvider EBSCOhost
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Measuring+film+thickness+with+Dual-laser+imaging+method&rft.jtitle=Journal+of+intelligent+%26+fuzzy+systems&rft.au=Ma%2C+Guolu&rft.au=Liu%2C+Lixian&rft.au=Yang%2C+Guiyang&rft.au=Wang%2C+Chen&rft.date=2018-01-01&rft.issn=1064-1246&rft.eissn=1875-8967&rft.volume=34&rft.issue=2&rft.spage=1153&rft.epage=1159&rft_id=info:doi/10.3233%2FJIFS-169409&rft.externalDBID=n%2Fa&rft.externalDocID=10_3233_JIFS_169409
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1064-1246&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1064-1246&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1064-1246&client=summon