Formation of single crystalline tellurium supersaturated silicon pn junctions by ion implantation followed by pulsed laser melting - 王熙元 黄永光 刘德伟 朱小宁 崔晓 朱洪亮 (Journal of semiconductors, 2013)
Keywords: Crystal structure; PN junctions; pn结; Product life cycle; Production management; Pulsed lasers; Semiconductors; Silicon; Tellurium; 单晶; 激光熔化; 硅片; 碲; 离子注入; 脉冲; 过饱和