A MEMS microgripper with two-axis actuators and force sensors for microscale mechanical characterization of soft materials
This paper reports a MEMS microgripper integrating two-axis actuators and force sensors for microscale compressive and shear testing of soft materials. Two V-beam electrothermal actuators are used to actuate an active gripping arm along two orthogonal directions and compress or shear a micro-sample...
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Published in | 2015 IEEE International Conference on Automation Science and Engineering (CASE) pp. 1620 - 1625 |
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Main Authors | , , , , |
Format | Conference Proceeding |
Language | English |
Published |
IEEE
01.08.2015
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Abstract | This paper reports a MEMS microgripper integrating two-axis actuators and force sensors for microscale compressive and shear testing of soft materials. Two V-beam electrothermal actuators are used to actuate an active gripping arm along two orthogonal directions and compress or shear a micro-sample grasped between the gripping tips, and two tri-plate differential capacitive sensors are employed for quantifying the compressive and shear forces applied to the sample with nanonewton resolutions (compressive force resolution: 7.7 nN and shear force resolution: 57.5 nN). Using the microgripper, we demonstrate, for the first time, on-chip compressive and shear testing of polydimethylsiloxane (PDMS) micro-structures prepared at different mixing ratios. This device will be useful for accurately characterizing compressive and shear properties of a variety of microscale soft materials. |
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AbstractList | This paper reports a MEMS microgripper integrating two-axis actuators and force sensors for microscale compressive and shear testing of soft materials. Two V-beam electrothermal actuators are used to actuate an active gripping arm along two orthogonal directions and compress or shear a micro-sample grasped between the gripping tips, and two tri-plate differential capacitive sensors are employed for quantifying the compressive and shear forces applied to the sample with nanonewton resolutions (compressive force resolution: 7.7 nN and shear force resolution: 57.5 nN). Using the microgripper, we demonstrate, for the first time, on-chip compressive and shear testing of polydimethylsiloxane (PDMS) micro-structures prepared at different mixing ratios. This device will be useful for accurately characterizing compressive and shear properties of a variety of microscale soft materials. |
Author | Xinyu Liu Weize Zhang Cruz, Simon Silva-Da Juntian Qu Jung, Andrew |
Author_xml | – sequence: 1 surname: Juntian Qu fullname: Juntian Qu organization: Dept. of Mech. Eng., McGill Univ., Montreal, QC, Canada – sequence: 2 surname: Weize Zhang fullname: Weize Zhang organization: Dept. of Mech. Eng., McGill Univ., Montreal, QC, Canada – sequence: 3 givenname: Andrew surname: Jung fullname: Jung, Andrew organization: Dept. of Mech. Eng., McGill Univ., Montreal, QC, Canada – sequence: 4 givenname: Simon Silva-Da surname: Cruz fullname: Cruz, Simon Silva-Da organization: Dept. of Mech. Eng., McGill Univ., Montreal, QC, Canada – sequence: 5 surname: Xinyu Liu fullname: Xinyu Liu email: xinyu.liu@mcgill.ca organization: Dept. of Mech. Eng., McGill Univ., Montreal, QC, Canada |
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CitedBy_id | crossref_primary_10_3389_frobt_2022_1086043 crossref_primary_10_1016_j_sna_2019_07_007 crossref_primary_10_1115_1_4038010 crossref_primary_10_3390_s18051664 crossref_primary_10_1109_TASE_2016_2613684 crossref_primary_10_1016_j_sna_2022_113877 crossref_primary_10_1007_s12213_017_0098_2 crossref_primary_10_1109_TMECH_2017_2721159 |
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Snippet | This paper reports a MEMS microgripper integrating two-axis actuators and force sensors for microscale compressive and shear testing of soft materials. Two... |
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SubjectTerms | Actuators Capacitive sensors Force Force sensors Grippers Micromechanical devices Testing |
Title | A MEMS microgripper with two-axis actuators and force sensors for microscale mechanical characterization of soft materials |
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