Correlation between X-ray micro-diffraction and a developed analytical model to measure the residual stresses in suspended structures in MEMS

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Bibliographic Details
Published in	Microelectronics and reliability Vol. 43; no. 9; pp. 1963 - 1968
Main Authors	Rigo, S., Goudeau, P., Desmarres, J-M., Masri, T., Petit, J-A., Schmitt, P.
Format	Journal Article
Language	English
Published	Elsevier Ltd 01.09.2003
Online Access	Get full text

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