Two-Inch Aluminum Nitride (AIN) Single Crystal Growth for Commercial Applications

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Bibliographic Details
Published inECS transactions Vol. 104; no. 7; pp. 37 - 48
Main Authors Bondokov, Robert T, Branagan, Sean P., Ishigami, Naoki, Grandusky, James, Nagatomi, Takaharu, Tatsuta, Kazuo, Miebach, Thomas, Chen, Jianfeng (Jeff)
Format Journal Article
LanguageEnglish
Published The Electrochemical Society, Inc 01.10.2021
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ISSN:1938-5862
1938-6737
DOI:10.1149/10407.0037ecst