Beam energy purity in the Eaton NV-8200P ion implanter

SIMS analysis has been characterized as a tool for the study of energy contamination and used to investigate the contaminant energies most likely to be present in the NV-8200P. By purposely contaminating implants with known amounts of specific off-energy ions, we have been able to demonstrate that f...

Full description

Saved in:
Bibliographic Details
Published inNuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 96; no. 1; pp. 13 - 17
Main Authors Kamenitsa, Dennis E., Rathmell, R.D.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.03.1995
Online AccessGet full text

Cover

More Information
Summary:SIMS analysis has been characterized as a tool for the study of energy contamination and used to investigate the contaminant energies most likely to be present in the NV-8200P. By purposely contaminating implants with known amounts of specific off-energy ions, we have been able to demonstrate that for the chosen combinations of desired energy and possible contaminant, the SIMS technique has a resolution of less than 1.0% for the higher energy conditions investigated and less than 0.05% for the lower conditions. All of the lower energy conditions used deceleration. Under these conditions the NV-8200P shows no indication of beam energy contamination. We present the results of the SIMS analysis and describe the technique used in this analysis.
ISSN:0168-583X
1872-9584
DOI:10.1016/0168-583X(94)00445-5