Low-energy BO and BO2 emission from H2BO3 sputtered in a low-pressure high-frequency SNMS plasma
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Published in | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 155; no. 1-2; pp. 13 - 24 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
01.07.1999
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Online Access | Get full text |
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