Tip- and Laser-based 3D Nanofabrication in Extended Macroscopic Working Areas

• Published in: Nanomanufacturing and metrology Vol. 4; no. 3; pp. 132 - 148
• Main Authors: Ortlepp, Ingo, Fröhlich, Thomas, Füßl, Roland, Reger, Johann, Schäffel, Christoph, Sinzinger, Stefan, Strehle, Steffen, Theska, René, Zentner, Lena, Zöllner, Jens-Peter, Rangelow, Ivo W., Reinhardt, Carsten, Hausotte, Tino, Cao, Xinrui, Dannberg, Oliver, Fern, Florian, Fischer, David, Gorges, Stephan, Hofmann, Martin, Kirchner, Johannes, Meister, Andreas, Sasiuk, Taras, Schienbein, Ralf, Supreeti, Shraddha, Mohr-Weidenfeller, Laura, Weise, Christoph, Reuter, Christoph, Stauffenberg, Jaqueline, Manske, Eberhard
• Format: Journal Article
• Language: English
• Published: Singapore Springer Singapore 01.09.2021
• Subjects: Engineering; Machines; Manufacturing; Nanotechnology; Nanotechnology and Microengineering; Original Article; Processes; Laser-based; Nanofabrication; Nanopositioning; Nanomeasuring; Nanomanufacturing; Tip-based; Scale-spanning

The field of optical lithography is subject to intense research and has gained enormous improvement. However, the effort necessary for creating structures at the size of 20 nm and below is considerable using conventional technologies. This effort and the resulting financial requirements can only be...