Tip- and Laser-based 3D Nanofabrication in Extended Macroscopic Working Areas - Ortlepp, Ingo; Fröhlich, Thomas; Füßl, Roland; Reger, Johann; Schäffel, Christoph; Sinzinger, Stefan; Strehle, Steffen; Theska, René; Zentner, Lena; Zöllner, Jens-Peter; Rangelow, Ivo W.; Reinhardt, Carsten; et al. (Nanomanufacturing and metrology, 2021)
Keywords: Engineering; Machines; Manufacturing; Nanotechnology; Nanotechnology and Microengineering; Original Article; Processes; Laser-based; Nanofabrication; Nanopositioning; Nanomeasuring; Nanomanufacturing; Tip-based; Scale-spanning