APA (7th ed.) Citation

Zheng, Z., Wu, X., Wang, Y., Luo, H., Ke, Q., Wang, C., . . . Mak, P. I. (2025). Toward a Tunable AlN-Based Piezoelectric MEMS Microphone: Design, Characterization, and Analysis. Journal of microelectromechanical systems, 34(4), 432-442. https://doi.org/10.1109/JMEMS.2025.3558897

Chicago Style (17th ed.) Citation

Zheng, Zhuoyue, Xinyu Wu, Yuan Wang, Huahuang Luo, Qingqing Ke, Chen Wang, Michael Kraft, Rui P. Martins, and Pui In Mak. "Toward a Tunable AlN-Based Piezoelectric MEMS Microphone: Design, Characterization, and Analysis." Journal of Microelectromechanical Systems 34, no. 4 (2025): 432-442. https://doi.org/10.1109/JMEMS.2025.3558897.

MLA (9th ed.) Citation

Zheng, Zhuoyue, et al. "Toward a Tunable AlN-Based Piezoelectric MEMS Microphone: Design, Characterization, and Analysis." Journal of Microelectromechanical Systems, vol. 34, no. 4, 2025, pp. 432-442, https://doi.org/10.1109/JMEMS.2025.3558897.