Fabrication and Characterization of Aluminum-Doped ZnO Nanorods for Biosensor Applications

• Published in: IEEE sensors journal Vol. 25; no. 10; pp. 16648 - 16657
• Main Authors: Chou, Hsin-Yu, Chen, Yu-Wei, Yu, Chang-Tze Ricky, Chen, Jo-Mei Maureen, Chiang, Wei-Hsiang, Singh, Anoop Kumar, Kung, Po-Kai, Chiang, Jung-Lung, Wuu, Dong-Sing
• Format: Journal Article
• Language: English
• Published: New York IEEE 15.05.2025; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Aluminum; Aluminum-doped zinc oxide (AZO); biomedical sensor; Biosensors; Electrical properties; Electron beams; extended gate field effect transistor (EGFET); Field effect transistors; Glass substrates; Glucose; Indium tin oxide; Indium tin oxides; Ions; Nanorods; pH sensing; Semiconductor device measurement; Semiconductor devices; Sensitivity; Sensors; Substrates; Zinc oxide; Zinc oxides

In this study, we prepared various aluminum-doped zinc oxide (AZO) surface structures via chemical bath deposition (CBD) for use in biomedical sensors. Indium tin oxide (ITO) conductive films were deposited on glass substrates via electron beam evaporation, and AZO nanorods were subsequently grown o...