MEMS Air-Damped Isolator for Dual-Axis Micromirrors: Broad-Range Frequency Vibration Isolation - Ran, Longqi; Zhou, Wu; He, Jiangbo; Wu, Jiahao; Wang, Yan; Gong, Xuhui (Journal of microelectromechanical systems, 2025)
Keywords: Coils; Control systems; Couplings; Damping; Degrees of freedom; Design; Dynamic response; Frequency ranges; isolator; Isolators; Laser doppler vibrometers; Microelectromechanical devices; Micromirrors; mirrors; Resonant frequency; Shock absorbers; Springs; Stiffness; Structural design; Substrates; Vibration isolators; Vibration tests; Vibrations