Towards True In-situ Temperature Compensation Utilizing Multiple Parameter Decoupling for Resonant MEMS Sensors Subject to Blue Sideband Excitation - Xi, Jingqian; Zheng, Zhuoyue; Liu, Huafeng; Zhang, Pan; Zhao, Chun; Wang, Yuan; Wang, Chen; Kraft, Michael; Martins, Rui P.; Mak, Pui-In (IEEE sensors letters, 2024)
Keywords: blue-sideband excitation (BSE); Decoupling; Excitation; Mechanical sensors; Microelectromechanical systems; Micromechanical devices; multiple parameter decoupling (MPD); Parameters; Resonant frequency; resonant sensor; Resonators; Sensitivity; Sensors; Sidebands; Temperature compensation; Temperature measurement; Temperature sensors; Thermometers; Thermometry