Design, Fabrication, and Characterization of High-Stiffness Suspended Microcalorimeters With Nanowatt Power Resolution - Shaskey, Cedric; Jarzembski, Amun; Birdwell, Milo; Park, Keunhan (Journal of microelectromechanical systems, 2025)
Keywords: Calorimeters; Contact force; Heat transfer; Heating systems; high stiffness; Nanoscale devices; nanowatt resolution; Resistance; Resistance heating; Sensors; Silicon nitride; Stiffness; Suspended microcalorimeter; Thermal force; Thermal resistance; Thermometers; U-shaped structure