In situ study of hydrogen silsesquioxane dissolution rate in salty and electrochemical developers

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Bibliographic Details
Published in	Journal of vacuum science and technology. B, Nanotechnology & microelectronics Vol. 29; no. 6; p. 6
Main Authors	Harry, Katherine J., Strobel, Sebastian, Yang, Joel K. W., Duan, Huigao, Berggren, Karl K.
Format	Journal Article
Language	English
Published	01.11.2011
Online Access	Get full text

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