In situ study of hydrogen silsesquioxane dissolution rate in salty and electrochemical developers

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Bibliographic Details
Published inJournal of vacuum science and technology. B, Nanotechnology & microelectronics Vol. 29; no. 6; p. 6
Main Authors Harry, Katherine J., Strobel, Sebastian, Yang, Joel K. W., Duan, Huigao, Berggren, Karl K.
Format Journal Article
LanguageEnglish
Published 01.11.2011
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Author Duan, Huigao
Harry, Katherine J.
Yang, Joel K. W.
Strobel, Sebastian
Berggren, Karl K.
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Title In situ study of hydrogen silsesquioxane dissolution rate in salty and electrochemical developers
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