Beyond Performance of Learning Control Subject to Uncertainties and Noise: A Frequency-Domain Approach Applied to Wafer Stages

• Published in: IEEE/CAA journal of automatica sinica Vol. 12; no. 1; pp. 198 - 214
• Main Authors: Song, Fazhi, Cui, Ning, Chen, Shuaiqi, Zhang, Kai, Liu, Yang, Chen, Xinkai, Tan, Jiubin
• Format: Journal Article
• Language: English
• Published: Piscataway Chinese Association of Automation (CAA) 01.01.2025; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Accuracy; Adaptation models; Adaptive learning; Convergence; Data models; Extended state observer; Feedforward systems; Frequency domain analysis; Integrated circuit modeling; Integrated circuits; Learning; learning control; model uncertainties; motion control; Noise; Noise control; Noise measurement; Semiconductor device modeling; State observers; stochastic noise; Stochastic processes; Uncertainty

The increasingly stringent performance requirement in integrated circuit manufacturing, characterized by smaller feature sizes and higher productivity, necessitates the wafer stage executing a extreme motion with the accuracy in terms of nanometers. This demanding requirement witnesses a widespread...