Beyond Performance of Learning Control Subject to Uncertainties and Noise: A Frequency-Domain Approach Applied to Wafer Stages - Song, Fazhi; Cui, Ning; Chen, Shuaiqi; Zhang, Kai; Liu, Yang; Chen, Xinkai; Tan, Jiubin (IEEE/CAA journal of automatica sinica, 2025)
Keywords: Accuracy; Adaptation models; Adaptive learning; Convergence; Data models; Extended state observer; Feedforward systems; Frequency domain analysis; Integrated circuit modeling; Integrated circuits; Learning; learning control; model uncertainties; motion control; Noise; Noise control; Noise measurement; Semiconductor device modeling; State observers; stochastic noise; Stochastic processes; Uncertainty