Advanced morphological characterization of DC sputtered copper thin films - Korpi, Alireza Grayeli; Rezaee, Sahar; Ahmadpourian, Azin; Ţălu, Ştefan; Jen, Tien-Chien (Modern physics letters. B, Condensed matter physics, statistical physics, applied physics, 2024)
Keywords: Algorithms; Atomic force microscopy; Copper; Density functions; Deposition; Fractal analysis; Fractal geometry; Fractals; Glass substrates; Height; Magnetron sputtering; Morphology; Power spectral density; Roughness; Spectral density function; Thin films; multifractal analyses; deposition time; fractal analysis; Copper thin films; sputtering; surface roughness