Sub-100 nm high spatial frequency periodic structures driven by femtosecond laser induced desorption in GaAs

• Published in: Applied physics letters Vol. 118; no. 24
• Main Authors: Sarracino, Alex, Ansari, Abdul R., Torralva, Ben, Yalisove, Steven
• Format: Journal Article
• Language: English
• Published: Melville American Institute of Physics 14.06.2021
• Subjects: Applied physics; Aspect ratio; Desorption; Diffusion; Femtosecond pulses; Interstitials; Irradiation; Lasers; Periodic structures; Point defects; Polaritons; Roughening; Vacancies

This paper presents a previously unreported mechanism for the formation of High Spatial Frequency Laser Induced Periodic Surface Structures (HSFL) in GaAs upon irradiation by femtosecond laser pulses (repetition rate = 1 kHz, τ = 150 fs, λ = 390 nm) that is driven by point defect diffusion, desorpti...