Sub-100 nm high spatial frequency periodic structures driven by femtosecond laser induced desorption in GaAs - Sarracino, Alex; Ansari, Abdul R.; Torralva, Ben; Yalisove, Steven (Applied physics letters, 2021)
Keywords: Applied physics; Aspect ratio; Desorption; Diffusion; Femtosecond pulses; Interstitials; Irradiation; Lasers; Periodic structures; Point defects; Polaritons; Roughening; Vacancies