Effects of Fe Contamination on the Reliability of Gate Oxide Integrity in Advanced CMOS Technology
Fe contamination has always been one of the most critical issues in the integrated circuit (IC) industry due to its catastrophic effect on device reliability and electrical characteristics. With complementary metal oxide semiconductor (CMOS) technology scaling down, this issue has been attracting mo...
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Published in | Electronics (Basel) Vol. 13; no. 12; p. 2391 |
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Abstract | Fe contamination has always been one of the most critical issues in the integrated circuit (IC) industry due to its catastrophic effect on device reliability and electrical characteristics. With complementary metal oxide semiconductor (CMOS) technology scaling down, this issue has been attracting more attention. In this paper, the impact of Fe impurity on the reliability of gate oxide integrity (GOI) in advanced CMOS technology is investigated. Intentional contamination of polysilicon gates was conducted in both boron- and phosphorus-doped devices. Failure analysis of the gate oxide was conducted with high-resolution transmission electron microscopy (HRTEM) and the energy dispersive X-ray (EDX) technique. The experimental results disclose that the properties of PMOS are much more sensitive to Fe contamination than those of NMOS. It is suggested that the reason for the above phenomena is that Fe precipitates at the PMOS gate/oxide interface but dissolves uniformly in the NMOS poly gate due to lower formation energy of the FeB pair (0.65 eV) in PMOS than that of the P4-Fe cluster (3.2 eV) in NMOS. |
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AbstractList | Fe contamination has always been one of the most critical issues in the integrated circuit (IC) industry due to its catastrophic effect on device reliability and electrical characteristics. With complementary metal oxide semiconductor (CMOS) technology scaling down, this issue has been attracting more attention. In this paper, the impact of Fe impurity on the reliability of gate oxide integrity (GOI) in advanced CMOS technology is investigated. Intentional contamination of polysilicon gates was conducted in both boron- and phosphorus-doped devices. Failure analysis of the gate oxide was conducted with high-resolution transmission electron microscopy (HRTEM) and the energy dispersive X-ray (EDX) technique. The experimental results disclose that the properties of PMOS are much more sensitive to Fe contamination than those of NMOS. It is suggested that the reason for the above phenomena is that Fe precipitates at the PMOS gate/oxide interface but dissolves uniformly in the NMOS poly gate due to lower formation energy of the FeB pair (0.65 eV) in PMOS than that of the P4-Fe cluster (3.2 eV) in NMOS. |
Audience | Academic |
Author | Zhou, Wenbin Yu, Peng Yan, Feng Cao, Kaiwei Xie, Zhen Liu, Xiangze Ji, Xiaoli Fang, Minghai Wang, Fan |
Author_xml | – sequence: 1 givenname: Fan orcidid: 0009-0007-2061-2978 surname: Wang fullname: Wang, Fan – sequence: 2 givenname: Minghai orcidid: 0009-0007-6296-4912 surname: Fang fullname: Fang, Minghai – sequence: 3 givenname: Peng orcidid: 0009-0004-3207-5047 surname: Yu fullname: Yu, Peng – sequence: 4 givenname: Wenbin orcidid: 0009-0006-5998-4456 surname: Zhou fullname: Zhou, Wenbin – sequence: 5 givenname: Kaiwei surname: Cao fullname: Cao, Kaiwei – sequence: 6 givenname: Zhen orcidid: 0009-0002-1757-1451 surname: Xie fullname: Xie, Zhen – sequence: 7 givenname: Xiangze surname: Liu fullname: Liu, Xiangze – sequence: 8 givenname: Feng surname: Yan fullname: Yan, Feng – sequence: 9 givenname: Xiaoli surname: Ji fullname: Ji, Xiaoli |
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SubjectTerms | CMOS Complementary metal oxide semiconductors Contamination Electrons Failure analysis Free energy Gates (circuits) Heat of formation High resolution electron microscopy Integrated circuits Integrity Interfaces Investigations Metal oxide semiconductors Metal oxides Normal distribution Polysilicon Precipitates Reliability Semiconductor chips Semiconductor industry |
Title | Effects of Fe Contamination on the Reliability of Gate Oxide Integrity in Advanced CMOS Technology |
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