Fabrication and Performances of Recessed Gate AlGaN/GaN MOSFETs with Si₃N₄/TiO₂ Stacked Dual Gate Dielectric - An, Hee-Dae; Bae, Jin-Hyuk; Lee, Sin-Hyung; Kang, In-Man; Min, So-Ra; Lee, Sang-Ho; Park, Jin; Kim, Geon-Uk; Yoon, Young-Jun; Seo, Jae-Hwa; Cho, Min-Su; Jang, Jaewon (Journal of semiconductor technology and science, 2022)
Keywords: 전기공학; GaN; normally-off; dual gate dielectric; silicon nitride (Si₃N₄); recessed gate technique; titanium dioxide (TiO₂); AlGaN