Simulation of hollow-cathode-nitriding plasma and design of diffusion equipment with DC and RF dual discharge
Abstract The formation and diffusion of plasma are complex and critical processes in plasma nitriding. A stable and high-concentration plasma atmosphere can effectively increase the diffusion rate and the thickness of the diffusion layer. In this study, a two-dimensional multi-physics model integrat...
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| Published in | Physica scripta Vol. 98; no. 2; pp. 25610 - 25623 |
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| Format | Journal Article |
| Language | English |
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01.02.2023
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| Abstract | Abstract
The formation and diffusion of plasma are complex and critical processes in plasma nitriding. A stable and high-concentration plasma atmosphere can effectively increase the diffusion rate and the thickness of the diffusion layer. In this study, a two-dimensional multi-physics model integrating physical kinetics, energy transfer, mass transfer, and electromagnetic induction was developed. The effect of a hollow-cathode structure on plasma distribution was investigated, and the edge effect observed on nitrided metals was eliminated. The impacts of the essential plasma diffusion parameters were simulated using the developed model. A simple but effective experiment was designed to validate the model. A diffusion furnace with DC and RF dual discharge was designed by adding a high-frequency coil to existing equipment. Subsequently, the effects of the two plasma excitation sources on the overall distribution of plasma were analyzed. Notably, the proposed model is a high-fidelity one based on actual device dimensions; therefore, it can be used to simulate, predict, and control the plasma formation process in the diffusion furnace. In addition, the model can provide reference data and guidance for optimizing the diffusion process and structural design of diffusion furnaces. |
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| AbstractList | Abstract
The formation and diffusion of plasma are complex and critical processes in plasma nitriding. A stable and high-concentration plasma atmosphere can effectively increase the diffusion rate and the thickness of the diffusion layer. In this study, a two-dimensional multi-physics model integrating physical kinetics, energy transfer, mass transfer, and electromagnetic induction was developed. The effect of a hollow-cathode structure on plasma distribution was investigated, and the edge effect observed on nitrided metals was eliminated. The impacts of the essential plasma diffusion parameters were simulated using the developed model. A simple but effective experiment was designed to validate the model. A diffusion furnace with DC and RF dual discharge was designed by adding a high-frequency coil to existing equipment. Subsequently, the effects of the two plasma excitation sources on the overall distribution of plasma were analyzed. Notably, the proposed model is a high-fidelity one based on actual device dimensions; therefore, it can be used to simulate, predict, and control the plasma formation process in the diffusion furnace. In addition, the model can provide reference data and guidance for optimizing the diffusion process and structural design of diffusion furnaces. |
| Author | Shao, Minghao Li, Yang He, Yongyong Zhang, Zhehao Yan, Jiwen Wang, Zhengwei |
| Author_xml | – sequence: 1 givenname: Zhehao orcidid: 0000-0003-1016-2698 surname: Zhang fullname: Zhang, Zhehao organization: Tsinghua University State Key Laboratory of Tribology, Beijing, 100084, People’s Republic of China – sequence: 2 givenname: Zhengwei surname: Wang fullname: Wang, Zhengwei organization: Yantai University Department of nuclear equipment, Yantai, 264005, People’s Republic of China – sequence: 3 givenname: Minghao surname: Shao fullname: Shao, Minghao organization: Yantai University School of Electromechanical Automobile Engineering, Yantai, 264005, People’s Republic of China – sequence: 4 givenname: Jiwen surname: Yan fullname: Yan, Jiwen organization: Yantai University Department of nuclear equipment, Yantai, 264005, People’s Republic of China – sequence: 5 givenname: Yongyong surname: He fullname: He, Yongyong organization: Tsinghua University State Key Laboratory of Tribology, Beijing, 100084, People’s Republic of China – sequence: 6 givenname: Yang orcidid: 0000-0002-7680-4959 surname: Li fullname: Li, Yang organization: Yantai University Department of nuclear equipment, Yantai, 264005, People’s Republic of China |
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| Cites_doi | 10.1088/0963-0252/7/3/009 10.1116/1.579326 10.1016/j.surfcoat.2010.04.034 10.1016/j.surfcoat.2010.08.034 10.1063/1.5016354 10.1016/j.apsusc.2008.04.027 10.1088/0022-3727/48/34/345204 10.1088/1361-6595/ab9b1a 10.1016/j.elstat.2021.103642 10.1109/eic.2011.5996137 10.1016/j.matlet.2022.131991 10.1007/s40195-018-0836-z 10.1016/j.jmrt.2022.04.122 10.1016/j.surfcoat.2022.128307 10.1016/j.apsusc.2013.01.154 10.1016/j.surfcoat.2021.127511 10.1016/j.arabjc.2021.103366 10.1080/02670844.2020.1758012 10.1109/27.106826 10.1016/j.surfcoat.2020.125976 10.1016/j.vacuum.2022.111055 10.1016/j.actamat.2020.06.020 10.1016/j.jmrt.2021.08.039 10.1103/PhysRevA.27.1345 10.1016/j.matchar.2018.11.017 10.1016/j.trac.2017.01.013 10.1016/j.jmrt.2022.03.193 10.1016/j.triboint.2022.107496 10.1007/s00339-017-1499-8 10.1016/j.surfcoat.2005.02.102 10.1590/1980-5373-mr-2017-0697 10.1016/j.commatsci.2008.04.021 10.1016/j.mtcomm.2022.103628 10.1016/S0921-5093(96)10561-X 10.1063/1.352926 10.1016/j.tsf.2015.02.066 10.1088/1361-6595/ab9b1b |
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| References | Li (psacb330bib6) 2021; 37 Arslanbekov (psacb330bib36) 1998; 7 Jiménez-Redondo (psacb330bib19) 2020; 29 Dong (psacb330bib35) 2020; 397 Martínez-Jarquín (psacb330bib10) 2017; 89 Li (psacb330bib33) 2019; 147 Dalcin (psacb330bib28) 2022; 18 Chatain (psacb330bib18) 2020; 29 Yao (psacb330bib29) 2022; 436 Zhang (psacb330bib21) 2022; 200 Yamabe (psacb330bib25) 1983; 27 Muhl (psacb330bib37) 2015; 579 Hassani-Gangaraj (psacb330bib14) 2013; 271 Ghassemi (psacb330bib22) 2011 Beouf (psacb330bib26) 1991; 19 Saber (psacb330bib17) 2022; 115 Olzon-Dionysio (psacb330bib9) 2010; 204 Lymberopoulos (psacb330bib23) 1993; 73 Ren (psacb330bib3) 2022; 170 Li (psacb330bib34) 2017; 124 Wang (psacb330bib8) 2008; 254 Aziz (psacb330bib16) 2021; 14 Liu (psacb330bib7) 2021; 422 Yang (psacb330bib5) 2020; 196 Sun (psacb330bib12) 1997; 224 Duman (psacb330bib27) 2022; 31 Wu (psacb330bib1) 2022; 18 Kashaev (psacb330bib15) 2005; 200 Şimşir (psacb330bib13) 2008; 44 Yang (psacb330bib4) 2021; 15 Li (psacb330bib31) 2018; 21 Lei (psacb330bib20) 2018; 8 Nishimoto (psacb330bib11) 2010; 205 Dipeso (psacb330bib24) 1994; 12 Li (psacb330bib32) 2018; 32 Valdés (psacb330bib30) 2022; 316 Hamann (psacb330bib2) 2015; 48 |
| References_xml | – volume: 7 start-page: 310 year: 1998 ident: psacb330bib36 article-title: On the hollow-cathode effect: conventional and modified geometry publication-title: Plasma Sources Sci. Technol. doi: 10.1088/0963-0252/7/3/009 contributor: fullname: Arslanbekov – volume: 12 start-page: 1387 year: 1994 ident: psacb330bib24 article-title: Two-dimensional self-consistent fluid simulation of radio frequency inductive sources, J. Vac. Sci. Technol. A 12, 1387-1396 publication-title: Journal of Vacuum Science and Technology A Vacuum Surfaces & Films doi: 10.1116/1.579326 contributor: fullname: Dipeso – volume: 204 start-page: 3623 year: 2010 ident: psacb330bib9 article-title: Influences of plasma nitriding edge effect on properties of 316L stainless steel publication-title: Surf. Coat. Technol. doi: 10.1016/j.surfcoat.2010.04.034 contributor: fullname: Olzon-Dionysio – volume: 205 start-page: S365 year: 2010 ident: psacb330bib11 article-title: Effect of the distance between screen and sample on active screen plasma nitriding properties publication-title: Surface and Coatings Technology doi: 10.1016/j.surfcoat.2010.08.034 contributor: fullname: Nishimoto – volume: 8 year: 2018 ident: psacb330bib20 article-title: Simulation of a large size inductively coupled plasma generator and comparison with experimental data publication-title: AIP Adv. doi: 10.1063/1.5016354 contributor: fullname: Lei – volume: 254 start-page: 6595 year: 2008 ident: psacb330bib8 article-title: Plasma nitriding of low alloy steels at floating and cathodic potentials publication-title: Appl. Surf. Sci. doi: 10.1016/j.apsusc.2008.04.027 contributor: fullname: Wang – volume: 48 year: 2015 ident: psacb330bib2 article-title: Spectroscopic diagnostics of active screen plasma nitriding processes: on the interplay of active screen and model probe plasmas publication-title: J. Phys. D: Appl. Phys. doi: 10.1088/0022-3727/48/34/345204 contributor: fullname: Hamann – volume: 29 year: 2020 ident: psacb330bib18 article-title: N2–H2 capacitively coupled radio-frequency discharges at low pressure. Part I. Experimental results: effect of the H2 amount on electrons, positive ions and ammonia formation publication-title: Plasma Sources Sci. Technol. doi: 10.1088/1361-6595/ab9b1a contributor: fullname: Chatain – volume: 115 year: 2022 ident: psacb330bib17 article-title: Plasma energy efficiency in tip-to-plane air corona discharges at atmospheric pressure publication-title: J. Electrostat. doi: 10.1016/j.elstat.2021.103642 contributor: fullname: Saber – start-page: 156 year: 2011 ident: psacb330bib22 doi: 10.1109/eic.2011.5996137 contributor: fullname: Ghassemi – volume: 316 year: 2022 ident: psacb330bib30 article-title: Effects of plasma nitriding in the corrosion behavior of an AISI 4140 steel using a seawater medium solution publication-title: Mater. Lett. doi: 10.1016/j.matlet.2022.131991 contributor: fullname: Valdés – volume: 32 start-page: 733 year: 2018 ident: psacb330bib32 article-title: Effect of electric potentials on microstructure, corrosion and wear characteristic of the nitrided layer prepared on 2Cr13 stainless steel by plasma nitriding publication-title: Acta Metallurgica Sinica (English Letters) doi: 10.1007/s40195-018-0836-z contributor: fullname: Li – volume: 18 start-page: 4698 year: 2022 ident: psacb330bib28 article-title: Improvement on pitting wear resistance of gears by controlled forging and plasma nitriding publication-title: Journal of Materials Research and Technology doi: 10.1016/j.jmrt.2022.04.122 contributor: fullname: Dalcin – volume: 436 year: 2022 ident: psacb330bib29 article-title: Comprehensive analysis of nitriding behavior and synergistic strengthening mechanism on quenched M50 steel publication-title: Surf. Coat. Technol. doi: 10.1016/j.surfcoat.2022.128307 contributor: fullname: Yao – volume: 271 start-page: 156 year: 2013 ident: psacb330bib14 article-title: Microstructural evolution during nitriding, finite element simulation and experimental assessment publication-title: Appl. Surf. Sci. doi: 10.1016/j.apsusc.2013.01.154 contributor: fullname: Hassani-Gangaraj – volume: 422 year: 2021 ident: psacb330bib7 article-title: Low-pressure hollow cathode plasma source carburizing technique at low temperature publication-title: Surf. Coat. Technol. doi: 10.1016/j.surfcoat.2021.127511 contributor: fullname: Liu – volume: 14 year: 2021 ident: psacb330bib16 article-title: Degradation of perfluorosurfactant in aqueous solution using non-thermal plasma generated by nano-second pulse corona discharge reactor publication-title: Arabian J. Chem. doi: 10.1016/j.arabjc.2021.103366 contributor: fullname: Aziz – volume: 37 start-page: 351 year: 2021 ident: psacb330bib6 article-title: Hollow cathodic plasma source nitriding of AISI 4140 steel publication-title: Surf. Eng. doi: 10.1080/02670844.2020.1758012 contributor: fullname: Li – volume: 19 start-page: 286 year: 1991 ident: psacb330bib26 article-title: Pseudospark discharges via computer simulation publication-title: Ieee T Plasma Sci doi: 10.1109/27.106826 contributor: fullname: Beouf – volume: 397 year: 2020 ident: psacb330bib35 article-title: Surface hardening of laser melting deposited 12CrNi2 alloy steel by enhanced plasma carburizing via hollow cathode discharge publication-title: Surface & Coatings Technology doi: 10.1016/j.surfcoat.2020.125976 contributor: fullname: Dong – volume: 200 year: 2022 ident: psacb330bib21 article-title: Design and simulation of a novel MPCVD reactor with three-cylinder cavity publication-title: Vacuum doi: 10.1016/j.vacuum.2022.111055 contributor: fullname: Zhang – volume: 196 start-page: 347 year: 2020 ident: psacb330bib5 article-title: First-principles analysis on the role of rare-Earth doping in affecting nitrogen adsorption and diffusion at Fe surface towards clarified catalytic diffusion mechanism in nitriding publication-title: Acta Mater. doi: 10.1016/j.actamat.2020.06.020 contributor: fullname: Yang – volume: 15 start-page: 448 year: 2021 ident: psacb330bib4 article-title: Comparative study of plasma nitriding and plasma oxynitriding for optimal wear and corrosion resistance: influences of gas composition publication-title: Journal of Materials Research and Technology doi: 10.1016/j.jmrt.2021.08.039 contributor: fullname: Yang – volume: 27 start-page: 1345 year: 1983 ident: psacb330bib25 article-title: Measurement of free-free emission from low-energy-electron collisions with Ar publication-title: Phys. Rev. A doi: 10.1103/PhysRevA.27.1345 contributor: fullname: Yamabe – volume: 147 start-page: 353 year: 2019 ident: psacb330bib33 article-title: Microstructure, mechanical and adhesive properties of CrN/CrTiAlSiN/WCrTiAlN multilayer coatings deposited on nitrided AISI 4140 steel publication-title: Mater. Charact. doi: 10.1016/j.matchar.2018.11.017 contributor: fullname: Li – volume: 89 start-page: 133 year: 2017 ident: psacb330bib10 article-title: Low-temperature plasma (LTP) jets for mass spectrometry (MS): Ion processes, instrumental set-ups, and application examples publication-title: TrAC, Trends Anal. Chem. doi: 10.1016/j.trac.2017.01.013 contributor: fullname: Martínez-Jarquín – volume: 18 start-page: 3819 year: 2022 ident: psacb330bib1 article-title: Titanium-modified plasma nitriding layer and enhanced properties for 42CrMo steel publication-title: Journal of Materials Research and Technology doi: 10.1016/j.jmrt.2022.03.193 contributor: fullname: Wu – volume: 170 year: 2022 ident: psacb330bib3 article-title: Dynamic response characteristics and damage mechanism of impact wear for deep plasma nitrided layer publication-title: Tribol. Int. doi: 10.1016/j.triboint.2022.107496 contributor: fullname: Ren – volume: 124 year: 2017 ident: psacb330bib34 article-title: Microstructure and corrosion resistance of nitrogen-rich surface layers on AISI 304 stainless steel by rapid nitriding in a hollow cathode discharge publication-title: Appl. Phys. A doi: 10.1007/s00339-017-1499-8 contributor: fullname: Li – volume: 200 start-page: 502 year: 2005 ident: psacb330bib15 article-title: Assessment of the application potential of the intensified glow discharge for industrial plasma nitriding of Ti-6Al-4V publication-title: Surf. Coat. Technol. doi: 10.1016/j.surfcoat.2005.02.102 contributor: fullname: Kashaev – volume: 21 year: 2018 ident: psacb330bib31 article-title: Enhancement of pitting corrosion resistance of austenitic stainless steel through deposition of Amorphous/Nanocrystalline Oxy-nitrided phases by active screen plasma treatment publication-title: Mater Res-Ibero-Am J doi: 10.1590/1980-5373-mr-2017-0697 contributor: fullname: Li – volume: 44 start-page: 588 year: 2008 ident: psacb330bib13 article-title: A FEM based framework for simulation of thermal treatments: application to steel quenching publication-title: Comput. Mater. Sci. doi: 10.1016/j.commatsci.2008.04.021 contributor: fullname: Şimşir – volume: 31 year: 2022 ident: psacb330bib27 article-title: Effect of nitriding conditions and operation temperatures on dry sliding wear properties of the aluminum extrusion die steel in the industry publication-title: Materials Today Communications doi: 10.1016/j.mtcomm.2022.103628 contributor: fullname: Duman – volume: 224 start-page: 33 year: 1997 ident: psacb330bib12 article-title: A numerical model of plasma nitriding of low alloy steels publication-title: Mater. Sci. Eng. A doi: 10.1016/S0921-5093(96)10561-X contributor: fullname: Sun – volume: 73 start-page: 3668 year: 1993 ident: psacb330bib23 article-title: Fluid simulations of glow discharges: effect of metastable atoms in argon publication-title: J. Appl. Phys. doi: 10.1063/1.352926 contributor: fullname: Lymberopoulos – volume: 579 start-page: 174 year: 2015 ident: psacb330bib37 article-title: The use of hollow cathodes in deposition processes: a critical review publication-title: Thin Solid Films doi: 10.1016/j.tsf.2015.02.066 contributor: fullname: Muhl – volume: 29 year: 2020 ident: psacb330bib19 article-title: N2–H2 capacitively coupled radio-frequency discharges at low pressure: II. Modeling results: the relevance of plasma-surface interaction publication-title: Plasma Sources Sci. Technol doi: 10.1088/1361-6595/ab9b1b contributor: fullname: Jiménez-Redondo |
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The formation and diffusion of plasma are complex and critical processes in plasma nitriding. A stable and high-concentration plasma atmosphere can... |
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| Title | Simulation of hollow-cathode-nitriding plasma and design of diffusion equipment with DC and RF dual discharge |
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