Particular structural defects in Ta2O5 from crystallisation of amorphous thin films in O2–H2O atmosphere
(a,b) HRTEM images of structural defects in mL-Ta2O5 monoclinic structures resulting of a crystallisation of amorphous thin films in O2–H2O atmosphere compared in (c) to simulated images of the 11L-Ta2O5 structure with [001] columns of Ta5+–O2− vacancies or only Ta5+ vacancies; (d) ToF-SIMS depth pr...
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Published in | Acta materialia Vol. 94; pp. 181 - 192 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
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01.08.2015
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Abstract | (a,b) HRTEM images of structural defects in mL-Ta2O5 monoclinic structures resulting of a crystallisation of amorphous thin films in O2–H2O atmosphere compared in (c) to simulated images of the 11L-Ta2O5 structure with [001] columns of Ta5+–O2− vacancies or only Ta5+ vacancies; (d) ToF-SIMS depth profiles of H−, 18O−, TaO− and 30Si− through a Ta2O5 thin film on Si substrate. [Display omitted]
Structural defects within Ta2O5 monoclinic structures were obtained by crystallisation at 850°C in atmosphere O2–H2O of amorphous thin films deposited by injection metal-organic chemical vapour deposition (i-MOCVD) on Si substrates. These defects, observed by high resolution transmission electron microscopy (HRTEM), contain alignments of Ta5+ vacancies along a crystallographic direction [001]. H2O gas of different partial pressures was obtained by bubbling O2 gas through deionised water or Na2CO3–K2CO3 aqueous solution maintained at different temperatures in a range of 25–45°C. The amount of structural defects increases dramatically with H2O partial pressure and annealing time from HRTEM observations and X-ray diffraction results. Such defects are thermally stable, at least up to 850°C. Using Na2CO3–K2CO3 aqueous solution, similar structural defects including mainly K+ species were formed. Na+ species contributes mostly to the formation of another phase of composition close to (Na0.8K0.2)2Ta4O11 of natrotantite type structure. Assuming that Ta5+ vacancies are occupied by H+ in a form of bridging hydroxyl groups Ta–OH–Ta in order to satisfy electrical neutrality, the presence of significant levels of hydrogen atoms within Ta2O5 concordant with H enrichment at defects was identified by time-of-flight secondary ion mass spectrometry (ToF-SIMS). |
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AbstractList | Structural defects within Ta2O5 monoclinic structures were obtained by crystallisation at 850 degree C in atmosphere O2-H2O of amorphous thin films deposited by injection metal-organic chemical vapour deposition (i-MOCVD) on Si substrates. These defects, observed by high resolution transmission electron microscopy (HRTEM), contain alignments of Ta5+ vacancies along a crystallographic direction [001]. H2O gas of different partial pressures was obtained by bubbling O2 gas through deionised water or Na2CO3-K2CO3 aqueous solution maintained at different temperatures in a range of 25-45 degree C. The amount of structural defects increases dramatically with H2O partial pressure and annealing time from HRTEM observations and X-ray diffraction results. Such defects are thermally stable, at least up to 850 degree C. Using Na2CO3-K2CO3 aqueous solution, similar structural defects including mainly K+ species were formed. Na+ species contributes mostly to the formation of another phase of composition close to (Na0.8K0.2)2Ta4O11 of natrotantite type structure. Assuming that Ta5+ vacancies are occupied by H+ in a form of bridging hydroxyl groups Ta-OH-Ta in order to satisfy electrical neutrality, the presence of significant levels of hydrogen atoms within Ta2O5 concordant with H enrichment at defects was identified by time-of-flight secondary ion mass spectrometry (ToF-SIMS). (a,b) HRTEM images of structural defects in mL-Ta2O5 monoclinic structures resulting of a crystallisation of amorphous thin films in O2–H2O atmosphere compared in (c) to simulated images of the 11L-Ta2O5 structure with [001] columns of Ta5+–O2− vacancies or only Ta5+ vacancies; (d) ToF-SIMS depth profiles of H−, 18O−, TaO− and 30Si− through a Ta2O5 thin film on Si substrate. [Display omitted] Structural defects within Ta2O5 monoclinic structures were obtained by crystallisation at 850°C in atmosphere O2–H2O of amorphous thin films deposited by injection metal-organic chemical vapour deposition (i-MOCVD) on Si substrates. These defects, observed by high resolution transmission electron microscopy (HRTEM), contain alignments of Ta5+ vacancies along a crystallographic direction [001]. H2O gas of different partial pressures was obtained by bubbling O2 gas through deionised water or Na2CO3–K2CO3 aqueous solution maintained at different temperatures in a range of 25–45°C. The amount of structural defects increases dramatically with H2O partial pressure and annealing time from HRTEM observations and X-ray diffraction results. Such defects are thermally stable, at least up to 850°C. Using Na2CO3–K2CO3 aqueous solution, similar structural defects including mainly K+ species were formed. Na+ species contributes mostly to the formation of another phase of composition close to (Na0.8K0.2)2Ta4O11 of natrotantite type structure. Assuming that Ta5+ vacancies are occupied by H+ in a form of bridging hydroxyl groups Ta–OH–Ta in order to satisfy electrical neutrality, the presence of significant levels of hydrogen atoms within Ta2O5 concordant with H enrichment at defects was identified by time-of-flight secondary ion mass spectrometry (ToF-SIMS). |
Author | Le Gallic, Marie Roussel, Hervé Audier, Marc Rapenne, Laetitia Barnes, Jean-Paul |
Author_xml | – sequence: 1 givenname: Marie surname: Le Gallic fullname: Le Gallic, Marie organization: Laboratoire des Matériaux et du Génie Physique, University Grenoble Alpes, UMR CNRS 5628, MINATEC Campus, 3 parvis Louis Néel, BP 257, 38016 Grenoble Cedex 1, France – sequence: 2 givenname: Hervé surname: Roussel fullname: Roussel, Hervé organization: Laboratoire des Matériaux et du Génie Physique, University Grenoble Alpes, UMR CNRS 5628, MINATEC Campus, 3 parvis Louis Néel, BP 257, 38016 Grenoble Cedex 1, France – sequence: 3 givenname: Laetitia surname: Rapenne fullname: Rapenne, Laetitia organization: Laboratoire des Matériaux et du Génie Physique, University Grenoble Alpes, UMR CNRS 5628, MINATEC Campus, 3 parvis Louis Néel, BP 257, 38016 Grenoble Cedex 1, France – sequence: 4 givenname: Marc surname: Audier fullname: Audier, Marc email: Marc.Audier@grenoble-inp.fr organization: Laboratoire des Matériaux et du Génie Physique, University Grenoble Alpes, UMR CNRS 5628, MINATEC Campus, 3 parvis Louis Néel, BP 257, 38016 Grenoble Cedex 1, France – sequence: 5 givenname: Jean-Paul surname: Barnes fullname: Barnes, Jean-Paul organization: Laboratoire d’Électronique et de Technologie de l’Information, University Grenoble Alpes, CEA-LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France |
BackLink | https://hal.science/hal-02012972$$DView record in HAL |
BookMark | eNqFkc1qHDEMx01JoUnaRyj42B5m46_5OpUQkm5hYXtIz0bjlVkvnvHW9gRyyzvkDfMk9XRDrgGBhPjpL6T_BTmbwoSEfOVsxRlvrg4rMBlGyCvBeL1iqgT_QM5518pKqFqelVrWfdWoWn0iFykdGOOiVeycHH5DzM7MHiJNOc4mzxE83aFFkxN1E70Hsa2pjWGkJj6mDN67BNmFiQZLYQzxuA9zonlfYOv8-H9qK16entdiSyGPIR33GPEz-WjBJ_zymi_Jn7vb-5t1tdn-_HVzvamMkH2ugEEzWOz6YcflIDslG2U6Ngwt5w0IkFZ0NRfMSLQ9V6IZpFVMSuhYzyxyeUm-n3T34PUxuhHiow7g9Pp6o5ceK28SfSseFvbbiT3G8HfGlPXokkHvYcJylOZtyyQvm7uC1ifUxJBSRPumzZlefNAH_eqDXnzQTJVYVvw4zWG5-cFh1Mk4nAzuXCw_1rvg3lH4BykilcQ |
Cites_doi | 10.3406/bulmi.1985.7848 10.1063/1.346828 10.1063/1.338321 10.1143/JJAP.6.21 10.1149/1.3050377 10.1063/1.3573791 10.1016/j.jssc.2010.01.030 10.1016/j.jcrysgro.2004.10.004 10.1016/j.jssc.2011.06.001 10.1016/j.ssi.2006.10.019 10.1021/cm703202n 10.1016/j.jssc.2005.08.011 10.1016/j.jssc.2012.04.014 10.1016/0167-2738(90)90389-9 10.1088/1742-6596/100/8/082017 10.1016/j.jssc.2010.07.001 10.1021/ic101529n 10.1364/AO.22.003121 10.1016/j.jssc.2012.03.023 10.1016/0022-5088(64)90036-0 10.1002/fuce.201200088 10.1016/j.egypro.2012.05.212 10.1039/c0jm02540b 10.1016/j.vacuum.2008.04.018 10.1016/0167-2738(93)90247-Z 10.1002/1099-0712(200005/10)10:3/5<155::AID-AMO406>3.0.CO;2-2 10.1016/j.jssc.2013.01.018 10.1016/S0927-796X(97)00023-5 10.1016/j.surfcoat.2011.02.035 10.1016/j.elecom.2005.03.016 10.1107/S0108768195000589 |
ContentType | Journal Article |
Copyright | 2015 Acta Materialia Inc. Distributed under a Creative Commons Attribution 4.0 International License |
Copyright_xml | – notice: 2015 Acta Materialia Inc. – notice: Distributed under a Creative Commons Attribution 4.0 International License |
DBID | AAYXX CITATION 7SR 8BQ 8FD JG9 1XC |
DOI | 10.1016/j.actamat.2015.04.041 |
DatabaseName | CrossRef Engineered Materials Abstracts METADEX Technology Research Database Materials Research Database Hyper Article en Ligne (HAL) |
DatabaseTitle | CrossRef Materials Research Database Engineered Materials Abstracts Technology Research Database METADEX |
DatabaseTitleList | Materials Research Database |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Engineering |
EISSN | 1873-2453 |
EndPage | 192 |
ExternalDocumentID | oai_HAL_hal_02012972v1 10_1016_j_actamat_2015_04_041 S1359645415002931 |
GroupedDBID | --K --M -~X .~1 0R~ 1B1 1~. 1~5 23M 4.4 457 4G. 5GY 5VS 7-5 71M 8P~ AABNK AABXZ AACTN AAEDT AAEDW AAEPC AAIAV AAIKJ AAKOC AALRI AAOAW AAQFI AAXUO ABFNM ABMAC ABNEU ABXRA ABYKQ ACDAQ ACGFS ACRLP ADBBV ADEZE ADIYS AEBSH AEKER AENEX AEZYN AFKWA AFRZQ AFTJW AGHFR AGUBO AGYEJ AIEXJ AIKHN AITUG AIVDX AJBFU AJOXV ALMA_UNASSIGNED_HOLDINGS AMFUW AMRAJ AXJTR BKOJK BLXMC CS3 EBS EFJIC EFLBG EJD EO8 EO9 EP2 EP3 F5P FDB FEDTE FIRID FNPLU FYGXN G-Q GBLVA HVGLF HZ~ IHE J1W KOM M41 MAGPM N9A O-L O9- OAUVE OGIMB OZT P-8 P-9 PC. Q38 RIG RNS ROL RPZ SDF SDG SDP SES SPC SPCBC SPD SSM SSQ SSZ T5K TN5 XPP ZMT ~G- AAQXK AAXKI AAYXX ABTAH ABXDB ACNNM ADMUD AFFNX AFJKZ AKRWK ASPBG AVWKF AZFZN CITATION FGOYB R2- SEW T9H ZY4 7SR 8BQ 8FD JG9 1XC |
ID | FETCH-LOGICAL-c239t-a0a6bfe89bd13b384364c80bb7116a2a3f285120c3ef91426b3f4033a8090fe13 |
IEDL.DBID | .~1 |
ISSN | 1359-6454 |
IngestDate | Tue Oct 15 16:06:18 EDT 2024 Fri Oct 25 21:20:59 EDT 2024 Thu Sep 26 18:44:22 EDT 2024 Fri Feb 23 02:41:48 EST 2024 |
IsPeerReviewed | true |
IsScholarly | true |
Keywords | X-ray diffraction Transmission electron microscopy ToF-SIMS Ta2O5 Defects |
Language | English |
License | Distributed under a Creative Commons Attribution 4.0 International License: http://creativecommons.org/licenses/by/4.0 |
LinkModel | DirectLink |
MergedId | FETCHMERGED-LOGICAL-c239t-a0a6bfe89bd13b384364c80bb7116a2a3f285120c3ef91426b3f4033a8090fe13 |
Notes | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 |
ORCID | 0000-0003-1896-2315 0000-0001-6110-5760 |
PQID | 1770317118 |
PQPubID | 23500 |
PageCount | 12 |
ParticipantIDs | hal_primary_oai_HAL_hal_02012972v1 proquest_miscellaneous_1770317118 crossref_primary_10_1016_j_actamat_2015_04_041 elsevier_sciencedirect_doi_10_1016_j_actamat_2015_04_041 |
PublicationCentury | 2000 |
PublicationDate | 2015-08-01 2015-08-00 20150801 2015-08 |
PublicationDateYYYYMMDD | 2015-08-01 |
PublicationDate_xml | – month: 08 year: 2015 text: 2015-08-01 day: 01 |
PublicationDecade | 2010 |
PublicationTitle | Acta materialia |
PublicationYear | 2015 |
Publisher | Elsevier Ltd Elsevier |
Publisher_xml | – name: Elsevier Ltd – name: Elsevier |
References | Audier, Chenevier, Roussel, Vincent, Pena, Lintanf-Salaün, Audier, Chenevier, Roussel, Vincent, Pena, Lintanf-Salaün (b0205) 2011; 184 Sénateur, Dubourdieu, Weiss, Rosina, Abrutis (b0105) 2000; 10 Schmid, Thompson, Rae, Butler, Withers, Ishizawa, Kishimoto (b0090) 1995; 51 Lehovec (b0115) 1964; 7 Woodward, Lees, Thomas (b0175) 2012; 192 Noda, Lee, Domen, Kondo (b0030) 2008; 20 Audier, Chenevier, Roussel, Lintanf (b0120) 2010; 183 Zhang, Huang, Conibeer (b0025) 2012; 22 Colomban (b0065) 2013; 13 Roth, Stephenson (b0095) 1970 Maso, Woodward, Varez, West (b0180) 2011; 21 Kobayashi, Terui (b0010) 1983; 22 Nakagawa, Okada (b0020) 1990; 68 Abe, Peng, Takiguchi, Kawamura, Sasaki, Itoh, Suzuki (b0070) 2008; 13 Palasyuk, Palasyuk, Maggard, Palasyuk, Palasyuk, Maggard (b0210) 2010; 49 Mattes, Schaper (b0140) 1985; 22 Lintanf, Neagu, Djurado (b0100) 2007; 177 Tajima, Hotta, Yamada, Okada, Yoshimura (b0050) 2011; 205 Terao (b0125) 1967; 6 Le Gallic, Roussel (b0080) 2013; 200 P. Stadelmann, Java electron microscope simulation software de Grotthuss (b0200) 1806; 58 Kim, Park, Jung, Jung, Joo (b0185) 2005; vol. 156 Boscoboinik, Xin, Emmez, Yang, Shaikhutdinov, Fischer, Sauer, Freund (b0190) 2013; 117 Nakagawa, Gomi, Okada (b0015) 1987; 61 Chaneliere, Autran, Devine, Balland (b0005) 1998; 22 Huang, Chu (b0130) 2005; 274 Abe, Itadani, Kawamura, Sasaki, Itoh (b0075) 2009; 83 Ahn, Shim, Kim, Kim, Seong (b0055) 2005; 7 . Saito, Ushio, Yamada, Niwa (b0035) 1990; 40 Woodward, Thomas (b0170) 2011; 98 Pechar, Rykl (b0195) 1985; 39 Freund (b0060) 1992 Duggan, Saito, Niwa (b0040) 1993; 62 Tajima, Yamada, Bao, Okada, Yoshimura (b0045) 2008; 100 Palasyuk, Maggard (b0165) 2012; 191 Ercit, Hawthorne, Cerny (b0135) 1985; 108 Grey, Mumme, Roth (b0085) 2005; 178 Roth (10.1016/j.actamat.2015.04.041_b0095) 1970 Lintanf (10.1016/j.actamat.2015.04.041_b0100) 2007; 177 Nakagawa (10.1016/j.actamat.2015.04.041_b0015) 1987; 61 Tajima (10.1016/j.actamat.2015.04.041_b0050) 2011; 205 Ahn (10.1016/j.actamat.2015.04.041_b0055) 2005; 7 Huang (10.1016/j.actamat.2015.04.041_b0130) 2005; 274 Audier (10.1016/j.actamat.2015.04.041_h0145) 2011; 184 Palasyuk (10.1016/j.actamat.2015.04.041_b0165) 2012; 191 Schmid (10.1016/j.actamat.2015.04.041_b0090) 1995; 51 Palasyuk (10.1016/j.actamat.2015.04.041_h0160) 2010; 183 Kim (10.1016/j.actamat.2015.04.041_b0185) 2005; vol. 156 Grey (10.1016/j.actamat.2015.04.041_b0085) 2005; 178 Duggan (10.1016/j.actamat.2015.04.041_b0040) 1993; 62 Maso (10.1016/j.actamat.2015.04.041_b0180) 2011; 21 Woodward (10.1016/j.actamat.2015.04.041_b0170) 2011; 98 Terao (10.1016/j.actamat.2015.04.041_b0125) 1967; 6 Colomban (10.1016/j.actamat.2015.04.041_b0065) 2013; 13 Lehovec (10.1016/j.actamat.2015.04.041_b0115) 1964; 7 Tajima (10.1016/j.actamat.2015.04.041_b0045) 2008; 100 Zhang (10.1016/j.actamat.2015.04.041_b0025) 2012; 22 Abe (10.1016/j.actamat.2015.04.041_b0075) 2009; 83 de Grotthuss (10.1016/j.actamat.2015.04.041_b0200) 1806; 58 Chaneliere (10.1016/j.actamat.2015.04.041_b0005) 1998; 22 Ercit (10.1016/j.actamat.2015.04.041_b0135) 1985; 108 Audier (10.1016/j.actamat.2015.04.041_h0150) 2011; 184 Boscoboinik (10.1016/j.actamat.2015.04.041_b0190) 2013; 117 10.1016/j.actamat.2015.04.041_b0110 Pechar (10.1016/j.actamat.2015.04.041_b0195) 1985; 39 Audier (10.1016/j.actamat.2015.04.041_b0120) 2010; 183 Mattes (10.1016/j.actamat.2015.04.041_b0140) 1985; 22 Kobayashi (10.1016/j.actamat.2015.04.041_b0010) 1983; 22 Saito (10.1016/j.actamat.2015.04.041_b0035) 1990; 40 Sénateur (10.1016/j.actamat.2015.04.041_b0105) 2000; 10 Noda (10.1016/j.actamat.2015.04.041_b0030) 2008; 20 Woodward (10.1016/j.actamat.2015.04.041_b0175) 2012; 192 Nakagawa (10.1016/j.actamat.2015.04.041_b0020) 1990; 68 Abe (10.1016/j.actamat.2015.04.041_b0070) 2008; 13 Palasyuk (10.1016/j.actamat.2015.04.041_h0155) 2010; 49 Le Gallic (10.1016/j.actamat.2015.04.041_b0080) 2013; 200 Freund (10.1016/j.actamat.2015.04.041_b0060) 1992 |
References_xml | – start-page: 138 year: 1992 end-page: 157 ident: b0060 publication-title: Proton Conductors, Solids, Membranes and Gels – Materials and Devices, Chemistry of Solid State Materials (No 2) contributor: fullname: Freund – volume: 191 start-page: 263 year: 2012 end-page: 270 ident: b0165 article-title: NaCu( publication-title: J. Solid State Chem. contributor: fullname: Maggard – volume: 13 start-page: 55 year: 2008 end-page: 60 ident: b0070 article-title: Effects of substrate cooling on the ionic conductivity of Ta publication-title: ECS Trans. contributor: fullname: Suzuki – volume: 274 start-page: 73 year: 2005 end-page: 77 ident: b0130 article-title: Crystallization improvement of Ta publication-title: J. Crystal Growth contributor: fullname: Chu – volume: 51 start-page: 698 year: 1995 end-page: 708 ident: b0090 article-title: Structures of Ta publication-title: Acta Crystallogr. B contributor: fullname: Kishimoto – start-page: 167 year: 1970 end-page: 181 ident: b0095 publication-title: The Chemistry of Extended Defects in Non-Metallic Solids contributor: fullname: Stephenson – volume: 61 start-page: 5012 year: 1987 end-page: 5017 ident: b0015 article-title: Deposition of new piezoelectric Ta publication-title: J. Appl. Phys. contributor: fullname: Okada – volume: 83 start-page: 528 year: 2009 end-page: 530 ident: b0075 article-title: Ion conducting properties of hydrogen- containing Ta publication-title: Vacuum contributor: fullname: Itoh – volume: 178 start-page: 3308 year: 2005 end-page: 3314 ident: b0085 article-title: The crystal chemistry of L-Ta publication-title: J. Solid State Chem. contributor: fullname: Roth – volume: 184 start-page: 2023 year: 2011 end-page: 2032 ident: b0205 article-title: A very promising piezoelectric property of Ta publication-title: J. Solid State Chem. contributor: fullname: Lintanf-Salaün – volume: 100 start-page: 082017 year: 2008 ident: b0045 article-title: Proton conductive tantalum oxide thin film deposited by reactive dc magnetron sputtering for all-solid-state switchable mirror publication-title: J. Phys. Conf. Series. contributor: fullname: Yoshimura – volume: 200 start-page: 143 year: 2013 end-page: 149 ident: b0080 article-title: ( publication-title: J. Solid State Chem. contributor: fullname: Roussel – volume: 22 start-page: 817 year: 1985 end-page: 820 ident: b0140 article-title: Die Struktur von Na publication-title: Rev. Chim. Miner. contributor: fullname: Schaper – volume: 22 start-page: 31213127 year: 1983 ident: b0010 article-title: Refractive index and attenuation characteristics of SiO publication-title: Appl. Opt. contributor: fullname: Terui – volume: 22 start-page: 269322 year: 1998 ident: b0005 article-title: Tantalum pentoxide (Ta publication-title: Mater. Sci. Eng. R Rep. contributor: fullname: Balland – volume: 20 start-page: 5361 year: 2008 end-page: 5367 ident: b0030 article-title: Unravelling the interplay of crystal structure and electronic band structure of tantalum oxide (Ta publication-title: Chem. Mater. contributor: fullname: Kondo – volume: 10 start-page: 155 year: 2000 end-page: 161 ident: b0105 article-title: Pulsed injection MOCVD of functional electronic oxides publication-title: Adv. Mater. Opt. Electron. contributor: fullname: Abrutis – volume: 192 start-page: 385 year: 2012 end-page: 389 ident: b0175 article-title: Structural phase transitions in the Ag publication-title: J. Solid State Chem. contributor: fullname: Thomas – volume: 58 start-page: 54 year: 1806 end-page: 73 ident: b0200 article-title: Sur la décomposition de l’eau et des corps qu’elle tient en dissolution à l’aide de l’électricité galvanique publication-title: Ann. Chim. (Paris) contributor: fullname: de Grotthuss – volume: 68 start-page: 556 year: 1990 end-page: 559 ident: b0020 article-title: Material constants of new piezoelectric Ta publication-title: J. Appl. Phys. contributor: fullname: Okada – volume: vol. 156 start-page: 363 year: 2005 ident: b0185 article-title: Synthesis and catalytic application of tantalum and silica pillared porous materials from layered silicate ilerite publication-title: Studies in Surface Science and Catalysis contributor: fullname: Joo – volume: 22 start-page: 10 year: 2012 end-page: 14 ident: b0025 article-title: Study of photo-cathode materials for tandem photoelectrochemical cell for direct water splitting publication-title: Energy Proc. contributor: fullname: Conibeer – volume: 7 start-page: 567 year: 2005 end-page: 571 ident: b0055 article-title: Synthesis and characterization of NiOTa publication-title: Electrochem. Commu. contributor: fullname: Seong – volume: 13 start-page: 6 year: 2013 end-page: 18 ident: b0065 article-title: Proton and protonic species: the hidden face of solid state chemistry. How to measure H-content in materials? publication-title: Fuel Cells contributor: fullname: Colomban – volume: 183 start-page: 2068 year: 2010 end-page: 2076 ident: b0120 article-title: Salaün, Second order incommensurate phase transition in 25L-Ta publication-title: J. Solid State Chem. contributor: fullname: Lintanf – volume: 6 start-page: 21 year: 1967 end-page: 34 ident: b0125 article-title: Structure des oxides de tantale (in french) publication-title: Jap. J. Appl. Phys. contributor: fullname: Terao – volume: 108 start-page: 541 year: 1985 end-page: 549 ident: b0135 article-title: Locality: synthetic the crystal structure of synthetic natrotantite publication-title: Bulletin de Minéralogie contributor: fullname: Cerny – volume: 177 start-page: 3491 year: 2007 end-page: 3499 ident: b0100 article-title: ESD and ALD depositions of Ta publication-title: Solid State Ionics contributor: fullname: Djurado – volume: 7 start-page: 397 year: 1964 end-page: 410 ident: b0115 article-title: Lattice structure of publication-title: J. Less-Common Metals contributor: fullname: Lehovec – volume: 205 start-page: 3956 year: 2011 end-page: 3960 ident: b0050 article-title: Electrochromic switchable mirror foil with tantalum oxide thin film prepared by reactive dc magnetron sputtering in hydrogen-containing gas publication-title: Surface Coatings Technol. contributor: fullname: Yoshimura – volume: 21 start-page: 12096 year: 2011 end-page: 12102 ident: b0180 article-title: Structural characterisation of ferroelectric Ag publication-title: J. Mater. Chem. contributor: fullname: West – volume: 39 start-page: 369 year: 1985 end-page: 377 ident: b0195 article-title: Study of the thermal stability of the natural zeolite heulandite publication-title: Chem. Papers contributor: fullname: Rykl – volume: 62 start-page: 15 year: 1993 end-page: 20 ident: b0040 article-title: Ionic conductivity of tantalum oxide by rf sputtering publication-title: Solid State Ionics contributor: fullname: Niwa – volume: 40 start-page: 499 year: 1990 end-page: 501 ident: b0035 article-title: Properties of tantalum oxide thin film for solid electrolyte publication-title: Solid State Ionics contributor: fullname: Niwa – volume: 117 start-page: 13547 year: 2013 end-page: 13556 ident: b0190 article-title: Interaction of probe molecules with bridging hydroxyls of two-dimensional zeolites: A surface science approach publication-title: J. Phys. Chem. contributor: fullname: Freund – volume: 49 start-page: 10571 year: 2010 end-page: 10578 ident: b0210 article-title: Site-differentiated solid solution in ( publication-title: Inorg. Chem. contributor: fullname: Maggard – volume: 98 start-page: 132904 year: 2011 ident: b0170 article-title: Ferroelectricity in the xAg publication-title: Appl. Phys. Lett. contributor: fullname: Thomas – volume: 22 start-page: 817 year: 1985 ident: 10.1016/j.actamat.2015.04.041_b0140 article-title: Die Struktur von Na2Ta4O11 publication-title: Rev. Chim. Miner. contributor: fullname: Mattes – volume: 108 start-page: 541 year: 1985 ident: 10.1016/j.actamat.2015.04.041_b0135 article-title: Locality: synthetic the crystal structure of synthetic natrotantite publication-title: Bulletin de Minéralogie doi: 10.3406/bulmi.1985.7848 contributor: fullname: Ercit – volume: 68 start-page: 556 year: 1990 ident: 10.1016/j.actamat.2015.04.041_b0020 article-title: Material constants of new piezoelectric Ta2O5 thin films publication-title: J. Appl. Phys. doi: 10.1063/1.346828 contributor: fullname: Nakagawa – volume: 61 start-page: 5012 year: 1987 ident: 10.1016/j.actamat.2015.04.041_b0015 article-title: Deposition of new piezoelectric Ta2O5 thin films and their surface acoustic wave properties publication-title: J. Appl. Phys. doi: 10.1063/1.338321 contributor: fullname: Nakagawa – volume: 6 start-page: 21 year: 1967 ident: 10.1016/j.actamat.2015.04.041_b0125 article-title: Structure des oxides de tantale (in french) publication-title: Jap. J. Appl. Phys. doi: 10.1143/JJAP.6.21 contributor: fullname: Terao – volume: 13 start-page: 55 year: 2008 ident: 10.1016/j.actamat.2015.04.041_b0070 article-title: Effects of substrate cooling on the ionic conductivity of Ta2O5 solid-electrolyte thin films prepared by reactive sputtering using H2O gas publication-title: ECS Trans. doi: 10.1149/1.3050377 contributor: fullname: Abe – volume: 58 start-page: 54 year: 1806 ident: 10.1016/j.actamat.2015.04.041_b0200 article-title: Sur la décomposition de l’eau et des corps qu’elle tient en dissolution à l’aide de l’électricité galvanique publication-title: Ann. Chim. (Paris) contributor: fullname: de Grotthuss – volume: 98 start-page: 132904 year: 2011 ident: 10.1016/j.actamat.2015.04.041_b0170 article-title: Ferroelectricity in the xAg2Nb4O11 – (1-x)Na2Nb4O11 solid solution publication-title: Appl. Phys. Lett. doi: 10.1063/1.3573791 contributor: fullname: Woodward – volume: 183 start-page: 814 year: 2010 ident: 10.1016/j.actamat.2015.04.041_h0160 article-title: Syntheses, optical properties and electronic structures of copper(i) tantalates: Cu2Ta11 O30 and Cu3Ta7 O19 publication-title: J. Solid State Chem. doi: 10.1016/j.jssc.2010.01.030 contributor: fullname: Palasyuk – volume: 39 start-page: 369 year: 1985 ident: 10.1016/j.actamat.2015.04.041_b0195 article-title: Study of the thermal stability of the natural zeolite heulandite publication-title: Chem. Papers contributor: fullname: Pechar – volume: 274 start-page: 73 year: 2005 ident: 10.1016/j.actamat.2015.04.041_b0130 article-title: Crystallization improvement of Ta2O5 thin films by the addition of water vapor publication-title: J. Crystal Growth doi: 10.1016/j.jcrysgro.2004.10.004 contributor: fullname: Huang – volume: 184 start-page: 2023 year: 2011 ident: 10.1016/j.actamat.2015.04.041_h0150 article-title: A very promising piezoelectric property of Ta2O5 thin films. II: Birefringence and piezoelectricity publication-title: J. Solid State Chem. doi: 10.1016/j.jssc.2011.06.001 contributor: fullname: Audier – volume: 177 start-page: 3491 year: 2007 ident: 10.1016/j.actamat.2015.04.041_b0100 article-title: ESD and ALD depositions of Ta2O5 thin films investigated as barriers to copper diffusion for advanced metallization publication-title: Solid State Ionics doi: 10.1016/j.ssi.2006.10.019 contributor: fullname: Lintanf – volume: 20 start-page: 5361 year: 2008 ident: 10.1016/j.actamat.2015.04.041_b0030 article-title: Unravelling the interplay of crystal structure and electronic band structure of tantalum oxide (Ta2O5) publication-title: Chem. Mater. doi: 10.1021/cm703202n contributor: fullname: Noda – volume: 178 start-page: 3308 year: 2005 ident: 10.1016/j.actamat.2015.04.041_b0085 article-title: The crystal chemistry of L-Ta2O5 and related structures publication-title: J. Solid State Chem. doi: 10.1016/j.jssc.2005.08.011 contributor: fullname: Grey – volume: 192 start-page: 385 year: 2012 ident: 10.1016/j.actamat.2015.04.041_b0175 article-title: Structural phase transitions in the Ag2Nb4O11Na2Nb4O11 solid solution publication-title: J. Solid State Chem. doi: 10.1016/j.jssc.2012.04.014 contributor: fullname: Woodward – start-page: 138 year: 1992 ident: 10.1016/j.actamat.2015.04.041_b0060 contributor: fullname: Freund – volume: 117 start-page: 13547 year: 2013 ident: 10.1016/j.actamat.2015.04.041_b0190 article-title: Interaction of probe molecules with bridging hydroxyls of two-dimensional zeolites: A surface science approach publication-title: J. Phys. Chem. contributor: fullname: Boscoboinik – volume: 40 start-page: 499 issue: 41 year: 1990 ident: 10.1016/j.actamat.2015.04.041_b0035 article-title: Properties of tantalum oxide thin film for solid electrolyte publication-title: Solid State Ionics doi: 10.1016/0167-2738(90)90389-9 contributor: fullname: Saito – volume: 100 start-page: 082017 year: 2008 ident: 10.1016/j.actamat.2015.04.041_b0045 article-title: Proton conductive tantalum oxide thin film deposited by reactive dc magnetron sputtering for all-solid-state switchable mirror publication-title: J. Phys. Conf. Series. doi: 10.1088/1742-6596/100/8/082017 contributor: fullname: Tajima – volume: 183 start-page: 2068 year: 2010 ident: 10.1016/j.actamat.2015.04.041_b0120 article-title: Salaün, Second order incommensurate phase transition in 25L-Ta2O5 publication-title: J. Solid State Chem. doi: 10.1016/j.jssc.2010.07.001 contributor: fullname: Audier – ident: 10.1016/j.actamat.2015.04.041_b0110 – start-page: 167 year: 1970 ident: 10.1016/j.actamat.2015.04.041_b0095 contributor: fullname: Roth – volume: 49 start-page: 10571 year: 2010 ident: 10.1016/j.actamat.2015.04.041_h0155 article-title: Site-differentiated solid solution in (Na1-x Cux)2Ta4O11 and its electronic structure site-differentiated solid solution in (Na1-x Cux)2Ta4O11 and its electronic structure and optical properties publication-title: Inorg. Chem. doi: 10.1021/ic101529n contributor: fullname: Palasyuk – volume: 184 start-page: 2023 year: 2011 ident: 10.1016/j.actamat.2015.04.041_h0145 article-title: A very promising piezoelectric property of Ta2O5 thin films. I: monoclinic-trigonal phase transition publication-title: J. Solid State Chem. doi: 10.1016/j.jssc.2011.06.001 contributor: fullname: Audier – volume: 22 start-page: 31213127 year: 1983 ident: 10.1016/j.actamat.2015.04.041_b0010 article-title: Refractive index and attenuation characteristics of SiO2–Ta2O5 optical waveguide Film publication-title: Appl. Opt. doi: 10.1364/AO.22.003121 contributor: fullname: Kobayashi – volume: 191 start-page: 263 year: 2012 ident: 10.1016/j.actamat.2015.04.041_b0165 article-title: NaCu(Ta1-y Nby)4O11 solid solution: A tunable band gap spanning the visible-light wavelengths publication-title: J. Solid State Chem. doi: 10.1016/j.jssc.2012.03.023 contributor: fullname: Palasyuk – volume: vol. 156 start-page: 363 year: 2005 ident: 10.1016/j.actamat.2015.04.041_b0185 article-title: Synthesis and catalytic application of tantalum and silica pillared porous materials from layered silicate ilerite contributor: fullname: Kim – volume: 7 start-page: 397 year: 1964 ident: 10.1016/j.actamat.2015.04.041_b0115 article-title: Lattice structure of β-Ta2O5 publication-title: J. Less-Common Metals doi: 10.1016/0022-5088(64)90036-0 contributor: fullname: Lehovec – volume: 13 start-page: 6 year: 2013 ident: 10.1016/j.actamat.2015.04.041_b0065 article-title: Proton and protonic species: the hidden face of solid state chemistry. How to measure H-content in materials? publication-title: Fuel Cells doi: 10.1002/fuce.201200088 contributor: fullname: Colomban – volume: 22 start-page: 10 year: 2012 ident: 10.1016/j.actamat.2015.04.041_b0025 article-title: Study of photo-cathode materials for tandem photoelectrochemical cell for direct water splitting publication-title: Energy Proc. doi: 10.1016/j.egypro.2012.05.212 contributor: fullname: Zhang – volume: 21 start-page: 12096 year: 2011 ident: 10.1016/j.actamat.2015.04.041_b0180 article-title: Structural characterisation of ferroelectric Ag2Nb4O11 and dielectric Ag2Ta4O11 publication-title: J. Mater. Chem. doi: 10.1039/c0jm02540b contributor: fullname: Maso – volume: 83 start-page: 528 year: 2009 ident: 10.1016/j.actamat.2015.04.041_b0075 article-title: Ion conducting properties of hydrogen- containing Ta2O5 thin films prepared by reactive sputtering publication-title: Vacuum doi: 10.1016/j.vacuum.2008.04.018 contributor: fullname: Abe – volume: 62 start-page: 15 year: 1993 ident: 10.1016/j.actamat.2015.04.041_b0040 article-title: Ionic conductivity of tantalum oxide by rf sputtering publication-title: Solid State Ionics doi: 10.1016/0167-2738(93)90247-Z contributor: fullname: Duggan – volume: 10 start-page: 155 year: 2000 ident: 10.1016/j.actamat.2015.04.041_b0105 article-title: Pulsed injection MOCVD of functional electronic oxides publication-title: Adv. Mater. Opt. Electron. doi: 10.1002/1099-0712(200005/10)10:3/5<155::AID-AMO406>3.0.CO;2-2 contributor: fullname: Sénateur – volume: 200 start-page: 143 year: 2013 ident: 10.1016/j.actamat.2015.04.041_b0080 article-title: (NaxK1-x)2Ta4O11 piezoelectric phase from the transformation of Ta2O5 thin films of monoclinic structure publication-title: J. Solid State Chem. doi: 10.1016/j.jssc.2013.01.018 contributor: fullname: Le Gallic – volume: 22 start-page: 269322 year: 1998 ident: 10.1016/j.actamat.2015.04.041_b0005 article-title: Tantalum pentoxide (Ta2O5) thin films for advanced dielectric applications publication-title: Mater. Sci. Eng. R Rep. doi: 10.1016/S0927-796X(97)00023-5 contributor: fullname: Chaneliere – volume: 205 start-page: 3956 year: 2011 ident: 10.1016/j.actamat.2015.04.041_b0050 article-title: Electrochromic switchable mirror foil with tantalum oxide thin film prepared by reactive dc magnetron sputtering in hydrogen-containing gas publication-title: Surface Coatings Technol. doi: 10.1016/j.surfcoat.2011.02.035 contributor: fullname: Tajima – volume: 7 start-page: 567 year: 2005 ident: 10.1016/j.actamat.2015.04.041_b0055 article-title: Synthesis and characterization of NiOTa2O5 nanocomposite electrode for electrochromic devices publication-title: Electrochem. Commu. doi: 10.1016/j.elecom.2005.03.016 contributor: fullname: Ahn – volume: 51 start-page: 698 year: 1995 ident: 10.1016/j.actamat.2015.04.041_b0090 article-title: Structures of Ta22W4O67 and Ta74W6O203. I. refined structural models using synchrotron radiation publication-title: Acta Crystallogr. B doi: 10.1107/S0108768195000589 contributor: fullname: Schmid |
SSID | ssj0012740 |
Score | 2.2047071 |
Snippet | (a,b) HRTEM images of structural defects in mL-Ta2O5 monoclinic structures resulting of a crystallisation of amorphous thin films in O2–H2O atmosphere compared... Structural defects within Ta2O5 monoclinic structures were obtained by crystallisation at 850 degree C in atmosphere O2-H2O of amorphous thin films deposited... |
SourceID | hal proquest crossref elsevier |
SourceType | Open Access Repository Aggregation Database Publisher |
StartPage | 181 |
SubjectTerms | Amorphous structure Atmospheres Chemical Sciences Crystal defects Crystallization Defects Material chemistry Partial pressure Ta2O5 Tantalum oxides Thin films ToF-SIMS Transmission electron microscopy Vacancies X-ray diffraction |
Title | Particular structural defects in Ta2O5 from crystallisation of amorphous thin films in O2–H2O atmosphere |
URI | https://dx.doi.org/10.1016/j.actamat.2015.04.041 https://search.proquest.com/docview/1770317118 https://hal.science/hal-02012972 |
Volume | 94 |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV3LatwwFBVpumkXpU-apg1q6dYZPW15OYQG95UpNIHshGRLZIYZOyRuIZvSf-gf9kt6r2ynDyiFgje2JXw5kq6O8bnHhLxkLOiikCoz3rlMCRUzE3KeaS0aLRvumcN65_dHeXWi3pzq0y1yMNXCoKxyzP1DTk_ZerwyG9GcnS-Xs49c6hL9qIDSMNi0UgW7Totz_8u1zIPDW9dQKazLDFv_rOKZrSDk3gExRIWXTo6niv9tf7pxhkLJP_J12oQO75I7I3uk8yHAe2QrtPfJ7V88BR-Q1YcUPqpL6WAOi8YatAlJt0GXLT12YqEp1pXQ-uIK2OF6PWp6aBep23QAfffpkvZn0Dgu15vUayG-f_1WiQV1_aa7RDOC8JCcHL46Pqiy8YcKWS1k2WeOudzHYErfcOmlUTJXtWHeF5znTjgZBRAwwWoZYslh7_YyKialM6xkMXD5iGy3XRseEwo3Clc4rk1UKgRf5kY0rBQ1LnKtmx2yP8FozwffDDsJylZ2xN0i7pYpOPgOMRPY9rcJYCG3_6vrCxic68egYXY1f2fxGpBhIDSF-AyNnk9jZ2EF4WcR1wZA0_ICPfwBAvPk_2PYJbfwbJAGPiXbML7hGdCV3u-l-bhHbs5fv62OfgAxUumb |
link.rule.ids | 230,315,783,787,888,4511,24130,27938,27939,45599,45693 |
linkProvider | Elsevier |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1La9wwEBZpemh7KH3SpC-19OqsnrZ8DKHBbTfZQjeQm5Bsieyya4fECeQS-h_6D_tLOuNH-oBSKPikBx5G0swn_M1nQt4xFnSWSZUY71yihIqJCSlPtBaVlhX3zGG988FhWhypj8f6eIPsjbUwSKscYn8f07toPbRMBm9OTheLyRcudY56VABpGCQtuALdVqifBZt65_qG58Hh2tWXCus8weE_y3gmS7C5dYAMkeKlO8lTxf-WoG6dIFPyj4DdZaH9B-T-AB_pbm_hQ7IR6kfk3i-igo_J8nNnP9JLaa8Oi8oatAodcYMuajp3YqYpFpbQ8uwK4OFqNZB6aBOpWzfg--binLYnMDguVutu1kx8__qtEDPq2nVzjmoE4Qk52n8_3yuS4Y8KSSlk3iaOudTHYHJfcemlUTJVpWHeZ5ynTjgZBSAwwUoZYs4heXsZFZPSGZazGLh8Sjbrpg7PCIWOzGWOaxOVCsHnqREVy0WJp1zraovsjG60p71whh0ZZUs7-N2i3y1T8PAtYkZn2992gIXg_q-pb2Fxbl6DitnF7tRiG6BhQDSZuIRBb8a1s3CE8LuIqwN40_IMRfzBBWb7_214Te4U84OpnX44_PSc3MWenif4gmzCWoeXgF1a_6rbmz8AyaXrPQ |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Particular+structural+defects+in+Ta2O5+from+crystallisation+of+amorphous+thin+films+in+O2-H2O+atmosphere&rft.jtitle=Acta+materialia&rft.au=Le+Gallic%2C+Marie&rft.au=Roussel%2C+Herve&rft.au=Rapenne%2C+Laetitia&rft.au=Audier%2C+Marc&rft.date=2015-08-01&rft.issn=1359-6454&rft.volume=94&rft.spage=181&rft.epage=192&rft_id=info:doi/10.1016%2Fj.actamat.2015.04.041&rft.externalDBID=NO_FULL_TEXT |
thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1359-6454&client=summon |
thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1359-6454&client=summon |
thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1359-6454&client=summon |