Design and experimental validation of a novel compliant micro-positioning stage with nonlinear stiffness

• Published in: Precision engineering Vol. 96; pp. 745 - 756
• Main Authors: Wang, Wei, Zheng, Jinchuan, Man, Zhihong, Wang, Hai, Chen, Xiaoqi, Chen, Yuan
• Format: Journal Article
• Language: English
• Published: Elsevier Inc 01.10.2025
• Subjects: Compliant mechanism; Micro-positioning stage; Nonlinear mechanism; Variable stiffness; Compliant mechanism; Variable stiffness; Nonlinear mechanism; Micro-positioning stage

This article presents a novel design of a piezoelectric actuated stage with variable nonlinear stiffness to achieve active suppression of residual vibrations in response to a step input command. In the stage design, a nonlinear stiffness mechanism with four leaf-shaped compliant legs is proposed, wh...