Atmospheric adsorption effects in hot-wire chemical-vapor-deposition microcrystalline silicon films with different electrode configurations

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Bibliographic Details
Published in	Semiconductors (Woodbury, N.Y.) Vol. 39; no. 3; pp. 343 - 346
Main Authors	Persheyev, S. K., Smirnov, V., O’Neill, K. A., Reynolds, S., Rose, M. J.
Format	Journal Article
Language	English
Published	01.03.2005
Online Access	Get full text

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ISSN:	1063-7826 1090-6479
DOI:	10.1134/1.1882798