High Performance Micro-Crystalline Silicon TFT Using Indirect Thermal Crystallization Technique

• Published in: ECS transactions Vol. 33; no. 5; pp. 213 - 216
• Main Authors: Choi, Byung Gook, Kim, Ki-Tae, Bae, Jun Hyeon, Lee, Sul, Lee, Hong Koo, Kim, Sung Ki, Park, Kwon-Shik, Kim, Chang-Dong, Hwang, Yong Kee, Chung, In-Jae
• Format: Journal Article
• Language: English
• Published: 01.01.2010

High performance n-channel micro-crystalline silicon (μc-Si) TFT was fabricated by 5 mask process. Indirect thermal crystallization (ITC) method was applied to crystallize amorphous silicon (a-Si) thin films. ITC technique adopted infrared laser with 808 nm wavelength and heat transition layer of Mo...