Influence on the sp3/sp2 character of the carbon on the insertion of nitrogen in RFMS carbon nitride films
RFMS carbon nitride films have been elaborated at several substrate temperatures between 150 °C and 450 °C, where they evolve from a highly resistive to highly conductive comportment. Their local structure has been determined from X-ray photoemission, Raman and infrared spectroscopic results. The fi...
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| Published in | Diamond and related materials Vol. 17; no. 4-5; pp. 700 - 704 |
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| Main Authors | , , , , |
| Format | Conference Proceeding Journal Article |
| Language | English |
| Published |
Amsterdam
Elsevier
01.04.2008
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| Abstract | RFMS carbon nitride films have been elaborated at several substrate temperatures between 150 °C and 450 °C, where they evolve from a highly resistive to highly conductive comportment. Their local structure has been determined from X-ray photoemission, Raman and infrared spectroscopic results. The films composition has been measured by nuclear reaction analysis and elastic recoil detection. We will correlate the strong modifications of the electronic properties of the films to their well characterized structural changes. We will show how the substrate temperature acts on the incorporation of nitrogen in carboneous RFMS films and which is the resulting consequence on the sp3/sp2 character of the carbon network. |
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| AbstractList | RFMS carbon nitride films have been elaborated at several substrate temperatures between 150 °C and 450 °C, where they evolve from a highly resistive to highly conductive comportment. Their local structure has been determined from X-ray photoemission, Raman and infrared spectroscopic results. The films composition has been measured by nuclear reaction analysis and elastic recoil detection. We will correlate the strong modifications of the electronic properties of the films to their well characterized structural changes. We will show how the substrate temperature acts on the incorporation of nitrogen in carboneous RFMS films and which is the resulting consequence on the sp3/sp2 character of the carbon network. |
| Author | BOUCHET-FABRE, B GODET, C LAZAR, G ZELLAMA, K BALLUTAUD, D |
| Author_xml | – sequence: 1 givenname: B surname: BOUCHET-FABRE fullname: BOUCHET-FABRE, B organization: Laboratoire Francis Perrin, CEA-saclay, DSM/DRECAM/SPAM-CNRS URA 2453, 91191 Gif sur Yvette, France – sequence: 2 givenname: G surname: LAZAR fullname: LAZAR, G organization: Laboratoire Francis Perrin, CEA-saclay, DSM/DRECAM/SPAM-CNRS URA 2453, 91191 Gif sur Yvette, France – sequence: 3 givenname: D surname: BALLUTAUD fullname: BALLUTAUD, D organization: GEMaC-UMR 8635, CNRS, 1 place Aristide Briand, 92195 Meudon, France – sequence: 4 givenname: C surname: GODET fullname: GODET, C organization: Laboratoire de Physique des Atomes, Lasers, Molécules, Surfaces, CNRS-UMR 6627, Université de Rennes 1, 35000 Rennes, France – sequence: 5 givenname: K surname: ZELLAMA fullname: ZELLAMA, K organization: Laboratoire de Physique de la Matière Condensée, Université de Picardie-Jules Verne, Faculté des Sciences, 33 rue Saint-Leu, 80039 Amiens, France |
| BackLink | http://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=20398735$$DView record in Pascal Francis https://hal.science/hal-00290145$$DView record in HAL |
| BookMark | eNo9kE1LAzEQhoNUsK3-BGEvHjzsdpI0u8mxFGsLFcGPc8imE5uyzZakCv57d231FHjzPMPMOyKD0AYk5JZCQYGWk12x8Wbfhk3BAKqCsgI4vSBDKiuVA5RsQIagmMhVycUVGaW0A6BMTemQ7FbBNZ8YLGZtyI5bzNKBT9KBZXZrorFHjFnrfj-siXXHnDEfEsaj7wOXBX-M7QeGLs1eFk-vf2yf-w1mzjf7dE0unWkS3pzfMXlfPLzNl_n6-XE1n61zy5gUOZbolJwCOtGd4VBaNWXS4kYxzhmvUUkQEiyrawRZc8UqV1qoZI1OVoLyMbk_zd2aRh-i35v4rVvj9XK21n0GwBTQqfjqWXFibWxTiuj-BQq6L1fv9Llc3ZerKdPdVp13d_IOJlnTuGiC9elfZsCVrLjgP2vjfX8 |
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| ContentType | Conference Proceeding Journal Article |
| Copyright | 2008 INIST-CNRS Distributed under a Creative Commons Attribution 4.0 International License |
| Copyright_xml | – notice: 2008 INIST-CNRS – notice: Distributed under a Creative Commons Attribution 4.0 International License |
| DBID | IQODW AAYXX CITATION 1XC |
| DOI | 10.1016/j.diamond.2007.12.031 |
| DatabaseName | Pascal-Francis CrossRef Hyper Article en Ligne (HAL) |
| DatabaseTitle | CrossRef |
| DatabaseTitleList | |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering Chemistry Geology Physics |
| EISSN | 1879-0062 |
| EndPage | 704 |
| ExternalDocumentID | oai_HAL_hal_00290145v1 10_1016_j_diamond_2007_12_031 20398735 |
| GroupedDBID | --K --M .~1 0R~ 123 1B1 1~. 1~5 29G 4.4 457 4G. 5VS 7-5 71M 8P~ 9JN AABNK AABXZ AACTN AAEDT AAEDW AAEPC AAIAV AAIKJ AAKOC AALRI AAOAW AAPBV AAQFI AAQXK AAXUO ABFNM ABFRF ABMAC ABPIF ABPTK ABXDB ABXRA ABYKQ ACDAQ ACGFO ACGFS ACIWK ACNNM ACRLP ADBBV ADEZE ADMUD ADTZH AEBSH AECPX AEFWE AEKER AENEX AEZYN AFKWA AFTJW AGHFR AGUBO AGYEJ AHHHB AHJVU AIEXJ AIKHN AITUG AIVDX AJBFU AJOXV ALMA_UNASSIGNED_HOLDINGS AMFUW AMRAJ ASPBG AVWKF AXJTR AZFZN BJAXD BKOJK BLXMC CS3 DU5 EBS EFJIC EJD EO8 EO9 EP2 EP3 F5P FDB FEDTE FGOYB FIRID FNPLU FYGXN G-2 G-Q GBLVA HZ~ IHE IQODW J1W JJJVA KOM M24 M41 MAGPM MO0 N9A O-L O9- OAUVE OGIMB OZT P-8 P-9 P2P PC. Q38 R2- RIG RNS ROL RPZ SDF SDG SDP SES SEW SMS SPC SPCBC SPD SSM SST SSZ T5K WUQ XFK XPP ZMT ~02 ~G- AAXKI AAYXX ABJNI AFJKZ AFRZQ AKRWK CITATION HVGLF 1XC |
| ID | FETCH-LOGICAL-c2285-e6ef9840ef5031fe8c9428ced923323be980580c2bbe08b3927f6c078bef87513 |
| ISSN | 0925-9635 |
| IngestDate | Fri Sep 06 13:54:40 EDT 2024 Thu Sep 26 17:35:09 EDT 2024 Sun Oct 22 16:09:38 EDT 2023 |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 4-5 |
| Keywords | Electronic properties Fourier transform spectroscopy Phase composition Raman spectroscopy Carbon Carbon nitride Thin films Local structure Electronic structure FTIR Physical vapor deposition Crystal-phase transformations Carbon nitrides Raman XPS Elastic analysis X-ray photoelectron spectra Crystal structure |
| Language | English |
| License | CC BY 4.0 Distributed under a Creative Commons Attribution 4.0 International License: http://creativecommons.org/licenses/by/4.0 |
| LinkModel | OpenURL |
| MeetingName | NDNC 2007. Proceedings of the International Conference on New Diamond and Nano Carbons 2007 |
| MergedId | FETCHMERGED-LOGICAL-c2285-e6ef9840ef5031fe8c9428ced923323be980580c2bbe08b3927f6c078bef87513 |
| PageCount | 5 |
| ParticipantIDs | hal_primary_oai_HAL_hal_00290145v1 crossref_primary_10_1016_j_diamond_2007_12_031 pascalfrancis_primary_20398735 |
| PublicationCentury | 2000 |
| PublicationDate | 2008-04 |
| PublicationDateYYYYMMDD | 2008-04-01 |
| PublicationDate_xml | – month: 04 year: 2008 text: 2008-04 |
| PublicationDecade | 2000 |
| PublicationPlace | Amsterdam |
| PublicationPlace_xml | – name: Amsterdam |
| PublicationTitle | Diamond and related materials |
| PublicationYear | 2008 |
| Publisher | Elsevier |
| Publisher_xml | – name: Elsevier |
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| SSID | ssj0012941 |
| Score | 1.874194 |
| Snippet | RFMS carbon nitride films have been elaborated at several substrate temperatures between 150 °C and 450 °C, where they evolve from a highly resistive to highly... |
| SourceID | hal crossref pascalfrancis |
| SourceType | Open Access Repository Aggregation Database Index Database |
| StartPage | 700 |
| SubjectTerms | Catalysis Chemical Sciences Composition and phase identification Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science; rheology Deposition by sputtering Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Exact sciences and technology Fullerenes and related materials; diamonds, graphite Materials science Methods of deposition of films and coatings; film growth and epitaxy Physics Specific materials Surface and interface electron states Surface states, band structure, electron density of states Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology |
| Title | Influence on the sp3/sp2 character of the carbon on the insertion of nitrogen in RFMS carbon nitride films |
| URI | https://hal.science/hal-00290145 |
| Volume | 17 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV3db9MwELe6TRMgHqBsYnxMEeINZUudOHYes36ssI6h0oqJlyhOHdFKtFXb8cBfw5_KXRw7KauE4KWqLqcmzf3sO98nIW-ZDGgu5ARWmspd2PBCNwLowJmHp36YMslTrHe-_hj2x8GHW3bbaPyqZS3dbeRZ9nNnXcn_SBVoIFeskv0HydofBQJ8B_nCJ0gYPu_LeKeq6UxxWtBEZ4ljXhvYj2CD6pvX4fDeDCMpowPv1suiv9OSYu2v7tls8gWydCXRjNSM0zkG7Eu7EjaA1QKeB90kw971Z8OL9OlEYZun75Xj_Wbc7ndHbi--GBZJl9WE5_hrXGRg2MleF_FgMB7F485WFvLlTac7qny5xjshakkthcus1O91vyNlLqx6HcpWetcVPHKxmnNrW-Y1-AUuq-2y3PNqCpvr-cX3dIF2S8zOJloSul0lun5LtbPVe_sPnWgzFannR4L7bI8cUD9isG8exFfDL1c2UkWjYjqq_VtVldj5zltv2T973zD79vEyXcOCzPUklZp5M3pCjqrCT-eTxdlT0lDzJnnQNkMBm-RRrX9lkxxeFnOhgX5YZBJn62dkZpHmLOYOAMgBpJ0DzhyLM2eRFxc0dgybxRleNjgDqoM4M7wlzpwCZ0dk3OuO2n23HOjhZpQK5qpQ5ZEIPJUzeBO5ElkEp99MTeCU4VNfqkh4THgZlVJ5QoLpzvMwAyNWqhzO1S3_mOzPF3P1nDgqykFXM-FzXwYc7FSVChy51QrDNA0oPyFn5jUnS923JTEJjbOklAvOYOVJiybwNCfkDQjD8mLX9X48SJCGkWuMvv8AptMtWVl2A5MXf2N4SR5Wy-QV2d-s7tRrMGs38rRE1m9PYp5G |
| link.rule.ids | 230,310,311,315,786,790,795,796,891,23958,23959,25170,27955,27956 |
| linkProvider | Library Specific Holdings |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=proceeding&rft.title=Diamond+and+related+materials&rft.atitle=Influence+on+the+sp3%2Fsp2+character+of+the+carbon+on+the+insertion+of+nitrogen+in+RFMS+carbon+nitride+films&rft.au=BOUCHET-FABRE%2C+B&rft.au=LAZAR%2C+G&rft.au=BALLUTAUD%2C+D&rft.au=GODET%2C+C&rft.date=2008-04-01&rft.pub=Elsevier&rft.issn=0925-9635&rft.eissn=1879-0062&rft.volume=17&rft.issue=4-5&rft.spage=700&rft.epage=704&rft_id=info:doi/10.1016%2Fj.diamond.2007.12.031&rft.externalDBID=n%2Fa&rft.externalDocID=20398735 |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0925-9635&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0925-9635&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0925-9635&client=summon |