Influence on the sp3/sp2 character of the carbon on the insertion of nitrogen in RFMS carbon nitride films

• Published in: Diamond and related materials Vol. 17; no. 4-5; pp. 700 - 704
• Main Authors: BOUCHET-FABRE, B, LAZAR, G, BALLUTAUD, D, GODET, C, ZELLAMA, K
• Format: Conference Proceeding Journal Article
• Language: English
• Published: Amsterdam Elsevier 01.04.2008
• Subjects: Catalysis; Chemical Sciences; Composition and phase identification; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Deposition by sputtering; Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures; Exact sciences and technology; Fullerenes and related materials; diamonds, graphite; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Physics; Specific materials; Surface and interface electron states; Surface states, band structure, electron density of states; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film structure and morphology; Electronic properties; Fourier transform spectroscopy; Phase composition; Raman spectroscopy; Carbon; Carbon nitride; Thin films; Local structure; Electronic structure; FTIR; Physical vapor deposition; Crystal-phase transformations; Carbon nitrides; Raman; XPS; Elastic analysis; X-ray photoelectron spectra; Crystal structure
• ISSN: 0925-9635; 1879-0062
• DOI: 10.1016/j.diamond.2007.12.031

RFMS carbon nitride films have been elaborated at several substrate temperatures between 150 °C and 450 °C, where they evolve from a highly resistive to highly conductive comportment. Their local structure has been determined from X-ray photoemission, Raman and infrared spectroscopic results. The films composition has been measured by nuclear reaction analysis and elastic recoil detection. We will correlate the strong modifications of the electronic properties of the films to their well characterized structural changes. We will show how the substrate temperature acts on the incorporation of nitrogen in carboneous RFMS films and which is the resulting consequence on the sp3/sp2 character of the carbon network.