Optical Interferometer Microscope for Monitoring and Control of Focused Ion Beam Processes

• Published in: Microscopy and microanalysis Vol. 12; no. S02; pp. 1280 - 1281
• Main Authors: Adams, DP, Sinclair, MB, Mayer, TM, Vasile, MJ, Sweatt, WC
• Format: Journal Article
• Language: English
• Published: New York, USA Cambridge University Press 01.08.2006; Oxford University Press
• Subjects: FIB and FIB/SEM: Applications and techniques for Physical and Biological Sciences

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006