Optical Interferometer Microscope for Monitoring and Control of Focused Ion Beam Processes

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

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Bibliographic Details
Published in	Microscopy and microanalysis Vol. 12; no. S02; pp. 1280 - 1281
Main Authors	Adams, DP, Sinclair, MB, Mayer, TM, Vasile, MJ, Sweatt, WC
Format	Journal Article
Language	English
Published	New York, USA Cambridge University Press 01.08.2006 Oxford University Press
Subjects	FIB and FIB/SEM: Applications and techniques for Physical and Biological Sciences
Online Access	Get full text

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Summary:	Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006
ISSN:	1431-9276 1435-8115
DOI:	10.1017/S1431927606065597