Thin Teflon-like films for eliminating adhesion in released polysilicon microstructures

• Published in: Sensors and actuators. A. Physical. Vol. 70; no. 1; pp. 159 - 163
• Main Authors: Smith, Bradley K., Sniegowski, Jeffry J., LaVigne, Glenn, Brown, Craig
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.10.1998
• Subjects: Adhesion; Fluorocarbon; Microelectromechanical systems (MEMS); Microstructures; Polysilicon; Stiction; Polysilicon; Microelectromechanical systems (MEMS); Microstructures; Fluorocarbon; Stiction; Adhesion

This paper presents a method for depositing thin Teflon-like films to eliminate adhesion or suction in released polysilicon microstructures. A commercial plasma reactor is used in direct and remote plasma modes with commercially available trifluoromethane (CHF 3) to deposit thin hydrophobic films ar...