Thin Teflon-like films for eliminating adhesion in released polysilicon microstructures - Smith, Bradley K.; Sniegowski, Jeffry J.; LaVigne, Glenn; Brown, Craig (Sensors and actuators. A. Physical., 1998)
Keywords: Adhesion; Fluorocarbon; Microelectromechanical systems (MEMS); Microstructures; Polysilicon; Stiction; Polysilicon; Microelectromechanical systems (MEMS); Microstructures; Fluorocarbon; Stiction; Adhesion