Phased Array Based on AlScN Piezoelectric Micromachined Ultrasound Transducers Monolithically Integrated on CMOS

• Published in: IEEE electron device letters Vol. 43; no. 7; pp. 1113 - 1116
• Main Authors: Zamora, I., Ledesma, E., Uranga, A., Barniol, N.
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.07.2022; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Acoustic beams; Acoustic transducers; Acoustics; Analog circuits; Beam steering; CMOS; Delays; Directivity; Imaging; Micromachining; Phased arrays; piezoelectric micromachined ultrasonic transducers (PMUT); Piezoelectricity; PMUT-on-CMOS; Signal to noise ratio; Transducers; Ultrasonic imaging; ultrasound imaging

In this work we present an array of piezoelectric micromachined ultrasound transducer (PMUT's) based on AlScN piezoelectric layer, monolithically integrated on top of a 130 nm CMOS circuit. The <inline-formula> <tex-math notation="LaTeX">{7}\times {7} </tex-math><...