Scheduling Single-Arm Cluster Tools With an Equipment Front-End Module Subject to Wafer Residency Time Constraints - Huang, BaoYing; Wu, NaiQi; Qiao, Yan; Guo, WeiWen (IEEE transactions on automation science and engineering, 2025)
Keywords: cluster tools; Clustering algorithms; Job shop scheduling; Loading; Optimal scheduling; Petri nets; Robot kinematics; Schedules; scheduling; Semiconductor manufacturing; Time factors; Transportation