Collaborative Scheduling for Single-Arm Cluster Tools With an Equipment Front-End Module Subject to Chamber Cleaning Requirements - Huang, BaoYing; Song, TaiRan; Wu, NaiQi; Qiao, Yan (IEEE transactions on systems, man, and cybernetics. Systems, 2024)
Keywords: Cluster tool; Clustering algorithms; Collaboration; equipment front-end module (EFEM); Job shop scheduling; Optimal scheduling; Robot kinematics; scheduling; semiconductor manufacturing; Task analysis