Future Mass from Miniaturized Mass Spectrometry to Micro Mass Spectrometry

• Published in: Journal of the Mass Spectrometry Society of Japan Vol. 51; no. 1; pp. 54 - 66
• Main Authors: NOHMI, Takashi, MIYAGISHI, Tetsuya
• Format: Journal Article
• Language: English
• Published: Tokyo The Mass Spectrometry Society of Japan 2003; Japan Science and Technology Agency
• Subjects: Mass spectrometry; Micro; Mini; Miniature; Silicon technology

The recent development of the silicon technology effects the stream of the miniaturized mass spectrometry and its system. Trend of oil less also accelerated at the same time. Old oil pump and oil diffusion pump turned to dry pump and turbo molecular pump for example. In the program of Mars explorati...