Structural characterization and optical properties of UO2 thin films by magnetron sputtering
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Published in | Applied surface science Vol. 256; no. 10; pp. 3047 - 3050 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
Amsterdam
Elsevier
01.03.2010
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Author | Lai, Xinchun Chu, Mingfu Bai, Bin Chen, Qiuyun |
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Author_xml | – sequence: 1 givenname: Qiuyun surname: Chen fullname: Chen, Qiuyun – sequence: 2 givenname: Xinchun surname: Lai fullname: Lai, Xinchun – sequence: 3 givenname: Bin surname: Bai fullname: Bai, Bin – sequence: 4 givenname: Mingfu surname: Chu fullname: Chu, Mingfu |
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Keywords | Atomic force microscopy AFM XRD Film growth Ellipsometry Thin films Magnetrons Cathode sputtering Actinides Uranium XPS Uranium dioxide X-ray photoelectron spectra |
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Title | Structural characterization and optical properties of UO2 thin films by magnetron sputtering |
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