APA (7th ed.) Citation

Riyanto, E., Rijanto, E., & Prawara, B. (2012). A Review of Atomic Layer Deposition for Nanoscale Devices. Journal of mechatronics, electrical power & vehicular technology, 3(2), 65-72. https://doi.org/10.14203/j.mev.2012.v3.65-72

Chicago Style (17th ed.) Citation

Riyanto, Edy, Estiko Rijanto, and Budi Prawara. "A Review of Atomic Layer Deposition for Nanoscale Devices." Journal of Mechatronics, Electrical Power & Vehicular Technology 3, no. 2 (2012): 65-72. https://doi.org/10.14203/j.mev.2012.v3.65-72.

MLA (9th ed.) Citation

Riyanto, Edy, et al. "A Review of Atomic Layer Deposition for Nanoscale Devices." Journal of Mechatronics, Electrical Power & Vehicular Technology, vol. 3, no. 2, 2012, pp. 65-72, https://doi.org/10.14203/j.mev.2012.v3.65-72.