Investigation of Mechanical Stability during Electro-thermal Annealing in a 3D NAND Flash Memory String
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| Published in | Journal of semiconductor technology and science Vol. 22; no. 3; pp. 139 - 145 |
|---|---|
| Main Authors | , |
| Format | Journal Article |
| Language | English |
| Published |
대한전자공학회
30.06.2022
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| Subjects | |
| Online Access | Get full text |
| ISSN | 1598-1657 2233-4866 |
| DOI | 10.5573/JSTS.2022.22.3.139 |
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| Author | Jun-Young Park Yu-Jin Kim |
|---|---|
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| Issue | 3 |
| Keywords | Joule heat mechanical stress degradation Electro-thermal annealing 3D NAND flash memory reliability |
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| StartPage | 139 |
| Title | Investigation of Mechanical Stability during Electro-thermal Annealing in a 3D NAND Flash Memory String |
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