A Surface Encoder Based on Wave Optics
A surface encoder, which is composed of a 2D angle grid and a 2D slope sensor, is analyzed in wave optics. Based on the wave optics model, behavior of optical diffraction pattern on the photo-detector caused by 5-degree-of-freedom motions of the angle grid, which are the X- (Y-) movement, tilt motio...
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| Published in | Journal of the Japan Society for Precision Engineering, Contributed Papers Vol. 71; no. 8; pp. 1051 - 1055 |
|---|---|
| Main Authors | , , , |
| Format | Journal Article |
| Language | English |
| Published |
Tokyo
The Japan Society for Precision Engineering
2005
Japan Science and Technology Agency |
| Subjects | |
| Online Access | Get full text |
| ISSN | 1348-8724 1881-8722 |
| DOI | 10.2493/jspe.71.1051 |
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| Abstract | A surface encoder, which is composed of a 2D angle grid and a 2D slope sensor, is analyzed in wave optics. Based on the wave optics model, behavior of optical diffraction pattern on the photo-detector caused by 5-degree-of-freedom motions of the angle grid, which are the X- (Y-) movement, tilt motion about the X- (Y-) axis and rotation about the Z-axis, are investigated. The diffraction pattern on the photo-detector show different behavior in each of the motions. In addition, a new 5 degree-of-freedom measurement method is proposed based on the analysis results. This method uses a multi-cell photodiode instead of the QPD in the slope sensor. The principle of the new surface encoder and the design of the multi-cell photodiode are described. Simulation results based on the wave optics model are also presented. |
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| AbstractList | A surface encoder, which is composed of a 2D angle grid and a 2D slope sensor, is analyzed in wave optics. Based on the wave optics model, behavior of optical diffraction pattern on the photo-detector caused by 5-degree-of-freedom motions of the angle grid, which are the X- (Y-) movement, tilt motion about the X- (Y-) axis and rotation about the Z-axis, are investigated. The diffraction pattern on the photo-detector show different behavior in each of the motions. In addition, a new 5 degree-of-freedom measurement method is proposed based on the analysis results. This method uses a multi-cell photodiode instead of the QPD in the slope sensor. The principle of the new surface encoder and the design of the multi-cell photodiode are described. Simulation results based on the wave optics model are also presented. |
| Author | WATANABE, Yoji GAO, Wei KIYONO, Satoshi SHIMIZU, Hiroki |
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| Cites_doi | 10.1016/j.precisioneng.2003.12.003 10.1016/0141-6359(82)90106-4 10.1016/S0007-8506(07)62950-3 10.1016/S0007-8506(07)60731-8 10.1016/S0141-6359(98)00009-9 10.1016/S0007-8506(07)60619-2 10.2493/jjspe.67.188 10.1016/S0007-8506(07)62538-4 10.4028/www.scientific.net/KEM.257-258.219 10.1299/jsmec.42.44 10.1016/S0141-6359(03)00028-X |
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| References | 11) Y. Watanabe, W. Gao, H. Shimizu and S. Kiyono : Analysis of a Surface Encoder in Wave Optics, Key Engineering Materials, 257-258, (2004) 219. 5) W. Gao, S. Dejima, H. Yanai, K. Katakura, S. Kiyono and Y. Tomita : A surface motor-driven planar motion stage integrated with an XYθZ surface encoder for precision positioning, Precision Engineering, 28, (2004) 329. 6) 冨田良幸 : サーフェスモータ, 精密工学会誌, 67, 2 (2001) 188. 12) W. Gao, T. Araki, S. Kiyono, Y. Okazaki, M. Yamanaka : Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder, Precision Engineering, 27, (2003) 289. 13) W. Gao, T. Ohnuma, H. Satoh, H. Shimizu and S. Kiyono : A Precision Angle Sensor Using a Multi-cell Photodiode Array, Annals of the CIRP, 53, 1 (2004) 425. 9) 吉田庄一郎 : オートコリメータとその応用, 精密機械, 44, 5 (1978) 7. 8) W.J. Kim and D.L. Trumper : High-precision magnetic levitation stage for photolithography, Precision Engineering, 22, 2 (1998) 66. 2) S. Kiyono, P. Cai and W. Gao : An angle-based position detection method for precision machines, JSME international journal. Series C, 42, 1 (1999) 44. 4) W. Gao, S. Dejima, Y. Shimizu and S. Kiyono : Precision measurement of two-axis positions and tilt motions using a surface encoder, Annals of the CIRP, 52, 1 (2003) 435. 10) A.E. Ennos and M.S. Vidree : High accuracy profile measurement of quasi-conical mirror surfaces by laser autocollimation, Precision Engineering, 4, 1 (1982) 5. 3) 高偉, 星野唯, 清水裕樹, 清野慧 : マルチスポット光源を用いたサーフェスエンコーダの研究, 精密工学会誌, 68, 1 (2002) 69. 7) E. Shamoto, H. Murase, T. Moriwaki : Ultraprecision 6-axis Table Driven by Means of Walking Drive, Annals of the CIRP, 49, 1 (2000) 299. 1) H. Kunzmann, T. Pfeifer, J. Flügge : Scales vs. Laser Interferometers Performance and Comparison of Two Measuring Systems, Annals of the CIRP, 42, 2 (1993) 753. Y. Watanabe, W. Gao, H. Shimizu and S. Kiyono (11) 2004; 257-258 12 高偉, 星野唯, 清水裕樹, 清野慧 (3) 2002; 68 E. Shamoto, H. Murase, T. Moriwaki (7) 2000; 49 TOMITA YOSHIYUKI (6) 2001; 67 KIYONO S (2) 1999; 42 H. Kunzmann, T. Pfeifer, J. Flügge (1) 1993; 42 吉田庄一郎 (9) 1978; 44 5 8 W. Gao, S. Dejima, Y. Shimizu and S. Kiyono (4) 2003; 52 10 W. Gao, T. Ohnuma, H. Satoh, H. Shimizu and S. Kiyono (13) 2004; 53 |
| References_xml | – reference: 9) 吉田庄一郎 : オートコリメータとその応用, 精密機械, 44, 5 (1978) 7. – reference: 8) W.J. Kim and D.L. Trumper : High-precision magnetic levitation stage for photolithography, Precision Engineering, 22, 2 (1998) 66. – reference: 4) W. Gao, S. Dejima, Y. Shimizu and S. Kiyono : Precision measurement of two-axis positions and tilt motions using a surface encoder, Annals of the CIRP, 52, 1 (2003) 435. – reference: 11) Y. Watanabe, W. Gao, H. Shimizu and S. Kiyono : Analysis of a Surface Encoder in Wave Optics, Key Engineering Materials, 257-258, (2004) 219. – reference: 13) W. Gao, T. Ohnuma, H. Satoh, H. Shimizu and S. Kiyono : A Precision Angle Sensor Using a Multi-cell Photodiode Array, Annals of the CIRP, 53, 1 (2004) 425. – reference: 3) 高偉, 星野唯, 清水裕樹, 清野慧 : マルチスポット光源を用いたサーフェスエンコーダの研究, 精密工学会誌, 68, 1 (2002) 69. – reference: 5) W. Gao, S. Dejima, H. Yanai, K. Katakura, S. Kiyono and Y. Tomita : A surface motor-driven planar motion stage integrated with an XYθZ surface encoder for precision positioning, Precision Engineering, 28, (2004) 329. – reference: 6) 冨田良幸 : サーフェスモータ, 精密工学会誌, 67, 2 (2001) 188. – reference: 2) S. Kiyono, P. Cai and W. Gao : An angle-based position detection method for precision machines, JSME international journal. Series C, 42, 1 (1999) 44. – reference: 1) H. Kunzmann, T. Pfeifer, J. Flügge : Scales vs. Laser Interferometers Performance and Comparison of Two Measuring Systems, Annals of the CIRP, 42, 2 (1993) 753. – reference: 7) E. Shamoto, H. Murase, T. Moriwaki : Ultraprecision 6-axis Table Driven by Means of Walking Drive, Annals of the CIRP, 49, 1 (2000) 299. – reference: 10) A.E. Ennos and M.S. Vidree : High accuracy profile measurement of quasi-conical mirror surfaces by laser autocollimation, Precision Engineering, 4, 1 (1982) 5. – reference: 12) W. Gao, T. Araki, S. Kiyono, Y. Okazaki, M. Yamanaka : Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder, Precision Engineering, 27, (2003) 289. – ident: 5 doi: 10.1016/j.precisioneng.2003.12.003 – ident: 10 doi: 10.1016/0141-6359(82)90106-4 – volume: 49 start-page: 299 issn: 0007-8506 year: 2000 ident: 7 publication-title: Annals of the CIRP doi: 10.1016/S0007-8506(07)62950-3 – volume: 53 start-page: 425 issn: 0007-8506 year: 2004 ident: 13 publication-title: Annals of the CIRP doi: 10.1016/S0007-8506(07)60731-8 – ident: 8 doi: 10.1016/S0141-6359(98)00009-9 – volume: 52 start-page: 435 issn: 0007-8506 year: 2003 ident: 4 publication-title: Annals of the CIRP doi: 10.1016/S0007-8506(07)60619-2 – volume: 67 start-page: 188 issn: 0912-0289 issue: 2 year: 2001 ident: 6 publication-title: 精密工学会誌 doi: 10.2493/jjspe.67.188 – volume: 42 start-page: 753 issn: 0007-8506 year: 1993 ident: 1 publication-title: Annals of the CIRP doi: 10.1016/S0007-8506(07)62538-4 – volume: 68 start-page: 69 issn: 0912-0289 year: 2002 ident: 3 publication-title: 精密工学会誌 – volume: 257-258 start-page: 219 issn: 1013-9826 year: 2004 ident: 11 publication-title: Key Engineering Materials doi: 10.4028/www.scientific.net/KEM.257-258.219 – volume: 42 start-page: 44 issn: 1344-7653 issue: 1 year: 1999 ident: 2 publication-title: JSME international journal. Series C doi: 10.1299/jsmec.42.44 – volume: 44 start-page: 7 issn: 0374-3543 year: 1978 ident: 9 publication-title: 精密機械 – ident: 12 doi: 10.1016/S0141-6359(03)00028-X |
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| Title | A Surface Encoder Based on Wave Optics |
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