A Novel Approach for Thin 4H-SiC Foil Realization Using Controlled Spalling from a 4H-SiC Wafer - Pfusterschmied, Georg; Schmid, Ulrich; Leitgeb, Markus; Wahid, Shan Nizam (Materials science forum, 2024)
Keywords: Chemical etching; Silicon carbide; Spalling; 4H-SiC; Ni Plating; Thin Foil; MAPCE; Controlled Spalling