A mathematical model on improved material removal mechanism in fixed agglomerated diamond abrasive lapping

• Published in: Precision engineering Vol. 96; pp. 822 - 839
• Main Authors: Chen, Jiapeng, Peng, Yanan, Wei, Ying, Ding, Yulong, Dai, Ke, Liu, Bing, Bie, Wenbo, Su, Jianxiu
• Format: Journal Article
• Language: English
• Published: Elsevier Inc 01.10.2025
• Subjects: Agglomerated diamond; Contact mechanics; Crystal diamond; Fixed abrasive lapping; Single; Crystal diamond; Fixed abrasive lapping; Agglomerated diamond; Single; Contact mechanics

The manufacture of agglomerated diamond (AD) abrasives involves the combination of ceramic adhesives with single - crystal diamond (SCD) abrasives. This combination results in an abrasive that plays a pivotal role in the semiconductor production process, thus making it an integral material in the ma...