Fabrication of high-quality Al-polar and N-polar AlN templates through self-forming tiny-pit layers and polarity inversion

• Published in: Journal of applied physics Vol. 136; no. 2
• Main Authors: Okada, Narihito, Hidaka, Ryota, Kowaki, Taketo, Saito, Takahiro, Sugawara, Yoshihiro, Yokoe, Daisaku, Yao, Yongzhao, Ishikawa, Yukari, Kurai, Satoshi, Yamada, Yoichi, Tadatomo, Kazuyuki
• Format: Journal Article
• Language: English
• Published: 14.07.2024

A fabrication technique for high-quality AlN templates using only metalorganic vapor phase epitaxy, which involves a tiny-pit AlN layer optimized by changing the growth temperature and V/III ratio, is proposed. Combining the tiny-pit AlN layer with the main AlN layer can be beneficial for achieving...